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    • 6. 发明申请
    • Substrate treating system, substrate treating device, program, and recording medium
    • 基板处理系统,基板处理装置,程序和记录介质
    • US20060151112A1
    • 2006-07-13
    • US10541507
    • 2003-12-25
    • Takushi YoshidaMasaya Washio
    • Takushi YoshidaMasaya Washio
    • C23F1/00
    • H01L21/67253B08B3/00B08B3/02C03C15/00C03C23/0075G11B23/505
    • Of process steps of polymer removal in a substrate processing apparatus (3), in a step of discharging and spreading a removal solution to coat a rotating substrate (W), data indicative of the number of revolutions of a substrate, the temperature and flow rate of a removal solution, and removal solution discharge time is collected and a combination thereof is synthetically assessed to detect a processing abnormality. In a pure water discharge step, data indicative of the number of revolutions of a substrate, the flow rate of pure water and pure water discharge time is collected and a combination thereof synthetically assessed to detect a processing abnormality. Thus, a processing abnormality in polymer removal is detected based on a combination of important control elements in important steps largely exerting influence on the results of processing, thereby allowing detection of a processing abnormality with a higher degree of accuracy.
    • 在基板处理装置(3)中的聚合物去除的工艺步骤中,在排出和铺展除去溶液以涂覆旋转基板(W)的步骤中,指示基板的转数,温度和流速 的去除溶液,并且收集去除溶液的放电时间,并综合评估其组合以检测处理异常。 在纯水排出步骤中,收集表示基板的转数,纯水的流量和纯水排出时间的数据,合成评价其组合以检测处理异常。 因此,基于重要步骤中的重要控制元件的组合检测聚合物去除中的处理异常,大大影响处理结果,从而以更高的准确度检测处理异常。
    • 9. 发明授权
    • Damper means
    • 阻尼器意味着
    • US5871207A
    • 1999-02-16
    • US725743
    • 1996-10-04
    • Takushi Yoshida
    • Takushi Yoshida
    • A47B91/04A47B97/00F16F15/04B60H3/12A47B23/00B60R5/00F16M1/00
    • F16F15/04
    • A damper device for attachment to a shock-affected component, including a pair of elastic members for absorbing shock which may be applied to the shock-affected component, each of the elastic members taking the form of a block and having first and second sides which are opposite to each other, and a slit formed in the first side and extending into the interior of the elastic member, a support member for supporting the elastic members, the support member having a pair of spaced apart projecting pieces and an intermediate section interconnecting the spaced apart projecting pieces, each of the projecting pieces being formed to have a substantially inverted L-shape in cross-section, the intermediate section being adapted to be mounted on the shock-affected component, the elastic members being adapted to be supported to the support member by causing the elastic members to be fitted on tips of the projecting pieces through slits in the elastic members, and a pair of receiving plates adapted to be mounted on the shock-affected component close to second sides of the elastic members and elastically engaged with the second sides the elastic members and elastically engaged with the second sides of the elastic members, so that where the damper device is attached to the shock-affected component, the elastic members are securely supported to the shock-affected component through the support members and receiving plates without readily detaching from the shock-affected component.
    • 一种用于附接到受冲击影响的部件的阻尼器装置,包括一对用于吸收冲击的弹性部件,所述弹性部件可应用于受冲击影响的部件,每个弹性部件呈块形,具有第一和第二侧 彼此相对,并且形成在第一侧并延伸到弹性构件内部的狭缝,用于支撑弹性构件的支撑构件,支撑构件具有一对间隔开的突出片和中间部分, 间隔开的突出片,每个突出片形成为具有大致倒L形的横截面,中间部分适于安装在受冲击影响的部件上,弹性部件适于被支撑到 支撑构件通过使弹性构件通过弹性构件中的狭缝装配在突出片的顶端上,并且适配于一对接收板 安装在靠近弹性构件的第二侧的受冲击影响的部件上并与弹性构件的第二侧弹性接合并与弹性构件的第二侧弹性接合,使得在阻尼器装置附接到冲击 受影响的部件,弹性构件通过支撑构件和接收板牢固地支撑到受冲击影响的部件上,而不易与冲击影响的部件分离。