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1. 发明申请

US20070014073A1 Transfer-ESC based on a wafer 有权
标题翻译：转移ESC基于晶圆
公开(公告)号：US20070014073A1
公开(公告)日：2007-01-18
申请号：US11455208
申请日：2006-06-19
申请人： Udo Retzlaff
发明人： Udo Retzlaff
IPC分类号： H01T23/00
CPC分类号： H01L21/6833
摘要： A mobile transportable electrostatic chuck for clamping thin wafers (12) without permanent connection to an external power supply unit is described. The mobile chuck allows a safe handling of thin substrates on existing production equipment because the size and thickness of the clamped substrate on the mobile chuck is similar to a standard wafer. The chuck is made from silicon wafers itself as base material (11) using an IC manufacturing processes. Bipolar electrode-unit-cells (10), combined into clusters (4) and linked to an integrated fuse (5), generate a non-uniform electric field with additional force components. Peak-electrodes (1) are introduced with the highest field density in the peak region and thus creating a three dimensional non-uniform electric field with each surrounding electrode (3). Quadratic or hexagonal electrode-unit-cells (10) enable the highest dense of unit cells, which effectively clamp wafers (12) in close proximity to the surface (8a) of the chuck at elevated temperatures.
摘要翻译：描述了用于夹紧薄晶片（12）而不与外部电源单元永久连接的移动式可运输静电卡盘。移动卡盘允许在现有的生产设备上安全地处理薄的基板，因为可移动卡盘上夹持的基板的尺寸和厚度类似于标准晶片。卡盘由硅晶片本身作为基底材料（11），使用IC制造工艺。组合成簇（4）并连接到集成熔丝（5）的双极电极单元电池（10）产生具有附加力分量的不均匀电场。峰值电极（1）在峰值区域中以最高的场密度被引入，从而与每个周围电极（3）产生三维不均匀的电场。二次或六边形电极单元电池（10）能够实现最高密度的单元电池，其在高温下有效地将晶片（12）夹紧在卡盘的表面（8a）附近。

2. 发明授权

US06887360B2 Stable, reduced gloss electrocoat compositions and methods for using the same 有权
标题翻译：稳定的，光泽降低的电涂组合物及其使用方法
公开(公告)号：US06887360B2
公开(公告)日：2005-05-03
申请号：US09977139
申请日：2001-10-12
申请人： Udo Retzlaff , Anna K. Gaines
发明人： Udo Retzlaff , Anna K. Gaines
IPC分类号： C09D5/44 , C09D7/00 , C08F2/58 , C25D13/00 , C25D15/00
CPC分类号： C09D5/448 , C09D5/4411 , C09D7/42
摘要： Electrocoat compositions providing coatings having reduced gloss levels are disclosed. The reduction in gloss is achieved through the incorporation of a solid polymer additive to a standard electrocoat composition. The polymer additive includes particulate polyacrylate, particulate aliphatic polyurethane/polyurea copolymers, or mixtures thereof. Low and medium gloss compositions can be achieved. A paste containing these polymer additives is also disclosed. Methods for using these compositions are also disclosed, as are methods for reducing the gloss of an E-coat composition.
摘要翻译：公开了提供具有降低的光泽度的涂层的电涂层组合物。通过将固体聚合物添加剂并入标准电泳涂料组合物中来实现光泽度的降低。聚合物添加剂包括聚丙烯酸颗粒，脂族聚氨酯/聚脲共聚物，或其混合物。可以实现低和中等光泽组合物。还公开了含有这些聚合物添加剂的糊剂。还公开了使用这些组合物的方法，以及降低E涂层组合物的光泽度的方法。

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