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1. 发明授权

US5302999A Illumination method, illumination apparatus and projection exposure apparatus 失效
标题翻译：照明方法，照明装置和投影曝光装置
公开(公告)号：US5302999A
公开(公告)日：1994-04-12
申请号：US9928
申请日：1993-01-27
申请人： Yoshitada Oshida , Tutomu Tawa , Yukihiro Shibata , Shigemi Ishii , Minori Noguchi , Tsuneo Terasawa , Makoto Murayama
发明人： Yoshitada Oshida , Tutomu Tawa , Yukihiro Shibata , Shigemi Ishii , Minori Noguchi , Tsuneo Terasawa , Makoto Murayama
IPC分类号： F21V8/00 , F21V13/12 , F21Y105/00 , G02B6/04 , G02B6/28 , G02B6/42 , G03B27/54 , G03F7/20 , G21K5/04 , G03B27/00
CPC分类号： G03F7/70058 , F21V13/12 , G02B6/0008 , G02B6/04 , G02B6/2808 , G02B6/4296 , G03F7/2057
摘要： A projection exposure apparatus comprises a light source for emitting a light beam for exposure; an illumination optical system comprising optical fiber bundle portion including a plurality of bundled optical fibers having an entrance plane to which a light beam exiting from the exposing light source is incident, and a little optical fiber bundle portion including a plurality of little optical fiber bundles respectively having an outgoing plane; and an projection exposure system for projecting a light beam passing through the illumination optical system and transmitting a mask or a reticle onto an object to be exposed as a pattern image of the mask or the reticle.
摘要翻译：投影曝光装置包括用于发射用于曝光的光束的光源; 一种照明光学系统，包括光纤束部分，该光纤束部分包括具有入射面的多个束状光纤，从该曝光光源射出的光束入射到该入射面，以及分别包括多个小光纤束的小光纤束部分有一个出局的飞机; 以及投影曝光系统，用于投影通过照明光学系统的光束，并将掩模或掩模版传送到待曝光的物体上作为掩模或掩模版的图案图像。

2. 发明授权

US4163308A Deflection yoke assembly positioning device 失效
标题翻译：偏转轭组件定位装置
公开(公告)号：US4163308A
公开(公告)日：1979-08-07
申请号：US884238
申请日：1978-03-07
申请人： Tutomu Tawa , Hiroshi Furukawa
发明人： Tutomu Tawa , Hiroshi Furukawa
IPC分类号： H01J9/44
CPC分类号： H01J9/44 , H01J2209/2366
摘要： A deflection yoke assembly positioning device which grasps the opening portion of flared portion of a deflection yoke assembly mounted on the funnel yoke portion of a color cathode-ray tube of a color television receiver in the steps of correction of inclination of the display screen, purity adjustment and convergence alignment. The device positions the deflection yoke assembly in the most desired position on the funnel yoke portion of the cathode-ray tube by causing rotating movement of the deflection yoke assembly around its axis, sliding movement of the deflection yoke assembly in the axial direction of the neck portion of the cathode-ray tube, and vertical and horizontal oscillating movement of the opening portion of the deflection yoke assembly relative to the axis of the neck portion of the cathode-ray tube.
摘要翻译：一种偏转线圈组件定位装置，其在校正显示屏倾斜的步骤中掌握安装在彩色电视机的彩色阴极射线管的漏斗轭部分上的偏转线圈组件的扩口部分的开口部分，调整和收敛一致。该装置通过使偏转线圈组件围绕其轴线旋转运动将偏转线圈组件定位在阴极射线管的漏斗轭部分的最理想位置，偏转线圈组件在颈部的轴向上的滑动运动阴极射线管的一部分，以及偏转线圈组件的开口部分相对于阴极射线管颈部的轴线的垂直和水平摆动运动。

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