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1. 发明申请

US20110309719A1 SURFACE ACOUSTIC WAVE ELEMENT AND METHOD OF MANUFACTURING SAME 有权
标题翻译：表面声波元件及其制造方法
公开(公告)号：US20110309719A1
公开(公告)日：2011-12-22
申请号：US13219739
申请日：2011-08-29
申请人： Hisashi YAMAZAKI , Hideaki TAKAHASHI , Taku KIKUCHI
发明人： Hisashi YAMAZAKI , Hideaki TAKAHASHI , Taku KIKUCHI
IPC分类号： H01L41/04 , H01L41/22
CPC分类号： H03H9/0009 , H03H9/02818 , H03H9/02834 , Y10T29/42
摘要： A surface acoustic wave element has a small energy loss and when it is used in a filter device, suppresses a spurious component occurring near the resonant frequency of a principal response and improves the frequency characteristic near the pass band of the filter device. The surface acoustic wave element includes a piezoelectric substrate, a comb-shaped electrode, and an insulating film. The comb-shaped electrode is disposed on the piezoelectric substrate. The insulating film is disposed so as to cover the piezoelectric substrate and the comb-shaped electrode. Where λ is the wavelength of an elastic wave that propagates in the piezoelectric substrate and h is the difference between the maximum and minimum values of a thickness dimension from the top surface of the piezoelectric substrate to the top surface of the insulating film, 0.01≦h/λ≦0.03 is satisfied.
摘要翻译：表面声波元件具有小的能量损失，并且当其用于滤波器装置时，抑制在主响应的谐振频率附近发生的杂散分量，并且改善滤波器装置的通带附近的频率特性。声表面波元件包括压电基片，梳状电极和绝缘膜。梳状电极设置在压电基板上。绝缘膜设置成覆盖压电基板和梳状电极。其中λ是在压电衬底中传播的弹性波的波长，h是从压电衬底的顶表面到绝缘膜的顶表面的厚度尺寸的最大值和最小值之间的差值，0.01＆nlE; h /λ＆nlE; 0.03。

2. 发明授权

US08575818B2 Surface acoustic wave element 有权
标题翻译：表面声波元件
公开(公告)号：US08575818B2
公开(公告)日：2013-11-05
申请号：US13219739
申请日：2011-08-29
申请人： Hisashi Yamazaki , Hideaki Takahashi , Taku Kikuchi
发明人： Hisashi Yamazaki , Hideaki Takahashi , Taku Kikuchi
IPC分类号： H01L41/08 , H03H9/00
CPC分类号： H03H9/0009 , H03H9/02818 , H03H9/02834 , Y10T29/42
摘要： A surface acoustic wave element has a small energy loss and when it is used in a filter device, suppresses a spurious component occurring near the resonant frequency of a principal response and improves the frequency characteristic near the pass band of the filter device. The surface acoustic wave element includes a piezoelectric substrate, a comb-shaped electrode, and an insulating film. The comb-shaped electrode is disposed on the piezoelectric substrate. The insulating film is disposed so as to cover the piezoelectric substrate and the comb-shaped electrode. Where λ is the wavelength of an elastic wave that propagates in the piezoelectric substrate and h is the difference between the maximum and minimum values of a thickness dimension from the top surface of the piezoelectric substrate to the top surface of the insulating film, 0.01≦h/λ≦0.03 is satisfied.
摘要翻译：表面声波元件具有小的能量损失，并且当其用于滤波器装置时，抑制在主响应的谐振频率附近发生的杂散分量，并且改善滤波器装置的通带附近的频率特性。声表面波元件包括压电基片，梳状电极和绝缘膜。梳状电极设置在压电基板上。绝缘膜设置成覆盖压电基板和梳状电极。其中λ是在压电衬底中传播的弹性波的波长，h是从压电衬底的顶表面到绝缘膜的顶表面的厚度尺寸的最大值和最小值之间的差，0.01@h /lambda@0.03满意。

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