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1. 发明授权

US09228878B2 Dual beam non-contact displacement sensor 有权
标题翻译：双梁非接触位移传感器
公开(公告)号：US09228878B2
公开(公告)日：2016-01-05
申请号：US13424262
申请日：2012-03-19
申请人： Thomas Haw , Gary Kercheck
发明人： Thomas Haw , Gary Kercheck
IPC分类号： G01F23/292
CPC分类号： G01F23/292
摘要： This disclosure describes systems, methods, and apparatus for remotely monitoring an elevation, or change in elevation, of a fluid surface, such as that of molten sapphire. The remote monitoring can be performed by measuring positions of a pair of reflected laser beams off the fluid surface as detected on an imaging sensor. As the surface elevation falls, the positions of the pair of reflected laser beams move relative to each other, and this positional change can be converted into a change in the fluid surface elevation.
摘要翻译：本公开描述了用于远程监测诸如熔融蓝宝石流体表面的高程或高程变化的系统，方法和装置。可以通过在成像传感器上检测到的一侧的反射激光束离开流体表面测量位置来执行远程监视。当表面仰角降低时，一对反射激光束的位置相对于彼此移动，并且该位置变化可以转换为流体表面高度的变化。

2. 发明申请

US20130245996A1 DUAL BEAM NON-CONTACT DISPLACEMENT SENSOR 有权
标题翻译：双梁非接触式位移传感器
公开(公告)号：US20130245996A1
公开(公告)日：2013-09-19
申请号：US13424262
申请日：2012-03-19
申请人： Thomas Haw , Gary Kercheck
发明人： Thomas Haw , Gary Kercheck
IPC分类号： G06F15/00
CPC分类号： G01F23/292
摘要： This disclosure describes systems, methods, and apparatus for remotely monitoring an elevation, or change in elevation, of a fluid surface, such as that of molten sapphire. The remote monitoring can be performed by measuring positions of a pair of reflected laser beams off the fluid surface as detected on an imaging sensor. As the surface elevation falls, the positions of the pair of reflected laser beams move relative to each other, and this positional change can be converted into a change in the fluid surface elevation.
摘要翻译：本公开描述了用于远程监测诸如熔融蓝宝石流体表面的高程或高程变化的系统，方法和装置。可以通过在成像传感器上检测到的一侧的反射激光束离开流体表面测量位置来执行远程监视。当表面仰角降低时，一对反射激光束的位置相对于彼此移动，并且该位置变化可以转换为流体表面高度的变化。

3. 发明授权

US08506161B2 Compensation of stray light interference in substrate temperature measurement 有权
标题翻译：衬底温度测量中杂散光干扰的补偿
公开(公告)号：US08506161B2
公开(公告)日：2013-08-13
申请号：US13165021
申请日：2011-06-21
申请人： Thomas Haw
发明人： Thomas Haw
IPC分类号： G01J5/00
CPC分类号： G01J5/06 , G01J5/061 , G01J5/522 , G01J2005/0048
摘要： This disclosure describes systems, methods, and apparatuses for making a non-contact measurement of a substrate in a plasma processing chamber that accounts for stray blackbody radiation. In particular, a photocurrent is calculated that can be attributed to the stray blackbody radiation based upon a temperature of the stray blackbody radiation, a reflectance of a target substrate, and a temperature of the substrate. Knowing the photocurrent attributable to the stray blackbody radiation, a non-contact temperature measurement can be made, and the photocurrent attributable to the stray blackbody radiation can be subtracted out to arrive at a more accurate non-contact substrate temperature measurement.
摘要翻译：本公开描述了用于对处理杂散黑体辐射的等离子体处理室中的衬底进行非接触式测量的系统，方法和装置。特别地，计算出可以归因于杂散黑体辐射基于杂散黑体辐射的温度，目标衬底的反射率和衬底的温度的光电流。了解归因于杂散黑体辐射的光电流，可以进行非接触式温度测量，并且可以减去归因于杂散黑体辐射的光电流以获得更准确的非接触式基板温度测量。

