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1. 发明授权

US07164961B2 Modified photolithography movement system 失效
标题翻译：修改光刻移动系统
公开(公告)号：US07164961B2
公开(公告)日：2007-01-16
申请号：US10064156
申请日：2002-06-14
申请人： Wenhui Mei , Akira Ishikawa
发明人： Wenhui Mei , Akira Ishikawa
IPC分类号： G06F19/00
CPC分类号： G03F7/70291 , G03F7/70358
摘要： A method and system is provided for moving a substrate relative to a pixel panel in a digital photolithography system. The method can be used for performing photolithography on a substrate, the substrate having a first portion with a first design resolution and a second portion with a second design resolution. The method includes scanning the first portion of the substrate, having the first design resolution, at a first speed and scanning the second portion of the substrate, having the second design resolution, at a second speed, different from the first.
摘要翻译：提供了一种用于在数字光刻系统中相对于像素面板移动衬底的方法和系统。该方法可用于在衬底上进行光刻，该衬底具有第一部分和第二部分，具有第一设计分辨率。该方法包括以第一速度扫描具有第一设计分辨率的基板的第一部分，并以不同于第一速度的第二速度扫描具有第二设计分辨率的基板的第二部分。

2. 发明授权

US06606739B2 Scaling method for a digital photolithography system 有权
公开(公告)号：US06606739B2
公开(公告)日：2003-08-12
申请号：US10028479
申请日：2001-12-19
申请人： Takashi Kanatake , Wenhui Mei , Akira Ishikawa
发明人： Takashi Kanatake , Wenhui Mei , Akira Ishikawa
IPC分类号： G06F1750
CPC分类号： G03F7/704 , G03F7/2002 , G03F7/70291 , G03F7/70466
摘要： A method for scaling a pixel location in a digital photolithography system by rotating a pixel panel is provided. The method determines the angle of rotation of the pixel panel relative to a subject and calculates the original location of the pixel to be scaled. The method calculates the desired location of the pixel and determines the angle through which the pixel panel should be rotated to align the pixel with the desired location in a first dimension. The scan rate of the pixel panel and the subject is altered to align the pixel with the desired location in a second dimension.

3. 发明授权

US08994916B2 Double-sided maskless exposure system and method 有权
标题翻译：双面无掩模曝光系统及方法
公开(公告)号：US08994916B2
公开(公告)日：2015-03-31
申请号：US13523924
申请日：2012-06-15
申请人： Wenhui Mei , Weichong Du , Lujie Qu
发明人： Wenhui Mei , Weichong Du , Lujie Qu
IPC分类号： G03F7/20 , G03F9/00
CPC分类号： G03F7/2032 , G03F7/2057 , G03F7/70275 , G03F7/70291 , G03F7/70425 , G03F9/00 , G03F9/7088
摘要： A double-sided maskless exposure system and method consists of light sources which includes two light wavelength segments, maskless optical engines in which a 2D spatial light modulation (spatial light modulator) device, such as DMD, is generating a plurality of pixel array of the pattern, vision system, moving substrate and computer control system. The double-sided maskless exposure system at least includes two maskless optical engines with auto-calibration function which can correct any alignment error in-line. Each optical engine is for each side of the substrate. The optical engines are aligned each other in pairs and are simultaneously patterning on each side of the moving substrate. The system also includes a manipulator for moving, stepping or scanning the optical engines, relative to the substrate so that it can create a contiguous whole image on the both sides of the subject.
摘要翻译：双面无掩模曝光系统和方法由包括两个光波长段的光源组成，其中2D空间光调制（空间光调制器）设备（诸如DMD）正在产生多个像素阵列的无掩模光学引擎图案，视觉系统，移动基板和计算机控制系统。双面无掩模曝光系统至少包括具有自动校正功能的两个无掩模光学引擎，可以校正任何对准误差。每个光学引擎用于衬底的每一侧。光学引擎成对地彼此对准，并且在移动的基板的每一侧上同时进行图案化。该系统还包括用于相对于基板移动，步进或扫描光学引擎的操纵器，使得其可以在对象的两侧上创建连续的整个图像。

