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1. 发明授权

US07933186B2 Method for manufacturing optical disk master, method for manufacturing optical disk, and apparatus for manufacturing optical disk master 失效
标题翻译：光盘主机的制造方法，光盘的制造方法以及光盘机的制造装置
公开(公告)号：US07933186B2
公开(公告)日：2011-04-26
申请号：US11697466
申请日：2007-04-06
申请人： Toshihiko Shirasagi
发明人： Toshihiko Shirasagi
IPC分类号： G11B7/00 , G03F1/00
CPC分类号： G11B7/261
摘要： A method and apparatus for manufacturing an optical disk master and an optical disk, including measuring the reflectance of laser light at each of a plurality of radius positions by applying the laser light to an optical disk master-forming substrate provided with an inorganic resist layer, the laser light having a non-recording laser power smaller than a recording sensitivity of the inorganic resist layer, producing recording power control data indicating recording laser powers in accordance with the radius positions of the optical disk master-forming substrate by using the reflectances measured, forming an exposure pattern on the inorganic resist layer by applying the laser light to the optical disk master-forming substrate on the basis of the recording power control data while the recording power is varied in accordance with the radius positions, and developing the inorganic resist layer provided with the exposure pattern so as to prepare an uneven pattern.
摘要翻译：一种用于制造光盘主机和光盘的方法和装置，包括通过将激光施加到设置有无机抗蚀剂层的光盘母版形成基板上来测量多个半径位置中的每一个处的激光的反射率，所述激光具有小于无机抗蚀剂层的记录灵敏度的非记录激光功率，通过使用测量的反射率产生表示根据光盘母版形成基板的半径位置记录激光功率的记录功率控制数据，通过在记录功率根据半径位置变化的同时基于记录功率控制数据将激光施加到光盘母版形成基板上，在无机抗蚀剂层上形成曝光图案，并且显影无机抗蚀剂层提供曝光图案以制备不均匀图案。

2. 发明申请

US20080265149A1 Optical Device, Method for Producing Master for Use in Producing Optical Device, and Photoelectric Conversion Apparatus 有权
标题翻译：光学装置，用于生产光学装置的主要方法和光电转换装置
公开(公告)号：US20080265149A1
公开(公告)日：2008-10-30
申请号：US12090817
申请日：2007-08-21
申请人： Sohmei Endoh , Kazuya Hayashibe , Tooru Nagai , Ikuhiro Hideta , Toshihiko Shirasagi , Kimitaka Nishimura , Tadao Suzuki
发明人： Sohmei Endoh , Kazuya Hayashibe , Tooru Nagai , Ikuhiro Hideta , Toshihiko Shirasagi , Kimitaka Nishimura , Tadao Suzuki
IPC分类号： G01J1/04 , G02B5/00 , B29D11/00
CPC分类号： G02B1/118 , H01L31/02366 , Y02E10/50 , Y02E10/542
摘要： In an optical device, a number of structures having higher portions or lower portions are arranged at a fine pitch equal to or shorter than a wavelength of visible light on a surface of a base. Each of the structures is arranged to form a plurality of arc track rows on the surface of the base, and to form a quasi-hexagonal lattice pattern, and the structure has an elliptical cone or truncated elliptical cone shape having a major axis in a circumferential direction of the arc tracks.
摘要翻译：在光学装置中，具有较高部分或较低部分的多个结构以等于或短于基底表面上的可见光波长的微小间距排列。每个结构被布置成在基底的表面上形成多个弧形轨迹行，并且形成准六边形格子图案，并且该结构具有椭圆锥形或截头椭圆锥形，其具有圆周的长轴电弧轨迹的方向。

