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    • 2. 发明授权
    • Optical element with multilayer thin film and exposure apparatus with the element
    • 具有多层薄膜的光学元件和具有该元件的曝光装置
    • US06574039B1
    • 2003-06-03
    • US09856971
    • 2001-05-30
    • Tsuyoshi MurataHitoshi Ishizawa
    • Tsuyoshi MurataHitoshi Ishizawa
    • G02B508
    • G02B1/115B82Y10/00G02B1/10G02B5/283G03F7/70958G03F7/70983G21K1/062G21K2201/067
    • An optical element (1) of the present invention is provided with an optical substrate (10) and a multilayered optical thin film (11-16) formed on the optical substrate (10). An MgF2 layer (12, 16) of the multilayered optical thin film has a refractive index of 1.10 to 1.35, especially 1.15 to 1.25 with respect to a vacuum ultraviolet light beam having a wavelength of not more than 250 nm. Therefore, when the optical element (1) is used together with an excimer laser light beam having a wavelength of, for example, 248 nm (KrF), 193 nm (ArF), or 157 nm (F2), excellent optical characteristics are exhibited concerning, for example, the reflectance (anti-reflection), the polarization characteristics, and the dependency on the angle of incidence. The MgF2 layer (12, 16) can be produced in accordance with the sol-gel method. The optical element is preferably used for a projection lens of an exposure apparatus which uses the excimer laser light beam as a light source.
    • 本发明的光学元件(1)设置有形成在光学基板(10)上的光学基板(10)和多层光学薄膜(11-16)。 多层光学薄膜的MgF 2层(12,16)相对于波长不大于250nm的真空紫外光束的折射率为1.10〜1.35,特别是1.15〜1.25。 因此,当光学元件(1)与具有例如248nm(KrF),193nm(ArF)或157nm(F2)的波长的准分子激光束一起使用时,表现出优异的光学特性 涉及例如反射(抗反射),偏振特性以及对入射角的依赖性。 MgF2层(12,16)可以根据溶胶 - 凝胶法制备。 光学元件优选用于使用准分子激光束作为光源的曝光装置的投影透镜。
    • 3. 发明授权
    • Mixing faucet assembly
    • 水龙头组合
    • US07556061B2
    • 2009-07-07
    • US11564106
    • 2006-11-28
    • Kazunori MoritaTsuyoshi Murata
    • Kazunori MoritaTsuyoshi Murata
    • F16K11/06
    • F16K11/0782E03C1/04Y10T137/86549Y10T137/86815
    • Disclosed is a mixing faucet assembly (1), which comprises: a mixing valve unit (8) having at least two valve inlet ports (32b), a operating rod (24) and a valve outlet port (28); a faucet body (2) having at least two water-feed passages (2b), and a valve unit-receiving recess (2a) containing the mixing valve unit in such a manner as to receive mixture of hot and cold water discharged from the valve outlet port; a spout portion (6) formed to extend from an upper end of the faucet body in an approximately horizontal direction and have a spout-portion water passage (6a) for receiving the mixture discharged from the valve unit-receiving recess, and a spout port (4); and a load-supporting portion (2d) formed to protrude inwardly toward the inside of the valve unit-receiving recess in such a manner as to come into contact with an upper region of a lateral surface of the mixing valve unit on at least one side corresponding to a location of the spout portion to support the mixing valve unit. The present invention allows the mixing faucet assembly to be reduced in overall height dimension.
    • 公开了一种混合龙头组件(1),其包括:混合阀单元(8),其具有至少两个阀入口(32b),操作杆(24)和阀出口(28); 具有至少两个供水通道(2b)的水龙头本体(2)和容纳所述混合阀单元的阀单元容纳凹部(2a),以接收从所述阀排出的热水和冷水的混合物 出口口 形成为从水龙头本体的上端沿大致水平方向延伸的出口部分(6),并且具有用于接收从阀单元容纳凹部排出的混合物的喷口部水通道(6a),以及吐出口 (4); 以及负载支撑部(2d),其形成为朝向所述阀单元容纳凹部的内侧向内突出,以便在至少一个侧面与所述混合阀单元的侧表面的上部区域接触 对应于喷嘴部分的位置以支撑混合阀单元。 本发明允许混合龙头组件的整体高度尺寸减小。
    • 9. 发明申请
    • MIXING FAUCET ASSEMBLY
    • 混合龙头总成
    • US20070119507A1
    • 2007-05-31
    • US11564106
    • 2006-11-28
    • Kazunori MoritaTsuyoshi Murata
    • Kazunori MoritaTsuyoshi Murata
    • F16K11/078
    • F16K11/0782E03C1/04Y10T137/86549Y10T137/86815
    • Disclosed is a mixing faucet assembly (1), which comprises: a mixing valve unit (8) having at least two valve inlet ports (32b), a operating rod (24) and a valve outlet port (28); a faucet body (2) having at least two water-feed passages (2b), and a valve unit-receiving recess (2a) containing the mixing valve unit in such a manner as to receive mixture of hot and cold water discharged from the valve outlet port; a spout portion (6) formed to extend from an upper end of the faucet body in an approximately horizontal direction and have a spout-portion water passage (6a) for receiving the mixture discharged from the valve unit-receiving recess, and a spout port (4); and a load-supporting portion (2d) formed to protrude inwardly toward the inside of the valve unit-receiving recess in such a manner as to come into contact with an upper region of a lateral surface of the mixing valve unit on at least one side corresponding to a location of the spout portion to support the mixing valve unit. The present invention allows the mixing faucet assembly to be reduced in overall height dimension.
    • 公开了一种混合龙头组件(1),其包括:混合阀单元(8),其具有至少两个阀入口(32b),操作杆(24)和阀出口(28); 具有至少两个给水通道(2b)的水龙头体(2)和容纳所述混合阀单元的阀单元容纳凹部(2a),以便接收从 阀出口; 形成为从水龙头本体的上端沿大致水平方向延伸的出口部分(6),并且具有用于接收从阀单元容纳凹部排出的混合物的喷口部水通道(6a) 港(4); 以及负载支撑部(2d),其形成为朝向所述阀单元容纳凹部的内部向内突出,以便在所述混合阀单元的侧表面的上部区域中至少一个 一侧对应于喷口部分的位置以支撑混合阀单元。 本发明允许混合龙头组件的整体高度尺寸减小。