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1. 发明申请

US20060058196A1 Method for detection and imaging over a broad spectral range 失效
标题翻译：在宽光谱范围内进行检测和成像的方法
公开(公告)号：US20060058196A1
公开(公告)日：2006-03-16
申请号：US11190784
申请日：2005-07-27
申请人： Volodymyr Yefremenko , Eduard Gordiyenko , Vitalii Pishko , Olga Pishko , Valentyn Novosad
发明人： Volodymyr Yefremenko , Eduard Gordiyenko , Vitalii Pishko , Olga Pishko , Valentyn Novosad
IPC分类号： H01L39/22
CPC分类号： G01J5/20 , G01J5/061 , G01J2005/0077
摘要： A method of controlling the coordinate sensitivity in a superconducting microbolometer employs localized light, heating or magnetic field effects to form normal or mixed state regions on a superconducting film and to control the spatial location. Electron beam lithography and wet chemical etching were applied as pattern transfer processes in epitaxial Y—Ba—Cu—O films. Two different sensor designs were tested: (i) a 3 millimeter long and 40 micrometer wide stripe and (ii) a 1.25 millimeters long, and 50 micron wide meandering-like structure. Scanning the laser beam along the stripe leads to physical displacement of the sensitive area, and, therefore, may be used as a basis for imaging over a broad spectral range. Forming the superconducting film as a meandering structure provides the equivalent of a two-dimensional detector array. Advantages of this approach are simplicity of detector fabrication, and simplicity of the read-out process requiring only two electrical terminals.
摘要翻译：在超导微量热计中控制坐标灵敏度的方法采用局部光，加热或磁场效应，在超导薄膜上形成正常或混合状态区域并控制空间位置。在外延Y-Ba-Cu-O膜中作为图案转移工艺应用电子束光刻和湿化学蚀刻。测试了两种不同的传感器设计：（i）3毫米长和40微米宽的条纹和（ii）1.25毫米长和50微米宽的曲折状结构。沿着条纹扫描激光束导致敏感区域的物理位移，因此可以用作在宽光谱范围内成像的基础。将超导膜形成为曲折结构提供了相当于二维检测器阵列。这种方法的优点是检测器制造的简单性，以及只需要两个电气端子的读出过程的简单性。

2. 发明授权

US07274019B2 Method for detection and imaging over a broad spectral range 失效
标题翻译：在宽光谱范围内进行检测和成像的方法
公开(公告)号：US07274019B2
公开(公告)日：2007-09-25
申请号：US11190784
申请日：2005-07-27
申请人： Volodymyr Yefremenko , Eduard Gordiyenko , Olga Pishko, legal representative , Valentyn Novosad
发明人： Vitalii Pishko, deceased
IPC分类号： H01L27/18
CPC分类号： G01J5/20 , G01J5/061 , G01J2005/0077
摘要： A method of controlling the coordinate sensitivity in a superconducting microbolometer employs localized light, heating or magnetic field effects to form normal or mixed state regions on a superconducting film and to control the spatial location. Electron beam lithography and wet chemical etching were applied as pattern transfer processes in epitaxial Y—Ba—Cu—O films. Two different sensor designs were tested: (i) a 3 millimeter long and 40 micrometer wide stripe and (ii) a 1.25 millimeters long, and 50 micron wide meandering-like structure. Scanning the laser beam along the stripe leads to physical displacement of the sensitive area, and, therefore, may be used as a basis for imaging over a broad spectral range. Forming the superconducting film as a meandering structure provides the equivalent of a two-dimensional detector array. Advantages of this approach are simplicity of detector fabrication, and simplicity of the read-out process requiring only two electrical terminals.
摘要翻译：在超导微量热计中控制坐标灵敏度的方法采用局部光，加热或磁场效应，以在超导薄膜上形成正常或混合状态区域并控制空间位置。在外延Y-Ba-Cu-O膜中作为图案转移工艺应用电子束光刻和湿化学蚀刻。测试了两种不同的传感器设计：（i）3毫米长和40微米宽的条纹和（ii）1.25毫米长和50微米宽的曲折状结构。沿着条纹扫描激光束导致敏感区域的物理位移，因此可以用作在宽光谱范围内成像的基础。将超导膜形成为曲折结构提供了相当于二维检测器阵列。这种方法的优点是检测器制造的简单性，以及只需要两个电气端子的读出过程的简单性。

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