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    • 1. 发明授权
    • X-ray exposure apparatus
    • X射线曝光装置
    • US5353323A
    • 1994-10-04
    • US190531
    • 1994-02-02
    • Toshio HirokawaNorio Uchida
    • Toshio HirokawaNorio Uchida
    • G03F7/20G21K5/02G21K5/00
    • G03F7/70866G21K5/02
    • Disclosed is an X-ray exposure apparatus comprising a chamber, filled with X-ray low attenuation gas for guiding X-rays, generated from an X-ray source, to an X-ray window, a gas supplying portion, provided to supply X-ray low attenuation gas into the chamber and having a portion with a small-diameter passage cross section formed at least at a part thereof, a gas discharging portion, provided to discharge gas from the chamber and having a portion with a small-diameter passage cross section formed at least at a part thereof, and a flow-rate controller for controlling a flow rate of the gas to be supplied to the gas supplying portion to thereby control pressure in the chamber, whereby pressure in the chamber is made equal to or slightly higher than atmospheric pressure by setting the small-diameter portion of the gas supplying portion smaller than that of the gas discharging portion.
    • 本发明公开了一种X射线曝光装置,其特征在于,具备:由X射线源产生的用于引导X射线的X射线低衰减气体填充到X射线窗口的气室,供给X 将低衰减气体输送到室内,并具有至少形成在其一部分上的具有小直径通道横截面的部分,气体排出部分,用于从腔室排出气体,并具有具有小直径通道的部分 至少形成在其一部分的横截面,以及流量控制器,用于控制供给到气体供给部的气体的流量,从而控制室内的压力,由此使室内的压力等于或等于 通过将气体供给部的小径部设定为小于气体排出部的小径部,略高于大气压。
    • 3. 发明授权
    • Rotary valve
    • 旋转阀
    • US4592389A
    • 1986-06-03
    • US713822
    • 1985-03-20
    • Ryuichi YamadaToshio HirokawaToshihiro Goto
    • Ryuichi YamadaToshio HirokawaToshihiro Goto
    • B62D5/083B62D5/22F16K11/22F16C33/02
    • B62D5/083Y10S384/903Y10T137/86638Y10T137/86646
    • A rotary valve which includes a valve sleeve having a cylindrical internal cavity and a plurality of axial grooves formed on the wall surface of the internal cavity; a valve spool fitted in the internal cavity of the valve sleeve and rotatable relative to the valve sleeve for controlling flow of a pressurized fluid through the valve; an annular groove formed at least at one end of the valve sleeve and having a diameter larger than that of the internal cavity; a bush fitted in the annular groove and having a hole of the same diameter as the internal cavity of the valve sleeve; a seal material interposed between engaging surfaces of the bush and annular groove; chamfered surface formed at the outer corner edge of the bush; and an annular thin-wall portion formed at the end of the valve sleeve and bent radially inward to retain the bush in the annular groove.
    • 一种旋转阀,包括具有圆柱形内腔的阀套和形成在所述内腔的壁表面上的多个轴向槽; 阀芯,其安装在所述阀套的所述内腔中并相对于所述阀套旋转,用于控制加压流体通过所述阀的流动; 至少在所述阀套的一端形成的直径大于所述内腔的直径的环形槽; 安装在所述环形槽中并且具有与所述阀套的内腔相同直径的孔的衬套; 插入在衬套和环形槽的接合表面之间的密封材料; 在衬套的外角边缘处形成的倒角表面; 以及形成在阀套的端部并径向向内弯曲以将衬套保持在环形槽中的环形薄壁部分。
    • 4. 发明授权
    • Synchrotron radiation apparatus
    • 同步辐射装置
    • US5134640A
    • 1992-07-28
    • US707780
    • 1991-05-30
    • Toshio HirokawaNorio UchidaOsamu KuwabaraNobutaka Kikuiri
    • Toshio HirokawaNorio UchidaOsamu KuwabaraNobutaka Kikuiri
    • G03F7/20
    • G03F7/70075G03F7/70808G03F7/70841
    • An X-ray radiation apparatus comprises a synchrotron 11 that generates X rays, an X-ray reflecting mirror 13 that reflects X rays emitted from the synchrotron 11, a mirror driving mechanism that enlarges the X-ray illumination area by oscillating the mirror 13, a beryllium window 14 that is connected to the synchrotron-side housing base containing the mirror 13 by means of a bellows 17 and that allows the X rays reflected by the mirror 13 to be taken out of the vacuum environment, and a window driving mechanism 18 that moves the window 14 along with the movement of the X-ray illumination position by oscillating the window 14 in synchronization with the oscillation of the mirror 13. With this arrangement, the X rays coming from the window 14 pass through the X-ray mask 15 and fall upon the specimen 16 to replicate the mask pattern into the specimen.
    • X射线辐射装置包括产生X射线的同步加速器11,反射从同步加速器11发出的X射线的X射线反射镜13,通过使反射镜13振荡来放大X射线照射区域的镜驱动机构, 铍窗14,其通过波纹管17连接到包含反射镜13的同步加速器侧壳体基座,并且允许将由反射镜13反射的X射线从真空环境中取出;以及窗口驱动机构18 通过与镜13的振荡同步地振动窗口14,随着X射线照射位置的移动而移动窗口14.通过这种布置,来自窗口14的X射线穿过X射线掩模 15并落在样本16上以将掩模图案复制到样本中。
    • 5. 发明授权
    • Method and apparatus for manufacturing spiral pipe
    • 制造螺旋管的方法和装置
    • US4436239A
    • 1984-03-13
    • US258555
    • 1981-04-29
    • Yoshito TsuyamaYasumi ShimazakiKazutoshi KakitaToshio Hirokawa
    • Yoshito TsuyamaYasumi ShimazakiKazutoshi KakitaToshio Hirokawa
    • B21C37/12B23K31/02B23K31/06
    • B21C37/122B23K31/027
    • In the manufacturing of a spiral pipe, there is first determined a maximum curvature which should be imparted to a strip of pipe forming material in order that a desired residual moment will be imparted to the finished pipe after the strip bent to the maximum curvature is allowed to spring back from the bent condition, which maximum curvature is determined based on the thickness, Young's modulus and yield stress of the strip, the desired curvature of the finished pipe, and the residual moment to be imparted to the finished pipe. By adjusting the position of three rows of forming rolls positioned at the apexes of a triangle, the flat strip is continuously bent into a spiral that has the thus determined maximum curvature. Then, the spirally formed strip is allowed to spring back toward its unbent shape to the diameter of the finished pipe, being stopped in the expansion due to the springback if it reaches the finished pipe diameter before completing springback or being expanded if it completes springback before it reaches the finished pipe diameter. Finally, the seam of the formed strip is welded when the strip is at the desired diameter of the finished pipe.
    • 在螺旋管的制造中,首先确定应该赋予管形成材料条的最大曲率,以便允许在弯曲到最大曲率的条带之后将成品管道赋予期望的剩余力矩 从弯曲状态回弹,基于条的厚度,杨氏模量和屈服应力,成品管的期望曲率以及要施加到成品管的残余力矩来确定最大曲率。 通过调整定位在三角形顶点的三排成形辊的位置,扁平条被连续弯曲成具有如此确定的最大曲率的螺旋形。 然后,允许螺旋形成的条状物沿其未弯曲的形状弹回到成品管的直径,如果在完成回弹之前达到最终管直径,则由于回弹而在膨胀中停止,或者如果在弹回完成回弹之前膨胀 达到成品管直径。 最后,当带材处于成品管道的所需直径时,形成的带材的接缝被焊接。