3. 发明申请

US20070238055A1 METHOD FOR MANUFACTURING OPTICAL DISK MASTER, METHOD FOR MANUFACTURING OPTICAL DISK, AND APPARATUS FOR MANUFACTURING OPTICAL DISK MASTER 失效
标题翻译：制造光盘的方法，制造光盘的方法以及制造光盘的主要装置
公开(公告)号：US20070238055A1
公开(公告)日：2007-10-11
申请号：US11697466
申请日：2007-04-06
申请人： Toshihiko Shirasagi
发明人： Toshihiko Shirasagi
IPC分类号： G03C5/00
CPC分类号： G11B7/261
摘要： A method for manufacturing an optical disk master, a method for manufacturing an optical disk, and an apparatus for manufacturing an optical disk master are provided. The method for manufacturing an optical disk master includes measuring the reflectance of laser light at each of a plurality of radius positions by applying the laser light to an optical disk master-forming substrate provided with an inorganic resist layer, the laser light having a non-recording laser power smaller than a recording sensitivity of the inorganic resist layer, producing recording power control data indicating recording laser powers in accordance with the radius positions of the optical disk master-forming substrate by using the reflectances measured, forming an exposure pattern on the inorganic resist layer by applying the laser light to the optical disk master-forming substrate on the basis of the recording power control data while the recording power is varied in accordance with the radius positions, and developing the inorganic resist layer provided with the exposure pattern so as to prepare an uneven pattern.
摘要翻译：本发明提供一种光盘母盘的制造方法，光盘的制造方法，以及光盘母盘的制造装置。制造光盘主机的方法包括通过将激光施加到设置有无机抗蚀剂层的光盘母版形成基板上来测量多个半径位置中的每一个处的激光的反射率，记录小于无机抗蚀剂层的记录灵敏度的激光功率，通过使用测量的反射率，根据光盘母版形成基板的半径位置产生表示记录激光功率的记录功率控制数据，形成无机抗蚀剂层上的曝光图案通过在记录功率根据半径位置变化的同时基于记录功率控制数据将激光施加到光盘母版形成基板上，并且将设置有曝光图案的无机抗蚀剂层显影为准备不均匀的图案。

4. 发明申请

US20120128917A1 MANUFACTURING METHOD OF MASTER DISC FOR OPTICAL DISC, AND MASTER DISC FOR OPTICAL DISC 审中-公开
标题翻译：光盘主光盘的制造方法和光盘主盘
公开(公告)号：US20120128917A1
公开(公告)日：2012-05-24
申请号：US13360291
申请日：2012-01-27
申请人： Toshihiko Shirasagi , Shinji Minegishi
发明人： Toshihiko Shirasagi , Shinji Minegishi
IPC分类号： B32B3/02
CPC分类号： G03F7/0043 , C23C14/0036 , C23C14/0641 , C23C14/083 , C23C14/3492 , G03F7/0015 , G03F7/16 , G03F7/167 , G11B7/007 , G11B7/261 , G11B7/266
摘要： An inorganic resist layer made of an incomplete oxide of a transition metal is formed as a film onto a substrate by a sputtering method. A single element or alloy of the transition metal, or an oxide of them is used as a target material. Oxygen or nitrogen is used as a reactive gas. Oxygen concentration of the inorganic resist layer is made different in the thickness direction by changing a reactive gas ratio or a film forming power. A master disc (for an optical disc) in which fine concave/convex patterns such as pits, grooves, and the like have been formed by exposing and developing the inorganic resist layer is formed. Since sensitivity rises with an increase in oxygen concentration, the sensitivity can be made different in the thickness direction of the inorganic resist layer and the concave/convex shapes of different depths can be formed on the same disc.
摘要翻译：通过溅射法将由过渡金属的不完全氧化物制成的无机抗蚀剂层作为膜形成在基板上。使用过渡金属或其氧化物的单一元素或合金作为靶材料。使用氧气或氮气作为反应气体。无机抗蚀剂层的氧浓度通过改变反应气体比或成膜能力而在厚度方向上不同。形成通过曝光和显影无机抗蚀剂层形成诸如凹坑等的凹凸图案的母盘（用于光盘）。由于灵敏度随着氧浓度的增加而升高，所以灵敏度可以在无机抗蚀剂层的厚度方向上不同，并且可以在同一盘上形成不同深度的凹凸形状。

5. 发明申请

US20100134892A1 OPTICAL DEVICE, METHOD FOR PRODUCING MASTER FOR USE IN PRODUCING OPTICAL DEVICE, AND PHOTOELECTRIC CONVERSION APPARATUS 有权
标题翻译：光学装置，用于生产光学装置的主要用途的方法和光电转换装置
公开(公告)号：US20100134892A1
公开(公告)日：2010-06-03
申请号：US12634405
申请日：2009-12-09
申请人： Sohmei Endoh , Kazuya Hayashibe , Tooru Nagai , Ikuhiro Hideta , Toshihiko Shirasagi , Kimitaka Nishimura , Tadao Suzuki
发明人： Sohmei Endoh , Kazuya Hayashibe , Tooru Nagai , Ikuhiro Hideta , Toshihiko Shirasagi , Kimitaka Nishimura , Tadao Suzuki
IPC分类号： G02B5/00 , G03F7/20
CPC分类号： G02B1/118 , H01L31/02366 , Y02E10/50 , Y02E10/542
摘要： In an optical device, a number of structures having higher portions or lower portions are arranged at a fine pitch equal to or shorter than a wavelength of visible light on a surface of a base. Each of the structures is arranged to form a plurality of arc track rows on the surface of the base, and to form a quasi-hexagonal lattice pattern, and the structure has an elliptical cone or truncated elliptical cone shape having a major axis in a circumferential direction of the arc tracks.
摘要翻译：在光学装置中，具有较高部分或较低部分的多个结构以等于或短于基底表面上的可见光波长的微小间距排列。每个结构被布置成在基底的表面上形成多个弧形轨迹行，并且形成准六边形格子图案，并且该结构具有椭圆锥形或截头椭圆锥形，其具有圆周的长轴电弧轨迹的方向。

