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    • 3. 发明授权
    • Flip-chip bumping structure with dedicated test pads on semiconductor chip and method of fabricating the same
    • 在半导体芯片上具有专用测试焊盘的倒装凸块结构及其制造方法
    • US06359342B1
    • 2002-03-19
    • US09730311
    • 2000-12-05
    • Pao-Ho YuanTing-Ke ChaiLien-Chi ChanJen-Yi Tsai
    • Pao-Ho YuanTing-Ke ChaiLien-Chi ChanJen-Yi Tsai
    • H01L2348
    • H01L22/32H01L22/20H01L23/50H01L24/11H01L2224/0401H01L2224/05554H01L2224/05624H01L2224/05647H01L2224/13099H01L2924/01005H01L2924/01013H01L2924/01029H01L2924/014H01L2924/14H01L2924/00014
    • A flip-chip bumping technology is proposed, which provides a flip-chip bumping structure with dedicated test pads on semiconductor chip and method of fabricating the same. The proposed flip-chip bumping technology is characterized by the forming of a lined-array of electrically-conductive dual-pad blocks respectively over the internal I/O points of the semiconductor chip, each dual-pad block including a first pad and a second pad located beside and electrically connected to the first pad; and wherein the respective first and second pads of the dual-pad blocks-are alternately designated as bump pads and test pads. During testing procedure, the probing to the internal circuitry of the semiconductor chip is carried out through the test-pad portions of the dual-pad blocks, so that the probing needles would leave no scratches over the bumppad portions of the same. During subsequent bumping process, solder bumps are formed respectively over the bump-pad portions of the dual-pad blocks. Since the bump-pad portions of the dual-pad blocks would be left unscratched, it allows the solder bump attachment to be more assured in quality and reliability.
    • 提出了一种倒装芯片凸块技术,其提供了具有半导体芯片上的专用测试焊盘的倒装芯片凸块结构及其制造方法。 所提出的倒装芯片凸块技术的特征在于分别在半导体芯片的内部I / O点上形成导电双焊盘块的排列阵列,每个双焊盘块包括第一焊盘和第二焊盘 垫位于旁边并电连接到第一垫; 并且其中所述双焊盘块的相应的第一和第二焊盘被交替地指定为凸块焊盘和测试焊盘。 在测试过程中,半导体芯片的内部电路的探测通过双焊盘块的测试焊盘部分进行,使得探针不会在其上的焊盘部分上留下划痕。 在随后的凸块处理期间,分别在双焊盘块的凸块焊盘部分上形成焊料凸块。 由于双焊盘块的凸块焊盘部分将不被打开,所以允许焊料凸块附着在质量和可靠性方面更加确保。