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    • 1. 发明申请
    • CAP FOR A MICROELECTROMECHANICAL SYSTEM DEVICE WITH ELECTROMAGNETIC SHIELDING, AND METHOD OF MANUFACTURE
    • 具有电磁屏蔽的微电子电子系统装置的封装及其制造方法
    • US20130322039A1
    • 2013-12-05
    • US13485631
    • 2012-05-31
    • Jerome TeysseyreGlenn de los ReyesWee Chin Judy Lim
    • Jerome TeysseyreGlenn de los ReyesWee Chin Judy Lim
    • H05K5/02B05D5/12B32B37/10H05K9/00B32B37/02
    • H05K9/003
    • A cap for a microelectromechanical system device includes a first layer of, e.g., Bismaleimide Triazine (BT) resin material in which a through-aperture is formed, laminated to a second layer of BT resin material that closes the aperture in the first layer, forming a cavity. The first and second layers are laminated with a thermosetting adhesive that is sufficiently thick to encapsulate particles that may remain from a routing operation for forming the apertures. The interior of the cavity, including exposed portions of the adhesive, and the exposed face of the first layer are coated with an electrically conductive paint. The cap is adhered to a substrate over the MEMS device using an electrically conductive adhesive, which couples the conductive paint layer to a ground plane of the substrate. The layer of conductive paint serves as a shield to prevent or reduce electromagnetic interference acting on the MEMS device.
    • 用于微机电系统装置的盖子包括第一层,例如其中形成有通孔的双马来酰亚胺三嗪(BT)树脂材料,层压到封闭第一层中的孔的第二层BT树脂材料上,形成 一个空腔。 第一层和第二层与热固性粘合剂层压,该热固性粘合剂足够厚以封装可以从用于形成孔的路由操作保留的颗粒。 空腔的内部,包括粘合剂的暴露部分和第一层的暴露表面涂覆有导电涂料。 使用导电粘合剂将盖子粘附到MEMS装置上的基板上,导电粘合剂将导电涂料层耦合到基板的接地平面。 导电涂料层用作屏蔽,以防止或减少作用在MEMS器件上的电磁干扰。
    • 4. 发明授权
    • Cap for a microelectromechanical system device with electromagnetic shielding, and method of manufacture
    • 用于具有电磁屏蔽的微机电系统装置及其制造方法
    • US08987871B2
    • 2015-03-24
    • US13485631
    • 2012-05-31
    • Jerome TeysseyreGlenn de los ReyesWee Chin Judy Lim
    • Jerome TeysseyreGlenn de los ReyesWee Chin Judy Lim
    • H01L23/60H05K9/00
    • H05K9/003
    • A cap for a microelectromechanical system device includes a first layer of, e.g., Bismaleimide Triazine (BT) resin material in which a through-aperture is formed, laminated to a second layer of BT resin material that closes the aperture in the first layer, forming a cavity. The first and second layers are laminated with a thermosetting adhesive that is sufficiently thick to encapsulate particles that may remain from a routing operation for forming the apertures. The interior of the cavity, including exposed portions of the adhesive, and the exposed face of the first layer are coated with an electrically conductive paint. The cap is adhered to a substrate over the MEMS device using an electrically conductive adhesive, which couples the conductive paint layer to a ground plane of the substrate. The layer of conductive paint serves as a shield to prevent or reduce electromagnetic interference acting on the MEMS device.
    • 用于微机电系统装置的盖子包括第一层,例如其中形成有通孔的双马来酰亚胺三嗪(BT)树脂材料,层压到封闭第一层中的孔的第二层BT树脂材料上,形成 一个空腔。 第一层和第二层与热固性粘合剂层压,该热固性粘合剂足够厚以封装可以从用于形成孔的路由操作保留的颗粒。 空腔的内部,包括粘合剂的暴露部分和第一层的暴露表面涂覆有导电涂料。 使用导电粘合剂将盖子粘附到MEMS装置上的基板上,导电粘合剂将导电涂料层耦合到基板的接地平面。 导电涂料层用作屏蔽,以防止或减少作用在MEMS器件上的电磁干扰。