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    • 2. 发明授权
    • Method of detecting specific defect, and system and program for detecting specific defect
    • 检测特定缺陷的方法,以及用于检测特定缺陷的系统和程序
    • US08736832B2
    • 2014-05-27
    • US13428064
    • 2012-03-23
    • Takeshi Funada
    • Takeshi Funada
    • G01N21/956
    • G01N21/9501
    • The present invention provides a detection method which allows specific defects that would occur on a wafer surface to be detected more reliably. A method of detecting a specific defect of the present invention includes the steps of: acquiring a light point map which is in-plane position information of a light point detected in a position corresponding to a defect on a surface of a wafer by irradiating the surface of the wafer with light (S101); specifying a determination region where a specific defect is expected to be formed and a reference region which is a given region other than the determination region in the light point map, and calculating a ratio of a light point density of the determination region to a light point density of the reference region (S102); and determining whether or not the specific defect is formed based on the calculated ratio (S103).
    • 本发明提供一种能够更可靠地检测在晶片表面发生的特定缺陷的检测方法。 检测本发明的特定缺陷的方法包括以下步骤:通过照射表面获取在与晶片表面上的缺陷相对应的位置中检测到的光点的平面内位置信息的光点图 的光(S101); 指定期望形成特定缺陷的确定区域和作为光点图中的确定区域以外的给定区域的参考区域,并且计算确定区域的光点密度与光点的比率 参考区域的密度(S102); 以及基于所计算的比率来确定是否形成所述特定缺陷(S103)。
    • 3. 发明申请
    • METHOD OF DETECTING SPECIFIC DEFECT, AND SYSTEM AND PROGRAM FOR DETECTING SPECIFIC DEFECT
    • 检测特定缺陷的方法,以及用于检测特定缺陷的系统和程序
    • US20120176612A1
    • 2012-07-12
    • US13428064
    • 2012-03-23
    • Takeshi Funada
    • Takeshi Funada
    • G01N21/956
    • G01N21/9501
    • The present invention provides a detection method which allows specific defects that would occur on a wafer surface to be detected more reliably. A method of detecting a specific defect of the present invention includes the steps of: acquiring a light point map which is in-plane position information of a light point detected in a position corresponding to a defect on a surface of a wafer by irradiating the surface of the wafer with light (S101); specifying a determination region where a specific defect is expected to be formed and a reference region which is a given region other than the determination region in the light point map, and calculating a ratio of a light point density of the determination region to a light point density of the reference region (S102); and determining whether or not the specific defect is formed based on the calculated ratio (S103).
    • 本发明提供一种能够更可靠地检测在晶片表面发生的特定缺陷的检测方法。 检测本发明的特定缺陷的方法包括以下步骤:通过照射表面获取在与晶片表面上的缺陷相对应的位置中检测到的光点的平面内位置信息的光点图 的光(S101); 指定期望形成特定缺陷的确定区域和作为光点图中的确定区域以外的给定区域的参考区域,并且计算确定区域的光点密度与光点的比率 参考区域的密度(S102); 以及基于所计算的比率来确定是否形成所述特定缺陷(S103)。