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    • 5. 发明申请
    • Method And System For Removing Tape From Substrates
    • 从基板去除胶​​带的方法和系统
    • US20080308221A1
    • 2008-12-18
    • US11779450
    • 2007-07-18
    • Tan Kian Shing MichaelNeo Chee PengTan Chee Yong
    • Tan Kian Shing MichaelNeo Chee PengTan Chee Yong
    • B32B38/10G05G15/04
    • B29C63/0013H01L21/67132
    • A method for removing tape from a substrate includes the step of detecting an actual distance between a peel head and the tape on the substrate, and a location of an edge of the substrate. The method also includes the steps of moving the peel head in a first direction by an amount equal to the distance to press the peel tape onto the tape on the substrate, moving the peel head in a second direction to the edge of the substrate, and then moving the peel head in an opposite second direction to peel the tape from the substrate. The detecting step can be performed using a sensor such as a capacitance probe sensor or an optical sensor. Alternately, rather than detecting the distance, a pressure sensing system can be used to press the peel head against the tape, and to maintain a predetermined pressure range during the peeling process. A system for performing the method includes sensors configured to detect the distance and the edge of the substrate, and a control system configured to control the movement of the peel head responsive to signals from the sensors. A pressure sensing system includes a compression spring and a load cell for sensing pressure, and a stepper motor configured to control movement of the peel head responsive to pressure signals.
    • 从衬底去除带的方法包括检测剥离头与基片上的带之间的实际距离以及衬底边缘的位置的步骤。 该方法还包括以下步骤:将剥离头沿第一方向移动等于将剥离带压在基材上的带上的距离,将剥离头沿第二方向移动到基板的边缘;以及 然后在相反的第二方向上移动剥离头,以从基材上剥离带子。 可以使用诸如电容探针传感器或光学传感器的传感器来执行检测步骤。 或者,不是检测距离,可以使用压力感测系统将剥离头压靠在带上,并且在剥离过程中保持预定的压力范围。 用于执行该方法的系统包括被配置为检测基板的距离和边缘的传感器,以及被配置为响应于来自传感器的信号来控制剥离头的移动的控制系统。 压力感测系统包括压缩弹簧和用于感测压力的测力传感器,以及步进电机,其构造成响应于压力信号来控制剥离头的运动。