4. 发明申请

US20130264316A1 LASER NOISE ELIMINATION IN TRANSMISSION THERMOMETRY 有权
标题翻译：传感器热噪声消除噪声
公开(公告)号：US20130264316A1
公开(公告)日：2013-10-10
申请号：US13789982
申请日：2013-03-08
申请人： Jiping Li , Aaron Muir Hunter , Thomas Haw
发明人： Jiping Li , Aaron Muir Hunter , Thomas Haw
IPC分类号： B23K26/00 , G01J5/02 , G01N21/59
摘要： Apparatus and methods for measuring the temperature of a substrate are disclosed. The apparatus includes a source of temperature-indicating radiation, a detector for the temperature-indicating radiation, and a decorrelator disposed in an optical path between the source of temperature-indicating radiation and the detector for the temperature-indicating radiation. The decorrelator may be a broadband amplifier and/or a mode scrambler. A broadband amplifier may be a broadband laser, Bragg grating, a fiber Bragg grating, a Raman amplifier, a Brillouin amplifier, or combinations thereof. The decorrelator is selected to emit radiation that is transmitted, at least in part, by the substrate being monitored. The source is matched to the decorrelator such that the emission spectrum of the source is within the gain bandwidth of the decorrelator, if the decorrelator is a gain-driven device.
摘要翻译：公开了用于测量衬底温度的装置和方法。该装置包括温度指示辐射源，用于温度指示辐射的检测器，以及设置在温度指示辐射源和温度指示辐射检测器之间的光路中的去相关器。解相关器可以是宽带放大器和/或模式扰频器。宽带放大器可以是宽带激光器，布拉格光栅，光纤布拉格光栅，拉曼放大器，布里渊放大器或其组合。选择去相关器以发射至少部分由被监测的衬底透射的辐射。如果解相关器是增益驱动装置，则源与去相关器匹配，使得源的发射光谱在解相关器的增益带宽内。

5. 发明授权

US5275160A Probes for radiance dosimetry 失效
标题翻译：辐射剂量测定探针
公开(公告)号：US5275160A
公开(公告)日：1994-01-04
申请号：US641152
申请日：1991-01-14
申请人： Lothar Lilge , Brian C. Wilson , Thomas Haw
发明人： Lothar Lilge , Brian C. Wilson , Thomas Haw
IPC分类号： G01N21/64 , A61B5/00
CPC分类号： G01N21/7703 , G01N21/6428 , G01N2021/6434 , G01N2021/772 , G01N2021/7786
摘要： The invention features a probe for radiance dosimetry. The probe includes a tip portion containing a fluorescent dye connected to a translucent spacer element.
摘要翻译：本发明的特征在于用于辐射剂量测定的探针。探针包括含有连接到半透明间隔元件的荧光染料的尖端部分。

6. 发明授权

US10421151B2 Laser noise elimination in transmission thermometry 有权
公开(公告)号：US10421151B2
公开(公告)日：2019-09-24
申请号：US13789982
申请日：2013-03-08
申请人： Jiping Li , Aaron Muir Hunter , Thomas Haw
发明人： Jiping Li , Aaron Muir Hunter , Thomas Haw
IPC分类号： B23K26/00 , G01N21/59 , G01J5/02 , G01J5/08 , G01J1/04 , G01J5/00 , G01J5/06 , G01J5/58
摘要： Apparatus and methods for measuring the temperature of a substrate are disclosed. The apparatus includes a source of temperature-indicating radiation, a detector for the temperature-indicating radiation, and a decorrelator disposed in an optical path between the source of temperature-indicating radiation and the detector for the temperature-indicating radiation. The decorrelator may be a broadband amplifier and/or a mode scrambler. A broadband amplifier may be a broadband laser, Bragg grating, a fiber Bragg grating, a Raman amplifier, a Brillouin amplifier, or combinations thereof. The decorrelator is selected to emit radiation that is transmitted, at least in part, by the substrate being monitored. The source is matched to the decorrelator such that the emission spectrum of the source is within the gain bandwidth of the decorrelator, if the decorrelator is a gain-driven device.

