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    • 1. 发明授权
    • MEMS scan controller generating clock frequency and control method thereof
    • MEMS扫描控制器产生时钟频率及其控制方法
    • US08143561B2
    • 2012-03-27
    • US12254564
    • 2008-10-20
    • Wei-Shin Yen
    • Wei-Shin Yen
    • G01J1/16G02B26/10
    • G02B26/105
    • A Micro Electronic Mechanical System (MEMS) scan controller generating clock frequency and a control method thereof are disclosed. The MEMS scan controller is for a MEMS mirror in a bi-direction laser scanning units (LSU). By detecting resonant frequency of the MEMS mirror, the scan controller sends frequency modulation signal and amplitude modulation signal of the MEMS mirror to a bridge circuit of the MEMS mirror for adjusting and stabilizing the MEMS mirror. A clock signal corresponding to the resonant frequency of the MEMS mirror at the moment is also sent so that scan data is sent within the effective scanning window in forward direction/reverse direction. Thus high-precision scanning is achieved.
    • 公开了一种产生时钟频率的微电子机械系统(MEMS)扫描控制器及其控制方法。 MEMS扫描控制器用于双向激光扫描单元(LSU)中的MEMS反射镜。 通过检测MEMS反射镜的谐振频率,扫描控制器将MEMS反射镜的调频信号和幅度调制信号发送到MEMS反射镜的桥接电路,用于调整和稳定MEMS反射镜。 此时也发送对应于MEMS反射镜的谐振频率的时钟信号,使得扫描数据在有效扫描窗口内沿正向/反向发送。 从而实现高精度扫描。
    • 3. 发明申请
    • MEMS Scan Controller Generating Clock Frequency and Control Method Thereof
    • MEMS扫描控制器生成时钟频率及其控制方法
    • US20110127404A1
    • 2011-06-02
    • US12254564
    • 2008-10-20
    • Wei-Shin YEN
    • Wei-Shin YEN
    • G01J1/16G02B26/10
    • G02B26/105
    • A Micro Electronic Mechanical System (MEMS) scan controller generating clock frequency and a control method thereof are disclosed. The MEMS scan controller is for a MEMS mirror in a bi-direction laser scanning units (LSU). By detecting resonant frequency of the MEMS mirror, the scan controller sends frequency modulation signal and amplitude modulation signal of the MEMS mirror to a bridge circuit of the MEMS mirror for adjusting and stabilizing the MEMS mirror. A clock signal corresponding to the resonant frequency of the MEMS mirror at the moment is also sent so that scan data is sent within the effective scanning window in forward direction/reverse direction. Thus high-precision scanning is achieved.
    • 公开了一种产生时钟频率的微电子机械系统(MEMS)扫描控制器及其控制方法。 MEMS扫描控制器用于双向激光扫描单元(LSU)中的MEMS反射镜。 通过检测MEMS反射镜的谐振频率,扫描控制器将MEMS反射镜的调频信号和幅度调制信号发送到MEMS反射镜的桥接电路,用于调整和稳定MEMS反射镜。 此时也发送对应于MEMS反射镜的谐振频率的时钟信号,使得扫描数据在有效扫描窗口内沿正向/反向发送。 从而实现高精度扫描。