4. 发明授权

US07932993B2 Divided sub-image array scanning and exposing system 有权
标题翻译：分割子图像阵列扫描和曝光系统
公开(公告)号：US07932993B2
公开(公告)日：2011-04-26
申请号：US11522215
申请日：2006-09-16
申请人： Wenhui Mei
发明人： Wenhui Mei
IPC分类号： G03B27/42
CPC分类号： G03B27/54 , G03F7/70291
摘要： An “image writing” and “image reading” system and method for providing a pattern to a subject such as a wafer is provided or an image to an image sensor such as CCD. The system includes a pixel panel, such as a digital mirror device or a liquid crystal display or other SLM, for generating for creating a plurality of sub-image array of the pattern in “image writing” case. The pixel elements are simultaneously divided to a sub-image array on the subject by a lens system. The system also includes a stage for moving, stepping or scanning the pixel panel, relative to the subject so that it can create a contiguous whole image on the subject.
摘要翻译：还提供了将诸如晶片的对象提供图案的“图像写入”和“图像读取”系统和方法，或者将诸如CCD的图像传感器的图像提供给图像。该系统包括诸如数字镜装置或液晶显示器或其他SLM的像素面板，用于在“图像写入”情况下生成用于创建图案的多个子图像阵列。像素元件通过透镜系统被同时划分为被摄体上的子图像阵列。该系统还包括相对于被摄体移动，步进或扫描像素面板的阶段，使得其可以在对象上创建连续的整个图像。

5. 发明授权

US06473237B2 Point array maskless lithography 有权
公开(公告)号：US06473237B2
公开(公告)日：2002-10-29
申请号：US09801516
申请日：2001-03-08
申请人： Wenhui Mei
发明人： Wenhui Mei
IPC分类号： G02B2710
CPC分类号： G03F7/70375 , G02B26/0841 , G02B27/4222 , G03F7/2002 , G03F7/70291 , G03F7/704 , G03F7/70466
摘要： A system for performing digital lithography onto a subject is provided. The system includes a noncoherent light source for producing a first light and an optical diffraction element for individually focusing the first light into a plurality of second lights. The system also includes a pixel panel for generating a digital pattern, the pixel panel having a plurality of pixels corresponding to the plurality of second lights. A lens system may then direct the digital pattern to the subject, thereby enabling the lithography.

6. 发明授权

US06433917B1 Light modulation device and system 有权
标题翻译：光调制装置及系统
公开(公告)号：US06433917B1
公开(公告)日：2002-08-13
申请号：US09718619
申请日：2000-11-22
申请人： Wenhui Mei , Kin Foong Chan
发明人： Wenhui Mei , Kin Foong Chan
IPC分类号： G02B2608
CPC分类号： G03F7/70291 , G02B6/3516 , G02B6/357 , G02B6/3584 , G02B26/0841 , G03F7/70375
摘要： A light modulation element, device, and system is discussed. The light modulation element includes three electrodes, a flexible member, and a mirror. The flexible member is connected between the three electrodes so that the first and second electrodes are on one side and the third electrode is on the opposite side of the flexible member. The mirror is attached to the flexible member so that it can move therewith. The flexible member moves responsive to an external electrostatic force provided by one or more of the three electrodes so that the mirror is positioned in a predetermined position responsive to the state of the flexible member.
摘要翻译：讨论了光调制元件，器件和系统。光调制元件包括三个电极，柔性元件和反射镜。柔性构件连接在三个电极之间，使得第一和第二电极在一侧，并且第三电极位于柔性构件的相对侧上。镜子附接到柔性构件，使得其可随之移动。柔性构件响应于由三个电极中的一个或多个提供的外部静电力移动，使得反射镜响应于柔性构件的状态而定位在预定位置。

7. 发明授权

US06379867B1 Moving exposure system and method for maskless lithography system 有权
标题翻译：无掩模光刻系统的移动曝光系统和方法
公开(公告)号：US06379867B1
公开(公告)日：2002-04-30
申请号：US09480796
申请日：2000-01-10
申请人： Wenhui Mei , Takashi Kanatake , Akira Ishikawa
发明人： Wenhui Mei , Takashi Kanatake , Akira Ishikawa
IPC分类号： G03F902
CPC分类号： G03F7/70275 , G03F7/70291 , G03F7/70425
摘要： A photolithography system and method for providing a mask image to a subject such as a wafer is provided. The mask images are divided into sub-patterns and sequentially provided to a pixel panel, such as a deformable mirror device or a liquid crystal display. The pixel panel converts each sub-pattern into a plurality of pixel elements. Each of the pixel elements is then simultaneously focused to discrete, non-contiguous portions of the subject through a microlense array. The subject and pixel elements are then moved (e.g., one or both may be moved) and the next sub-pattern in the sequence is provided to the pixel panel. As a result, light can be projected on the subject, according to the pixel elements, to create a contiguous image on the subject.
摘要翻译：提供了一种用于向诸如晶片的对象提供掩模图像的光刻系统和方法。掩模图像被分成子图案，并且顺序地提供给诸如可变形反射镜装置或液晶显示器的像素面板。像素面板将每个子图案转换成多个像素元件。然后，每个像素元件通过微透镜阵列同时聚焦到对象的离散的，非连续的部分。然后移动对象和像素元素（例如，可以移动一个或两个），并且将序列中的下一个子图案提供给像素面板。结果，可以根据像素元素将光投影到被摄体上，以在对象上创建连续的图像。

