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1. 发明授权

US08582080B2 Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage 有权
标题翻译：具有测量系统初始化，振动补偿，低传输性和轻质细阶段的舞台装配
公开(公告)号：US08582080B2
公开(公告)日：2013-11-12
申请号：US12178240
申请日：2008-07-23
申请人： Michael Binnard , Wen-Hou Ma , Toshio Ueta , Pai-Hsueh Yang , Ting-Chien Teng , Bausan Yuan
发明人： Michael Binnard , Wen-Hou Ma , Toshio Ueta , Pai-Hsueh Yang , Ting-Chien Teng , Bausan Yuan
IPC分类号： G03B27/42
CPC分类号： G03F7/70775 , G03F7/70716 , G03F7/709
摘要： A stage assembly (220) that moves a work piece (200) about a first axis and along a first axis includes a first stage (238), a second stage (240) that retains the work piece (200), a second mover assembly (244), a measurement system, and an initialization system (1081A). The second mover assembly (244) moves the second stage (240) relative to the first stage (238) about the first axis. The measurement system (22) monitors the position of the second stage (240) about the first axis when the second stage (240) is positioned within a working range about the first axis. The initialization system (1081A) facilitates movement of the second stage (240) about the first axis when the second stage (240) is rotated about the first axis outside the working range. The second mover assembly (244) can include a mover (255) and a dampener (410) that reduces the transmission of vibration from the first stage (238) to the second stage (240). In addition, the stage assembly (220) can include a control system (24) that directs power to the mover (255) to position the second stage (240) and to compensate for vibration of the first stage (238).
摘要翻译：围绕第一轴线并沿着第一轴线移动工件（200）的平台组件（220）包括：第一阶段（238）;保持工件（200）的第二阶段（240）;第二推动组件（244），测量系统和初始化系统（1081A）。第二移动器组件（244）围绕第一轴线相对于第一阶段（238）移动第二阶段（240）。当第二级（240）位于围绕第一轴的工作范围内时，测量系统（22）监测第二级（240）围绕第一轴的位置。当第二级（240）围绕工作范围外的第一轴线旋转时，初始化系统（1081A）有助于第二级（240）围绕第一轴的移动。第二移动器组件（244）可以包括减小从第一级（238）到第二级（240）的振动传递的移动器（255）和阻尼器（410）。另外，台架组件（220）可以包括控制系统（24），该控制系统（24）将电力引导到动子（255）以定位第二级（240）并补偿第一级（238）的振动。

2. 发明授权

US6069417A Stage having paired E/I core actuator control 失效
标题翻译：具有成对的E / I核心执行器控制的阶段
公开(公告)号：US6069417A
公开(公告)日：2000-05-30
申请号：US141762
申请日：1998-08-27
申请人： Bausan Yuan , Ting-Chien Teng
发明人： Bausan Yuan , Ting-Chien Teng
IPC分类号： G03F7/20 , H02K33/12 , H02K41/02 , H02K41/00
CPC分类号： G03F7/70758 , H02K33/12 , H02K41/02
摘要： A fine stage control system for use for instance in a semiconductor lithography machine, uses a pair of opposing (push-pull) E/I core actuators to move the stage with high precision along an axis. The paired actuators are coupled together mathematically in terms of their control characteristics and controlled as a single entity, thereby providing a more efficient control scheme and improved system performance.
摘要翻译：例如在半导体光刻机中使用的精细级控制系统使用一对相对（推挽）E / I核心致动器沿着轴线以高精度移动台。成对的执行器在其控制特性方面以数学方式耦合在一起，并被控制为单个实体，从而提供更有效的控制方案和改进的系统性能。

