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    • 5. 发明授权
    • Precision multi-dimensional capacitive transducer
    • 精密多维电容式换能器
    • US06820493B1
    • 2004-11-23
    • US09413494
    • 1999-10-06
    • Wayne Bonin
    • Wayne Bonin
    • G01L1904
    • G01B7/22G01L1/144G01L5/165
    • A high precision force and displacement measuring device adapted to operate in at least two directions, including signal multiplexing scheme providing multiple signal channels to be transmitted through a single pickup electrode and sense amplifier, while maintaining high isolation between the channels, as well as identical electrical response characteristics of all channels. The device may be used in conjunction with a movable stage (such as on an optical microscope) to perform mechanical measurements on Micro Electro-Mechanical Systems (MEMS) devices.
    • 一种适用于至少两个方向操作的高精度力和位移测量装置,包括提供多个信号通道的信号复用方案,以通过单个拾取电极和感测放大器传输,同时保持通道之间的高隔离度,以及相同的电气 所有通道的响应特性。 该装置可以与可移动台(诸如在光学显微镜上)结合使用以对微机电系统(MEMS)装置进行机械测量。
    • 7. 发明申请
    • PROBE WITH BIDIRECTIONAL ELECTROSTATIC ACTUATION
    • 具有双向静电激励的探头
    • US20100123470A1
    • 2010-05-20
    • US12272128
    • 2008-11-17
    • Dadi SetiadiWayne Bonin
    • Dadi SetiadiWayne Bonin
    • G01R31/02
    • G01R1/06733G01R1/06716G01R1/06744
    • A probe system that has a probe body comprising at least three arms extending from a central region and a probe tip centrally located on the probe body in the central region. A substrate is proximate the probe body opposite the probe tip. A first electrode is positioned to provide a centrally positioned voltage across the probe body and the substrate and a second electrode set is positioned radially outward from the first electrode, to provide an outer voltage across at least one of the at least three arms and the substrate. The probe structure may have, for example, four arms. Methods of actuating the probe tip are provided.
    • 探针系统,其具有探针体,该探针体包括从中心区域延伸的至少三个臂和在中心区域中心位于探针主体上的探针末端。 衬底靠近与探针尖端相对的探针体。 定位第一电极以提供穿过探针主体和衬底的中心定位的电压,并且第二电极组从第一电极径向向外定位,以提供穿过至少三个臂中的至少一个臂和衬底的外部电压 。 探针结构可以具有例如四个臂。 提供致动探针尖端的方法。
    • 9. 发明授权
    • Monocoque head suspension
    • Monocoque头部悬挂
    • US06731465B2
    • 2004-05-04
    • US10041658
    • 2001-10-24
    • Peter CraneZine-Eddine BoutaghouWayne BoninMarkus Mangold
    • Peter CraneZine-Eddine BoutaghouWayne BoninMarkus Mangold
    • G11B2116
    • G11B5/4833G11B5/484
    • A monocoque head suspension carries a read-write head on a distal end and is attachable at a proximal end to an actuator assembly. The monocoque head suspension includes a bottom skin and a top skin, and also a core positioned between the bottom and top skins. The core has voids therein that form hollow regions between the bottom and top skins. The core may be made of low-density material, such as photo-imageable epoxy, polyamide or polyimide, deposited on the bottom skin, or may be a separately formed piece. The bottom skin and top skin may be made of a stainless steel material. The monocoque head suspension may be a component of an assembly to store data to a magnetic medium and read data from the medium.
    • 单体式头部悬架在远端上携带读写头,并且可以在近端附接到致动器组件。 单体头部悬挂包括底部皮肤和顶部皮肤,以及位于底部和顶部皮肤之间的芯部。 芯部具有在底部和顶部表皮之间形成中空区域的空隙。 芯可以由低密度材料制成,例如沉积在底部皮肤上的可光致成像环氧树脂,聚酰胺或聚酰亚胺,或者可以是单独形成的片。 底部皮肤和顶部皮肤可以由不锈钢材料制成。 单体式头悬架可以是组件的组件,用于将数据存储到磁介质并从介质读取数据。