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    • 2. 发明授权
    • Liquid crystal display capable of reducing amount of return light to TFT and manufacturing method therefor
    • 能够减少向TFT返回光量的液晶显示器及其制造方法
    • US06603518B1
    • 2003-08-05
    • US09618802
    • 2000-07-18
    • Tadayoshi MiyamotoToshihiko Degawa
    • Tadayoshi MiyamotoToshihiko Degawa
    • G02F1136
    • G02F1/136209G02F2202/104
    • There is provided a liquid crystal display device, as well as a manufacturing method therefor, capable of preventing characteristic deterioration of TFTs by reducing the amount of return light incident on the TFTs. A light interception thin film 2 is composed of a silicide film formed on a transparent substrate 1 and a polysilicon film formed so as to cover a top of the silicide film, and a polysilicon film 3 is formed so as to cover a top of the light interception thin film 2. Then, by making up a light interception film from the light interception thin film 2 and the polysilicon film 3, the light interception effect on a TFT-use polysilicon layer 5 formed over the light interception film with interposition of the transparent insulation film 4, and enough thermal resistance and adhesion can be obtained in the TFT manufacturing process.
    • 提供了一种能够通过减少入射到TFT上的返回光量来防止TFT的特性劣化的液晶显示装置及其制造方法。 光截取薄膜2由形成在透明基板1上的硅化物膜和形成为覆盖硅化物膜的顶部的多晶硅膜构成,并且形成多晶硅膜3以覆盖光的顶部 截取薄膜2.然后,通过从遮光薄膜2和多晶硅薄膜3构成遮光膜,对形成于遮光膜上的TFT用多晶硅层5的遮光效果插入透明 绝缘膜4,并且在TFT制造工艺中可以获得足够的热阻和粘附性。
    • 3. 发明授权
    • Vertically integrated semiconductor device
    • 垂直集成半导体器件
    • US06215150B1
    • 2001-04-10
    • US09055214
    • 1998-04-06
    • Toshihiko Degawa
    • Toshihiko Degawa
    • H01L2976
    • H01L29/66666H01L29/7827H01L29/78642
    • A semiconductor device, which is characterized in that a trench (12) is formed in a silicon substrate (11), an element isolation film (1) is formed on an inner surface of said trench (12), and a drain region (7), a channel region (8) and a source region (9) are arranged vertically in a region encircled by said element isolation film (1); and that a gate insulating film (2) is formed inside of these regions (7, 8 and 9) and a gate electrode (4) is formed on an inner side portion of said gate insulating film (2), while a drain electrode (5) or source electrode (13) is formed on an outer side portion of said gate insulating film (2).
    • 一种半导体器件,其特征在于,在硅衬底(11)中形成沟槽(12),在所述沟槽(12)的内表面上形成元件隔离膜(1),并且漏极区域(7) ),沟道区域(8)和源极区域(9)垂直布置在由所述元件隔离膜(1)包围的区域中; 并且在这些区域(7,8和9)的内部形成栅极绝缘膜(2),并且在所述栅极绝缘膜(2)的内侧部分上形成栅电极(4),而漏电极 5)或源电极(13)形成在所述栅极绝缘膜(2)的外侧部分上。