3. 发明申请

US20060101928A1 Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage 有权
标题翻译：具有测量系统初始化，振动补偿，低传输性和轻质细阶段的舞台装配
公开(公告)号：US20060101928A1
公开(公告)日：2006-05-18
申请号：US11258249
申请日：2005-10-24
申请人： Michael Binnard , Wen-Hou Ma , Toshio Ueta , Pai-Hsueh Yang , Ting-Chien Teng , Bausan Yuan
发明人： Michael Binnard , Wen-Hou Ma , Toshio Ueta , Pai-Hsueh Yang , Ting-Chien Teng , Bausan Yuan
IPC分类号： A47J43/08
CPC分类号： G03F7/70775 , G03F7/70716 , G03F7/709
摘要： A stage assembly (220) that moves a work piece (200) about a first axis and along a first axis includes a first stage (238), a second stage (240) that retains the work piece (200), a second mover assembly (244), a measurement system, and an initialization system (1081A). The second mover assembly (244) moves the second stage (240) relative to the first stage (238) about the first axis. The measurement system (22) monitors the position of the second stage (240) about the first axis when the second stage (240) is positioned within a working range about the first axis. The initialization system (1081A) facilitates movement of the second stage (240) about the first axis when the second stage (240) is rotated about the first axis outside the working range. The second mover assembly (244) can include a mover (255) and a dampener (410) that reduces the transmission of vibration from the first stage (238) to the second stage (240). In addition, the stage assembly (220) can include a control system (24) that directs power to the mover (255) to position the second stage (240) and to compensate for vibration of the first stage (238).
摘要翻译：围绕第一轴线并沿着第一轴线移动工件（200）的台架组件（220）包括第一台（238），保持工件（200）的第二台（240），第二推动组件（244），测量系统和初始化系统（1081A）。第二移动器组件（244）围绕第一轴线相对于第一阶段（238）移动第二阶段（240）。当第二级（240）位于围绕第一轴的工作范围内时，测量系统（22）监测第二级（240）围绕第一轴的位置。当第二级（240）围绕工作范围外的第一轴线旋转时，初始化系统（1081A）有助于第二级（240）围绕第一轴的移动。第二移动器组件（244）可以包括减小从第一级（238）到第二级（240）的振动传递的移动器（255）和阻尼器（410）。另外，台架组件（220）可以包括控制系统（24），该控制系统（24）将电力引导到动子（255）以定位第二级（240）并补偿第一级（238）的振动。

4. 发明申请

US20060061751A1 Stage assembly including a stage having increased vertical stroke 审中-公开
标题翻译：舞台组合包括具有增加的垂直行程的舞台
公开(公告)号：US20060061751A1
公开(公告)日：2006-03-23
申请号：US10945638
申请日：2004-09-21
申请人： Ting-Chien Teng , Bausan Yuan
发明人： Ting-Chien Teng , Bausan Yuan
IPC分类号： G03B27/58
CPC分类号： G03F7/70716
摘要： A stage assembly (220) includes a stage base (202) having a guide surface (203), a first stage (206), a second stage (208), and a first mover subassembly (216) including a first mover (231) and a second mover (232) that are arranged in series. The stage base (202) supports the first stage (206), which moves relative to the stage base (202). The movers (231, 232) cooperate to move the second stage (208) relative to the first stage (206). The movers (231, 232) can include one or more attraction-only type actuators. The movers (231, 232) cooperate to move the second stage (208) along an axis that is substantially perpendicular to the guide surface (203). The stage assembly (220) can also include a second mover subassembly (216) that cooperates with the first mover subassembly (216) to move the second stage (208) with two or more degrees of freedom relative to the first stage (206). Further, the first mover (231) can directly move a portion of the second mover (232).
摘要翻译：舞台组件（220）包括具有引导表面（203），第一舞台（206），第二舞台（208）和包括第一移动器（231）的第一移动器子组件（216）的舞台基座（202）和串联布置的第二移动器（232）。舞台基座（202）支撑相对于舞台基座（202）移动的第一舞台（206）。移动器（231,232）协作以相对于第一级（206）移动第二级（208）。移动器（231,232）可以包括一个或多个仅吸引型的致动器。移动器（231,232）协作以沿着基本上垂直于引导表面（203）的轴线移动第二阶段（208）。舞台组件（220）还可以包括与第一移动器子组件（216）协作以相对于第一舞台（206）以两个或更多个自由度移动第二舞台（208）的第二动子子组件（216）。此外，第一移动器（231）可以直接移动第二移动器（232）的一部分。

5. 发明授权

US07417714B2 Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage 有权
标题翻译：具有测量系统初始化，振动补偿，低传输性和轻质细阶段的舞台装配
公开(公告)号：US07417714B2
公开(公告)日：2008-08-26
申请号：US11258249
申请日：2005-10-24
申请人： Michael Binnard , Wen-Hou Ma , Toshio Ueta , Pai-Hsueh Yang , Ting-Chien Teng , Bausan Yuan
发明人： Michael Binnard , Wen-Hou Ma , Toshio Ueta , Pai-Hsueh Yang , Ting-Chien Teng , Bausan Yuan
IPC分类号： G03B27/58 , G03B27/62 , G03B27/42
CPC分类号： G03F7/70775 , G03F7/70716 , G03F7/709
摘要： A stage assembly (220) that moves a work piece (200) about a first axis and along a first axis includes a first stage (238), a second stage (240) that retains the work piece (200), a second mover assembly (244), a measurement system, and an initialization system (1081A). The second mover assembly (244) moves the second stage (240) relative to the first stage (238) about the first axis. The measurement system (22) monitors the position of the second stage (240) about the first axis when the second stage (240) is positioned within a working range about the first axis. The initialization system (1081A) facilitates movement of the second stage (240) about the first axis when the second stage (240) is rotated about the first axis outside the working range. The second mover assembly (244) can include a mover (255) and a dampener (410) that reduces the transmission of vibration from the first stage (238) to the second stage (240). In addition, the stage assembly (220) can include a control system (24) that directs power to the mover (255) to position the second stage (240) and to compensate for vibration of the first stage (238).
摘要翻译：围绕第一轴线并沿着第一轴线移动工件（200）的台架组件（220）包括第一台（238），保持工件（200）的第二台（240），第二推动组件（244），测量系统和初始化系统（1081A）。第二移动器组件（244）围绕第一轴线相对于第一阶段（238）移动第二阶段（240）。当第二级（240）位于围绕第一轴的工作范围内时，测量系统（22）监测第二级（240）围绕第一轴的位置。当第二级（240）围绕工作范围外的第一轴线旋转时，初始化系统（1081A）有助于第二级（240）围绕第一轴的移动。第二移动器组件（244）可以包括减小从第一级（238）到第二级（240）的振动传递的移动器（255）和阻尼器（410）。另外，台架组件（220）可以包括控制系统（24），该控制系统（24）将电力引导到动子（255）以定位第二级（240）并补偿第一级（238）的振动。