7. 发明申请

US20120327970A1 Compensation of Stray Light Interference in Substrate Temperature Measurement 有权
标题翻译：基板温度测量中杂散光干扰的补偿
公开(公告)号：US20120327970A1
公开(公告)日：2012-12-27
申请号：US13165021
申请日：2011-06-21
申请人： Thomas Haw
发明人： Thomas Haw
IPC分类号： G01J5/00
CPC分类号： G01J5/06 , G01J5/061 , G01J5/522 , G01J2005/0048
摘要： This disclosure describes systems, methods, and apparatuses for making a non-contact measurement of a substrate in a plasma processing chamber that accounts for stray blackbody radiation. In particular, a photocurrent is calculated that can be attributed to the stray blackbody radiation based upon a temperature of the stray blackbody radiation, a reflectance of a target substrate, and a temperature of the substrate. Knowing the photocurrent attributable to the stray blackbody radiation, a non-contact temperature measurement can be made, and the photocurrent attributable to the stray blackbody radiation can be subtracted out to arrive at a more accurate non-contact substrate temperature measurement.
摘要翻译：本公开描述了用于对处理杂散黑体辐射的等离子体处理室中的衬底进行非接触式测量的系统，方法和装置。特别地，计算出可以归因于杂散黑体辐射基于杂散黑体辐射的温度，目标衬底的反射率和衬底的温度的光电流。了解归因于杂散黑体辐射的光电流，可以进行非接触式温度测量，并且可以减去归因于杂散黑体辐射的光电流以获得更准确的非接触式基板温度测量。

8. 发明授权

US08254767B2 Method and apparatus for extended temperature pyrometry 有权
标题翻译：用于扩展温度测温法的方法和装置
公开(公告)号：US08254767B2
公开(公告)日：2012-08-28
申请号：US12547605
申请日：2009-08-26
申请人： Aaron M. Hunter , Jiping Li , Rajesh S. Ramanujam , Thomas Haw
发明人： Aaron M. Hunter , Jiping Li , Rajesh S. Ramanujam , Thomas Haw
IPC分类号： A21B2/00
CPC分类号： H01L21/67248 , H01L21/67115
摘要： Embodiments of the invention are directed to methods and apparatus for rapid thermal processing of a substrate over an extended temperature range, including low temperatures. Systems and methods for using an extended temperature pyrometry system employing a transmitted radiation detector system are disclosed. Systems combining transmitted radiation detector systems and emitted radiation detector systems are also described.
摘要翻译：本发明的实施例涉及用于在包括低温的扩展温度范围内快速热处理衬底的方法和装置。公开了使用采用透射辐射探测器系统的扩展温度测温系统的系统和方法。还描述了组合透射辐射检测器系统和发射的辐射探测器系统的系统。

9. 发明申请

US20100054720A1 Method and Apparatus for Extended Temperature Pyrometry 有权
标题翻译：用于扩展温度测量的方法和装置
公开(公告)号：US20100054720A1
公开(公告)日：2010-03-04
申请号：US12547605
申请日：2009-08-26
申请人： Aaron M. Hunter , Jiping Li , Rajesh S. Ramanujam , Thomas Haw
发明人： Aaron M. Hunter , Jiping Li , Rajesh S. Ramanujam , Thomas Haw
IPC分类号： F27B5/06
CPC分类号： H01L21/67248 , H01L21/67115
摘要： Embodiments of the invention are directed to methods and apparatus for rapid thermal processing of a substrate over an extended temperature range, including low temperatures. Systems and methods for using an extended temperature pyrometry system employing a transmitted radiation detector system are disclosed. Systems combining transmitted radiation detector systems and emitted radiation detector systems are also described.
摘要翻译：本发明的实施例涉及用于在包括低温的扩展温度范围内快速热处理衬底的方法和装置。公开了使用采用透射辐射探测器系统的扩展温度测温系统的系统和方法。还描述了组合透射辐射检测器系统和发射的辐射探测器系统的系统。

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