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1. 发明授权

US5715929A Charging device for semiconductor processing installations 失效
标题翻译：半导体加工设备的充电装置
公开(公告)号：US5715929A
公开(公告)日：1998-02-10
申请号：US430407
申请日：1995-04-28
申请人： Werner Scheler , Volker Schlehahn , Peter Fabian , Hans-Joachim Weske
发明人： Werner Scheler , Volker Schlehahn , Peter Fabian , Hans-Joachim Weske
IPC分类号： B65G49/07 , H01L21/677 , B65G47/24
CPC分类号： H01L21/67781 , Y10S414/14
摘要： The object of a charging device for semiconductor processing installations is to increase the flexibility of the charging process while excluding negative influences on dependability and clean room conditions. At least in a portion of the movement of a linearly movable part which is supported by a stationary part of a drive for transferring a transport object between two end positions, a gripper for the transport object being attached to the movable part, a rotating movement of the gripper is combined with the linear movement. The device is provided in particular for use in the fabrication of semiconductors.
摘要翻译：用于半导体处理装置的充电装置的目的是增加充电过程的灵活性，同时排除对可靠性和洁净室条件的不利影响。至少在由用于在两个端部位置之间传送运输物体的驱动器的固定部分支撑的线性可移动部分的运动的一部分中，用于输送物体的夹持器附接到可移动部件，旋转运动夹具与线性运动相结合。该器件特别用于制造半导体。

2. 发明授权

US06419439B2 Indexer for magazine shelves of a magazine and wafer-shaped objects contained therein 失效
标题翻译：杂志的杂志架索引器和包含在其中的晶圆形物体
公开(公告)号：US06419439B2
公开(公告)日：2002-07-16
申请号：US08687643
申请日：1996-07-26
申请人： Volker Schlehahn , Klaus Schultz
发明人： Volker Schlehahn , Klaus Schultz
IPC分类号： H01J4014
CPC分类号： H01L21/67265 , H01L21/67778 , Y10S414/113
摘要： An indexer for magazine shelves of a magazine and wafer-shaped objects contained therein has the object of ensuring accurate access in any desired and predeterminable magazine plane, also for magazines which are provided with an opening on only one removing and charging side, by means of an all-purpose indexing, wherein it is possible to differentiate between various standardized magazine and wafer formats. The magazine shelves and the wafer-shaped objects are detected by an optoelectronic sensor arrangement, at least a portion of which is designed as a distance measuring system. The indexer is applicable in the manufacture of integrated circuits, in particular, for handling wafer-shaped objects in the form of semiconductors and masks.
摘要翻译：一种杂志的杂志架架索引器和包含在其中的晶片形物体的索引器的目标是确保在任何期望的和可预定的杂志平台上准确地访问，也可以是仅在一个移除和充电侧设置有开口的杂志，借助于一种多用途索引，其中可以区分各种标准化的杂志和晶片格式。杂志架和晶片形物体由光电传感器装置检测，光电传感器装置的至少一部分设计为测距系统。分度器适用于集成电路的制造，特别是用于处理半导体和掩模形式的晶圆形物体。

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