6. 发明申请

US20070097340A1 Active damper with counter mass to compensate for structural vibrations of a lithographic system 审中-公开
标题翻译：具有反质量的主动阻尼器来补偿光刻系统的结构振动
公开(公告)号：US20070097340A1
公开(公告)日：2007-05-03
申请号：US11262882
申请日：2005-10-31
申请人： Bausan Yuan , Ping-Wei Chang , Ryoichi Kawaguchi , Kazuo Masaki , Susumu Makinouchi , Ting-Chien Teng
发明人： Bausan Yuan , Ping-Wei Chang , Ryoichi Kawaguchi , Kazuo Masaki , Susumu Makinouchi , Ting-Chien Teng
IPC分类号： G03B27/42
CPC分类号： G03F7/709 , F16F7/1005 , G03F7/70766 , G03F7/70833
摘要： Methods and apparatus for actively damping vibrations associated with a optical assembly of a photolithographic system are disclosed. According to one aspect of the present invention, an assembly that provides damping to a structure of a photolithographic apparatus that is subject to structural oscillations includes a counter mass, an active mechanism, an a controller. The active mechanism is coupled to the structure, supports the counter mass, and applies a force to the structure to counteract structural oscillations in the structure. The controller controls the force applied by the active mechanism on the structure, and utilizes information associated with movement of the structure to control the force.
摘要翻译：公开了用于主动衰减与光刻系统的光学组件相关的振动的方法和装置。根据本发明的一个方面，一种对经受结构振荡的光刻设备的结构提供阻尼的组件包括反质量块，活动机构，控制器。主动机构耦合到结构，支撑反质量，并向结构施加力以抵消结构中的结构振荡。控制器控制主动机构施加在结构上的力，并利用与结构的运动相关联的信息来控制力。

7. 发明授权

US06472777B1 Capacitive sensor calibration method and apparatus for opposing electro-magnetic actuators 失效
标题翻译：电容式传感器校准方法及相对电磁执行器的设备
公开(公告)号：US06472777B1
公开(公告)日：2002-10-29
申请号：US09524448
申请日：2000-03-14
申请人： Ting-Chien Teng , Bausan Yuan
发明人： Ting-Chien Teng , Bausan Yuan
IPC分类号： H02K4100
CPC分类号： G03F9/7053 , G03F7/70758 , H02K11/00 , H02K41/02 , H02K2201/18
摘要： In a stage assembly, for instance a fine stage using a pair of push-pull electro-magnetic actuators to move the stage back and forth along an axis, there is typically a sensor to determine the actual stage location. This sensor's home position must correspond to the actual stage position where the two opposed actuators are observed to exert forces of the same magnitude but opposing directions on this stage. Since the actuators depend on the sensor reading to exert their forces correctly, misalignment of the home position will decrease system performance. The calibration of this sensor is accomplished using actual system feedback signals, which are the currents drawn by the two opposed actuators, during run time conditions. The sensor is considered calibrated (meaning a virtual “null” position) when each of the two opposed actuators draws the same amount of current. If this is not the case a feedback process calibrates the sensor.
摘要翻译：在舞台组件中，例如使用一对推挽电磁致动器沿着轴线来回移动舞台的精细舞台，通常具有确定实际舞台位置的传感器。该传感器的原始位置必须对应于实际的舞台位置，其中观察到两个相对的致动器在该舞台上施加相同大小但相反方向的力。由于执行器依赖于传感器读数来正确施加力，所以原位置的偏移将降低系统性能。在运行时间条件下，使用实际的系统反馈信号来完成该传感器的校准，该系统反馈信号是两个相对的致动器所绘制的电流。当两个相对的执行器中的每一个绘制相同的电流量时，传感器被认为是校准的（意味着虚拟的“零”位置）。如果不是这样，反馈过程校准传感器。

