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1. 发明授权

US06414277B1 Ultra-high-temperature heat treatment apparatus 失效
标题翻译：超高温热处理设备
公开(公告)号：US06414277B1
公开(公告)日：2002-07-02
申请号：US09561192
申请日：2000-04-27
申请人： Toshio Nanbu , Makoto Shinohara
发明人： Toshio Nanbu , Makoto Shinohara
IPC分类号： F27B514
CPC分类号： H01L21/67109 , C30B33/00
摘要： An ultra-high-temperature heat treatment apparatus includes an electric furnace, a furnace tube made of porous SiC/CVD-SiC, a heat-insulating apparatus fitted into the furnace tube for interrupting heat conduction from the furnace tube, a contamination control apparatus disposed beneath the furnace tube for preventing contamination in the furnace tube, and a separator mechanism for separating a wafer, subject to heat treatment in the furnace tube, from an annular holder. The electric furnace includes a heater comprised of heater elements which are replaceable independently of each other. Each heater element includes a heat-generating portion disposed along the inner wall face of the heat insulator so as not to be in close contact therewith, and a fixture portion fixed to the heat insulator. This heater construction makes it possible to reduce heater repair costs, suppress reactions between the heat-generating portions and the heat insulator, and suppress a contraction of the heat insulator.
摘要翻译：超高温热处理装置包括电炉，由多孔SiC / CVD-SiC制成的炉管，安装在炉管中的用于中断来自炉管的热传导的隔热装置，设置污染控制装置在炉管下面，用于防止炉管中的污染;以及分离机构，用于将从炉管进行热处理的晶片分离成环形保持器。该电炉包括可独立于彼此替换的加热器元件的加热器。每个加热器元件包括沿着隔热件的内壁面设置以不与其紧密接触的发热部分和固定到隔热件的固定部分。这种加热器结构使得可以减少加热器维修成本，抑制发热部分和隔热件之间的反应，并且抑制绝热体的收缩。

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