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    • 5. 发明授权
    • Arc chamber for ion implanter
    • 离子注入机电弧室
    • US5892232A
    • 1999-04-06
    • US735981
    • 1996-10-25
    • Pei-Wei TsaiTzu-Hsin HuangHua-Jen TsengMin-Huei Lin
    • Pei-Wei TsaiTzu-Hsin HuangHua-Jen TsengMin-Huei Lin
    • H01J27/08H01J27/00
    • H01J27/08
    • An arc chamber including a reaction chamber, a filament element used to generate electrons, a first power supply means set for providing power to the filament element, a second power supply means utilized for creating a potential to increase the ionization efficiency, a plurality of gas injected openings set to inject suitable gas into the reaction chamber and be ionized in a gaseous plasma by impact from electrons, a first filament insulator, and three second filament insulators used for isolation. The first filament insulator includes a truncated corn portion and a ring portion. The truncated corn portion has a hole formed threrethrough itself. The ring portion is coaxially connected to the smaller surface of the truncated corn portion. The second filament insulator includes a truncated corn portion and two ring portions. Similarily, the truncated corn portion has a hole through formed therethrough. The ring portions are respectively coaxially connected to the two surfaces of the truncated corn portion. In the preferred embodiment, three first filament insulators and one second filament insulator are set on the filament element for isolation. The filament insulators are screwed into the filament element and exactly attached on the side wall of the reaction chamber.
    • 包括反应室,用于产生电子的灯丝元件的电弧室,用于向灯丝元件供电的第一电源装置,用于产生提高电离效率的电位的第二电源装置,多个气体 注入的开口设置成将合适的气体注入反应室,并通过来自电子的冲击,第一细丝绝缘体和用于隔离的三个第二长丝绝缘体在气态等离子体中离子化。 第一长丝绝缘体包括截顶玉米部分和环部分。 截断的玉米部分具有自身形成的孔。 环部分同轴连接到截顶玉米部分的较小表面。 第二长丝绝缘体包括截顶玉米部分和两个环部分。 类似地,截头玉米部分具有通过其形成的孔。 环部分别同轴地连接到截顶玉米部分的两个表面。 在优选实施例中,将三个第一灯丝绝缘体和一个第二灯丝绝缘体设置在灯丝元件上用于隔离。 灯丝绝缘子拧入灯丝元件并精确地附着在反应室的侧壁上。
    • 6. 发明授权
    • Metal bond pad for integrated circuits allowing improved probing ability of small pads
    • 用于集成电路的金属焊盘允许改善小焊盘的探测能力
    • US06952053B2
    • 2005-10-04
    • US10284350
    • 2002-10-31
    • Tzu Hsin HuangLiming TsauVincent Chen
    • Tzu Hsin HuangLiming TsauVincent Chen
    • H01L23/48H01L31/072
    • H01L24/05H01L22/32H01L24/11H01L2224/0401H01L2224/05001H01L2224/05073H01L2224/05554H01L2224/05558H01L2224/05624H01L2224/13099H01L2924/01005H01L2924/01006H01L2924/01013H01L2924/01015H01L2924/01029H01L2924/01033H01L2924/14H01L2924/00014
    • The present invention is a metal bond pad that provides electrical and mechanical connection to an integrated circuit (IC). The metal bond pad is configured to accommodate for probe travel during probing measurements, without modifying the size of the passivation opening of the bond pad. This enables higher density of active devices on the IC and therefore increases integration and lowers IC cost. The metal bond pad for the integrated circuit includes a substrate, a first metal layer, and a second metal layer. The substrate has the first metal layer disposed therein, having an opening from the top surface of the substrate. The second metal layer has a first-end portion, a second-end portion and a center portion disposed between the first-end portion and the second-end portion. The center portion of the second metal layer is aligned with the opening in the substrate and a bottom surface of the center portion is in contact with the top surface of the first metal layer. A top surface of the center portion has a recessed region that forms a first edge with said first-end portion and a second edge with said second-end portion. The first-end portion of the second metal layer is disposed on the top surface of the substrate and extends from the first edge of the recessed region. It has a length defined from the first edge of the opening. The second-end portion is also disposed on the top surface of the substrate and extends from the second edge of the recessed region. It has a length defined from the second edge of the recessed region, and it is longer than the length of the first-portion.
    • 本发明是提供与集成电路(IC)的电连接和机械连接的金属接合焊盘。 金属接合焊盘被配置为在探测测量期间适应探头行程,而不改变接合焊盘的钝化开口的尺寸。 这使得IC上的有源器件的密度更高,因此增加了集成度并降低了IC成本。 用于集成电路的金属焊盘包括衬底,第一金属层和第二金属层。 衬底具有设置在其中的第一金属层,具有从衬底的顶表面开口。 第二金属层具有设置在第一端部和第二端部之间的第一端部,第二端部和中心部。 第二金属层的中心部分与衬底中的开口对准,并且中心部分的底表面与第一金属层的顶表面接触。 中心部分的顶表面具有与所述第一端部分形成第一边缘的凹陷区域和具有所述第二端部分的第二边缘。 第二金属层的第一端部设置在基板的顶表面上并且从凹陷区域的第一边缘延伸。 它具有从开口的第一边缘限定的长度。 第二端部也设置在基板的顶表面上并且从凹陷区域的第二边缘延伸。 它具有从凹陷区域的第二边缘限定的长度,并且其长度大于第一部分的长度。
    • 7. 发明申请
    • HEAT PIPE STRUCTURE OF A HEAT RADIATOR
    • 散热器的热管结构
    • US20090050305A1
    • 2009-02-26
    • US11844946
    • 2007-08-24
    • Sin-Wei HeTzu-Hsin HuangYu-Chin Lin
    • Sin-Wei HeTzu-Hsin HuangYu-Chin Lin
    • F28F1/30
    • F28D15/0233F28D15/0275H01L23/3672H01L23/427H01L2924/0002H01L2924/00
    • The present invention provides a heat pipe structure of a heat radiator, which includes two vertically protruded radiating portions and heat-absorbing portions at a bottom of the two radiating portions. The heat-absorbing portions are assembled onto the heat-conducting pedestal. Two turning portions are formed at the intersection of the heat-absorbing portions and two radiating portions. The heat-absorbing portion has a curved shape. The heat-absorbing portions of adjacent heat pipes are misaligned, such that the turning portion of the heat-absorbing portion of one heat pipe aligns with the recessed space of the other heat pipe. A minimum of heat pipe assembly space obtains a maximum heating area, thus greatly improving the heat-radiating effect and reducing the manufacturing cost with better applicability and economic efficiency.
    • 本发明提供一种散热器的热管结构,其包括在两个辐射部分的底部的两个垂直突出的辐射部分和吸热部分。 吸热部分组装在导热基座上。 两个转动部分形成在吸热部分和两个辐射部分的相交处。 吸热部具有弯曲形状。 相邻热管的吸热部不对准,使得一个热管的吸热部的转动部与另一个热管的凹部空间对准。 最小热管组合空间可获得最大加热面积,从而大大提高散热效果,降低制造成本,具有更好的适用性和经济效益。