8. 发明授权

US07062094B2 System and method for lossless data transmission 有权
公开(公告)号：US07062094B2
公开(公告)日：2006-06-13
申请号：US09683789
申请日：2002-02-14
申请人： Xiaoqi Zhou , Wenhui Mei , Takashi Kanatake , Kin Foong Chan
发明人： Xiaoqi Zhou , Wenhui Mei , Takashi Kanatake , Kin Foong Chan
IPC分类号： G06K9/36 , H04N1/413
CPC分类号： H04N1/417 , H04N19/507 , H04N19/94
摘要： A method for losslessly transmitting data is provided. The data is separated into two or more portions and the second portion is subtracted from the first portion to find a difference. The first portion and the difference are transmitted, and then the second portion is reconstructed by adding the difference to the first portion. The data may comprise two or more images, with each image being a temporally displaced version of the preceding image. Each image may be divided into multiple areas, where the areas on each image correspond to the areas on the other images. A difference may be obtained by subtracting each area of an image from the corresponding area of the preceding image. The first image may then be transferred as a reference image along with the differences, and each image may be reconstructed by adding each difference to the corresponding area of the previous image.

9. 发明授权

US06965387B2 Real time data conversion for a digital display 有权
标题翻译：数字显示的实时数据转换
公开(公告)号：US06965387B2
公开(公告)日：2005-11-15
申请号：US09923233
申请日：2001-08-03
申请人： Wenhui Mei , Chad W. Mueller
发明人： Wenhui Mei , Chad W. Mueller
IPC分类号： G03F7/20 , G09G5/00
CPC分类号： G03F7/70291
摘要： A system and method for extracting and manipulating image data is provided. A pixel panel is rotated so as to increase a resolution of a projected image. The rotation may be calculated so as to achieve a desired resolution. A portion of the image is retrieved from a memory and an address is calculated for either the portion or discrete bits in order to determine where the bits should appear on the pixel panel. The manipulated bits are transferred to a buffer, which may be a line or frame buffer, and from the buffer to the pixel panel. One or more shift registers may be used to shift the bits into the buffer.
摘要翻译：提供了一种用于提取和操纵图像数据的系统和方法。旋转像素面板以增加投影图像的分辨率。可以计算旋转以便实现期望的分辨率。从存储器检索图像的一部分，并且为部分或离散比特计算地址，以便确定比特应在像素面板上出现的位置。被操纵的位被传送到缓冲器，其可以是线或帧缓冲器，并且从缓冲器传送到像素面板。可以使用一个或多个移位寄存器来将位移位到缓冲器中。

10. 发明授权

US06498643B1 Spherical surface inspection system 失效
标题翻译：球面检测系统
公开(公告)号：US06498643B1
公开(公告)日：2002-12-24
申请号：US09711626
申请日：2000-11-13
申请人： Wenhui Mei , Bright Qi , Bei Chen
发明人： Wenhui Mei , Bright Qi , Bei Chen
IPC分类号： G01N2101
CPC分类号： G01N21/951
摘要： Method and apparatus are described for a spherical surface inspection system comprising a controller having software, an optical sensor connected to the controller, and an inspection device disposed adjacent to the optical sensor, and connected to the controller. The inspection device is for retaining and rotating the spherical-shaped object along a first axis to allow the optical sensor to convey an image of a portion of the surface of the spherical-shaped object to the controller. The inspection device also rotates the spherical-shaped object along a second axis to convey an image of more of the surface of the spherical-shaped object to the controller.
摘要翻译：描述了一种用于球面测量系统的方法和装置，该系统包括具有软件的控制器，连接到控制器的光学传感器和邻近光学传感器设置并连接到控制器的检查装置。检查装置用于沿着第一轴线保持和旋转球形物体，以允许光学传感器将球形物体表面的一部分的图像传送到控制器。检查装置还使球形物体沿着第二轴线旋转，以将球形物体的更多表面的图像传送到控制器。

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