8. 发明授权

US6130517A Magnetic actuator producing large acceleration on fine stage and low RMS power gain 失效
标题翻译：磁力执行器在精细级上产生大的加速度和低RMS功率增益
公开(公告)号：US6130517A
公开(公告)日：2000-10-10
申请号：US22713
申请日：1998-02-12
申请人： Bausan Yuan , Ting-Chien Teng
发明人： Bausan Yuan , Ting-Chien Teng
IPC分类号： G03F7/20 , G05B5/01 , G05B11/18
CPC分类号： G03F7/70758 , G03F7/70816
摘要： A pair of complementary magnetic actuators controls a stage in a high-precision positioning instrument in a single coordinate direction. Additional pairs of complementary magnetic actuators can be used to provide control of the stage in other coordinate directions. A small current through the windings of both magnetic actuators provides a zero net force on the fine stage, thus maintaining the position of the fine stage. The small current used to control the fine stage minimizes the RMS power gain. By increasing the current in one magnetic actuator while decreasing the current in the other, a net force is generated for large accelerations of the stage. Control of the magnetic actuators is simplified by simultaneously increasing and decreasing the current through the windings of the complementary magnetic actuators prior to accelerating the stage. Additionally, a feedforward command can control the magnetic actuators to decrease the settling time of the system.
摘要翻译：一对互补磁致动器控制高精度定位仪在单个坐标方向上的平台。可以使用附加的互补磁致动器对来提供其它坐标方向上的台的控制。通过两个磁致动器的绕组的小电流在精细级上提供零净力，从而保持精细级的位置。用于控制精细级的小电流使RMS功率增益最小化。通过增加一个磁致动器中的电流，同时减小另一个电流，产生用于该级的大的加速度的净力。通过在加速阶段之前同时增加和减少互补磁致动器的绕组的电流来简化磁致动器的控制。另外，前馈命令可以控制磁性执行器减少系统的建立时间。

9. 发明申请

US20080278705A1 STAGE ASSEMBLY WITH MEASUREMENT SYSTEM INITIALIZATION, VIBRATION COMPENSATION, LOW TRANSMISSIBILITY, AND LIGHTWEIGHT FINE STAGE 有权
标题翻译：具有测量系统初始化，振动补偿，低传输和轻量级精细级的阶段组装
公开(公告)号：US20080278705A1
公开(公告)日：2008-11-13
申请号：US12178240
申请日：2008-07-23
申请人： Michael Binnard , Wen-Hou Ma , Toshio Ueta , Pai-Hsueh Yang , Ting-Chien Teng , Bausan Yuan
发明人： Michael Binnard , Wen-Hou Ma , Toshio Ueta , Pai-Hsueh Yang , Ting-Chien Teng , Bausan Yuan
IPC分类号： G03B27/58
CPC分类号： G03F7/70775 , G03F7/70716 , G03F7/709
摘要： A stage assembly (220) that moves a work piece (200) about a first axis and along a first axis includes a first stage (238), a second stage (240) that retains the work piece (200), a second mover assembly (244), a measurement system, and an initialization system (1081A). The second mover assembly (244) moves the second stage (240) relative to the first stage (238) about the first axis. The measurement system (22) monitors the position of the second stage (240) about the first axis when the second stage (240) is positioned within a working range about the first axis. The initialization system (1081A) facilitates movement of the second stage (240) about the first axis when the second stage (240) is rotated about the first axis outside the working range. The second mover assembly (244) can include a mover (255) and a dampener (410) that reduces the transmission of vibration from the first stage (238) to the second stage (240). In addition, the stage assembly (220) can include a control system (24) that directs power to the mover (255) to position the second stage (240) and to compensate for vibration of the first stage (238).
摘要翻译：围绕第一轴线并沿着第一轴线移动工件（200）的台架组件（220）包括第一台（238），保持工件（200）的第二台（240），第二推动组件（244），测量系统和初始化系统（1081A）。第二移动器组件（244）围绕第一轴线相对于第一阶段（238）移动第二阶段（240）。当第二级（240）位于围绕第一轴的工作范围内时，测量系统（22）监测第二级（240）围绕第一轴的位置。当第二级（240）围绕工作范围外的第一轴线旋转时，初始化系统（1081A）有助于第二级（240）围绕第一轴的移动。第二移动器组件（244）可以包括减小从第一级（238）到第二级（240）的振动传递的移动器（255）和阻尼器（410）。另外，台架组件（220）可以包括控制系统（24），该控制系统（24）将电力引导到动子（255）以定位第二级（240）并补偿第一级（238）的振动。

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