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    • 1. 发明授权
    • Sensor head, luminance distribution measurement apparatus having the sensor head, and unevenness inspection/evaluation apparatus
    • 传感器头,具有传感器头的亮度分布测量装置和不均匀性检查/评估装置
    • US06987571B2
    • 2006-01-17
    • US09818450
    • 2001-03-27
    • Noboru YamakawaToshihiro Taguchi
    • Noboru YamakawaToshihiro Taguchi
    • G01B11/30G01N21/55H01L27/00H01L40/14
    • G01J1/00
    • A sensor head has a multiplicity of linear image sensors in correspondence with different radial directions of light emitted from a pixel in a pixel line of an LCD panel. The linear image sensors extends in the direction of the axis of an imaginary semi-cylinder. The linear image sensors have light receiving faces that are angularly spaced apart on an imaginary semi-cylinder, with their light receiving faces having normals passing through the axis of the imaginary semi-cylinder. Interposed in the space between the LCD pixel and the linear image sensors is an optical system having a multiplicity of light paths associated with respective angular components of the radiation emitted from the pixel line. Each of the light paths receives a predetermined angular component of light and transmits the light thus reveived to a corresponding one of the linear image sensors.
    • 传感器头具有与从LCD面板的像素线中的像素发射的光的不同径向方向对应的多个线性图像传感器。 线性图像传感器沿虚拟半圆柱体的轴线的方向延伸。 线性图像传感器具有在虚拟半圆柱体上成角度间隔开的光接收面,其光接收面具有通过假想半圆柱体的轴线的法线。 插入在LCD像素和线性图像传感器之间的空间中的是具有与从像素线发射的辐射的各个角度分量相关联的多个光路的光学系统。 每个光路接收预定的角分量的光,并且将如此转发的光传送到相应的一个线性图像传感器。