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    • 2. 发明授权
    • Deflection electromagnet for a charged particle device
    • 用于充电颗粒装置的偏转电极
    • US5111173A
    • 1992-05-05
    • US578790
    • 1990-09-07
    • Tetsuya MatsudaShunji YamamotoTadatoshi YamadaToshie Ushijima
    • Tetsuya MatsudaShunji YamamotoTadatoshi YamadaToshie Ushijima
    • G21K1/093H05H7/04H05H13/04
    • H05H7/04
    • Semicircular superconducting deflection magnets for deflecting electron beams along a semiconductor orbit. The magnet 1 comprises a pair of race-track shaped main coils 2 and 3 disposed symmetrically with respect to the plane of the orbit S. Each one of the main coils 2 and 3 is divided into two parts 21 and 22 or 31 and 32, the end portions 21a and 22a or 31a and 32a being displaced from each other in the direction of the orbit S, so that the magnetomotive force thereof is distributed evenly along the orbit S (FIGS. 12 through 14). According to another aspect, rectangular cancellation coils 25, 26, 35, and 36 are provided at the end portions 21a, 22a, 31a, and 32a, respectively, of the coil parts 21, 22, 31, and 32, such that the magnetomotive force of each one of the end portions is cancelled by the magnetomotive force of the adjacent parallel running side of a cancellation coil (FIGS. 21 through 23). According to still another aspect, sextupole correction coils 5 are disposed near the end portions 2a of the main coils 2 along the orbit S.
    • 半导体超导偏转磁体,用于沿半导体轨道偏转电子束。 磁体1包括相对于轨道S的平面对称设置的一对赛道形状的主线圈2和3.主线圈2和3中的每一个被分成两部分21和22或31和32, 端部21a,22a或31a,32a在轨道S的方向上彼此偏移,使得其磁动势沿着轨道S均匀分布(图12〜图14)。 根据另一方面,矩形消除线圈25,26,35和36分别设置在线圈部分21,22,31和32的端部21a,22a,31a和32a处,使得磁动势 每个端部的力被消除线圈的相邻平行运行侧的磁通势消除(图21至23)。 根据另一方面,六极校正线圈5沿着轨道S设置在主线圈2的端部2a附近。