6. 发明申请

US20090155730A1 METHOD FOR MANUFACTURING STORAGE MEDIUM AND APPARATUS FOR MANUFACTURING INFORMATION STORAGE MASTER DISC 审中-公开
标题翻译：存储介质的制造方法和制造信息存储主盘的装置
公开(公告)号：US20090155730A1
公开(公告)日：2009-06-18
申请号：US12323220
申请日：2008-11-25
申请人： Toshihiko SHIRASAGI
发明人： Toshihiko SHIRASAGI
IPC分类号： G03F7/20 , G03B27/52
CPC分类号： G03B27/52 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： A method for manufacturing an information storage medium in which information is stored as a concave-convex pattern includes forming an inorganic-resist master disc by depositing on a substrate an inorganic resist layer reactive to thermal reaction associated with laser beam irradiation, recording on the inorganic-resist master disc by differentiating depths of thermal reaction portions in the inorganic resist layer by inputting information to be stored in the information storage medium and varying power of the laser beam striking the inorganic-resist master disc over at least three levels according to the input information, forming an information storage master disc having a concave-convex pattern in the inorganic resist layer by developing the recorded inorganic-resist master disc, forming a stamper to which the concave-convex pattern formed on the inorganic resist layer has been transferred on the basis of the information storage master disc, and forming the information storage medium using the stamper.
摘要翻译：用于制造信息存储介质的方法，其中信息被存储为凹凸图案包括通过在基板上沉积与激光束照射相关的热反应无反应的无机抗蚀剂层来形成无机抗蚀剂母盘，通过输入要存储在信息存储介质中的信息和根据输入的至少三个级别激发到无机抗蚀剂母盘的激光束的功率，来区分无机抗蚀剂层中的热反应部分的深度，信息，通过显影所记录的无机抗蚀剂母盘，形成在无机抗蚀剂层中具有凹凸图案的信息存储母盘，形成在无机抗蚀剂层上形成的凹凸图案的压模已经被转印到信息存储主盘的基础，并形成信息存储介质嗯使用压模。

7. 发明申请

US20070105055A1 Manufacturing method of master disc for optical disc, and master disc for optical disc 审中-公开
标题翻译：用于光盘的主盘的制造方法和用于光盘的主盘
公开(公告)号：US20070105055A1
公开(公告)日：2007-05-10
申请号：US10579211
申请日：2004-11-30
申请人： Toshihiko Shirasagi , Shinji Minegishi
发明人： Toshihiko Shirasagi , Shinji Minegishi
IPC分类号： G03C5/00
CPC分类号： G03F7/0043 , C23C14/0036 , C23C14/0641 , C23C14/083 , C23C14/3492 , G03F7/0015 , G03F7/16 , G03F7/167 , G11B7/007 , G11B7/261 , G11B7/266
摘要： An inorganic resist layer made of an incomplete oxide of a transition metal is formed as a film onto a substrate by a sputtering method. A single element or alloy of the transition metal, or an oxide of them is used as a target material. Oxygen or nitrogen is used as a reactive gas. Oxygen concentration of the inorganic resist layer is made different in the thickness direction by changing a reactive gas ratio or a film forming power. A master disc (for an optical disc) in which fine concave/convex patterns such as pits, grooves, and the like have been formed by exposing and developing the inorganic resist layer is formed. Since sensitivity rises with an increase in oxygen concentration, the sensitivity can be made different in the thickness direction of the inorganic resist layer and the concave/convex shapes of different depths can be formed on the same disc.
摘要翻译：通过溅射法将由过渡金属的不完全氧化物制成的无机抗蚀剂层作为膜形成在基板上。使用过渡金属或其氧化物的单一元素或合金作为靶材料。使用氧气或氮气作为反应气体。无机抗蚀剂层的氧浓度通过改变反应气体比或成膜能力而在厚度方向上不同。形成通过曝光和显影无机抗蚀剂层形成诸如凹坑等的凹凸图案的母盘（用于光盘）。由于灵敏度随着氧浓度的增加而升高，所以灵敏度可以在无机抗蚀剂层的厚度方向上不同，并且可以在同一盘上形成不同深度的凹凸形状。

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