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1. 发明申请

US20090250855A1 Stage for substrate 有权
标题翻译：底物阶段
公开(公告)号：US20090250855A1
公开(公告)日：2009-10-08
申请号：US12384719
申请日：2009-04-08
申请人： Yasushi Fujii , Takuma Hasegawa
发明人： Yasushi Fujii , Takuma Hasegawa
IPC分类号： H01L21/687 , B25B11/00
CPC分类号： H01L21/68742 , H01L21/67109 , H01L21/68735
摘要： A stage is provided on which is mounted a substrate that has a concavo-convex portion such as a circuit formed on the underside thereof. A channel 3 through which a coolant such as water flows is formed in a stage 1. An annular flange portion 4 is formed on the top surface of the stage 1. The inner side of the flange portion 4 forms a concave portion 5. The top surface of the flange portion 4 is provided with a smooth finish in order to mount a peripheral section of the underside of a substrate W thereon. Holes through which are passed three positioning pins 6 and lift pins 7 are provided in the flange portion 4 at regular intervals in the circumferential direction.
摘要翻译：在其上设置有具有诸如形成在其下侧上的电路的凹凸部分的基板的台。在阶段1中形成有诸如水的冷却剂流过的通道3.在台1的顶面上形成有环形凸缘部4.凸缘部4的内侧形成凹部5.顶部凸缘部4的表面设置有光滑的光洁度，以便在其上安装衬底W的下侧的周边部分。通过三个定位销6和提升销7的孔在圆周方向上以规则的间隔设置在凸缘部分4中。

2. 发明授权

US08336866B2 Stage for substrate 有权
标题翻译：底物阶段
公开(公告)号：US08336866B2
公开(公告)日：2012-12-25
申请号：US12384719
申请日：2009-04-08
申请人： Yasushi Fujii , Takuma Hasegawa
发明人： Yasushi Fujii , Takuma Hasegawa
IPC分类号： B25B1/00 , B25B1/02 , B25B1/10 , B25B5/00 , B25B1/24 , B24B5/16 , B23Q3/00 , H01L21/687
CPC分类号： H01L21/68742 , H01L21/67109 , H01L21/68735
摘要： A stage is provided on which is mounted a substrate that has a concavo-convex portion such as a circuit formed on the underside thereof. A channel 3 through which a coolant such as water flows is formed in a stage 1. An annular flange portion 4 is formed on the top surface of the stage 1. The inner side of the flange portion 4 forms a concave portion 5. The top surface of the flange portion 4 is provided with a smooth finish in order to mount a peripheral section of the underside of a substrate W thereon. Holes through which are passed three positioning pins 6 and lift pins 7 are provided in the flange portion 4 at regular intervals in the circumferential direction.
摘要翻译：在其上设置有具有诸如形成在其下侧上的电路的凹凸部分的基板的台。在阶段1中形成有诸如水的冷却剂流过的通道3.在台1的顶面上形成有环形凸缘部4.凸缘部4的内侧形成凹部5.顶部凸缘部4的表面设置有光滑的光洁度，以便在其上安装衬底W的下侧的周边部分。通过三个定位销6和提升销7的孔在圆周方向上以规则的间隔设置在凸缘部分4中。

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