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1. 发明授权

US5207573A Heat processing apparatus 失效
标题翻译：热处理设备
公开(公告)号：US5207573A
公开(公告)日：1993-05-04
申请号：US824094
申请日：1992-01-22
申请人： Katsushin Miyagi , Tomio Kimishima
发明人： Katsushin Miyagi , Tomio Kimishima
IPC分类号： H01L21/205 , C21D1/34 , F27B11/00 , F27B17/00 , H01L21/22 , H01L21/31
CPC分类号： F27B17/0025 , C21D1/34 , F27B11/00
摘要： A heat processing apparatus comprises a heating furnace, a process tube located in the heating furnace and having an open bottom, a manifold connected to the open bottom of the process tube, a sealing member sandwiched between the process tube and the manifold to air-tightly seal the process tube, a fixing member for fixing the process tube to the manifold, a heat transmitting member made of metal and sandwiched between the fixing member and the process tube to radiate heat at that area of the process tube, which is opposed to the fixing member, to the fixing member by heat conduction, and a heat exchange conduit arranged in the fixing member and having a passage through which heat exchanging medium flows to cool the fixing member by heat exchange.
摘要翻译：一种加热装置，包括加热炉，位于加热炉中的开口底部的处理管，连接到处理管的开口底部的歧管，夹在处理管和歧管之间的气密密封件密封工艺管，用于将处理管固定到歧管的固定构件，由金属制成并夹在固定构件和处理管之间的传热构件，以在处理管的该区域处辐射热量，该区域与固定构件通过热传导而固定在固定构件上，热交换导管布置在固定构件中，并具有通过热交换介质流过的通道，通过热交换来冷却固定构件。

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