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1. 发明授权

US5254857A Fast scanning electron microscope (FSEM) 失效
标题翻译：快速扫描电镜（FSEM）
公开(公告)号：US5254857A
公开(公告)日：1993-10-19
申请号：US963038
申请日：1992-10-19
申请人： Timothy J. Ross , Ming L. Wang , Ian D. R. Mackinnon
发明人： Timothy J. Ross , Ming L. Wang , Ian D. R. Mackinnon
IPC分类号： G01N3/00 , G01N3/02 , G01N3/30 , H01J37/28
CPC分类号： G01N3/317 , H01J37/28 , G01N2203/001 , G01N2203/005 , G01N2203/0055 , G01N2203/0067 , G01N2203/0098 , G01N2203/0234
摘要： High magnification and large depth of field with a temporal resolution of less than 100 microseconds are possible using the present invention which combines a linear electron beam produced by a tungsten filament from an SX-40A Scanning Electron Microscope (SEM), a magnetic deflection coil with lower inductance resulting from reducing the number of turns of the saddle-coil wires, while increasing the diameter of the wires, a fast scintillator, photomultiplier tube, photomultiplier tube base, and signal amplifiers and a high speed data acquisition system which allows for a scan rate of 381 frames per second and 256.times.128 pixel density in the SEM image at a data acquisition rate of 25 MHz. The data acquisition and scan position are fully coordinated. A digitizer and a digital waveform generator which generates the sweep signals to the scan coils run off the same clock to acquire the signal in real-time.
摘要翻译：使用组合由SX-40A扫描电子显微镜（SEM）的钨丝产生的线性电子束的本发明，具有小于100微秒的时间分辨率的高倍率和大景深是可能的，磁偏转线圈与同时增加线的直径，快速闪烁体，光电倍增管，光电倍增管基座和信号放大器以及允许扫描的高速数据采集系统，减少鞍形线圈线圈的匝数而产生的较低的电感在25MHz的数据采集速率下，SEM图像中每秒381帧和256×128像素密度的速率。数据采集和扫描位置完全协调。生成扫描线圈的扫描信号的数字化仪和数字波形发生器会从相同的时钟中跑出，以实时获取信号。

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