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    • 2. 发明授权
    • Ultra-high purity nitrogen trifluoride production method, and unit
therefor
    • 超高纯三氟化氮的生产方法及其单元
    • US5832746A
    • 1998-11-10
    • US856005
    • 1997-05-14
    • Takashi Nagamura
    • Takashi Nagamura
    • C01B21/083F25J3/02F25J3/08F25J1/00
    • C01B21/0832Y10S62/918Y10S62/928
    • An ultra-high purity nitrogen trifluoride production method comprises: pressurizing a nitrogen trifluoride feed gas, eliminating moisture and carbon dioxide from the feed gas, and cooling down the same feed gas; causing the cooled feed gas to pass through adsorption columns, and introducing it into a medium-pressure rectification column by way of a reboiler in the medium-pressure rectification column, where it is rectified in the medium-pressure rectification column; introducing the resulting gas obtained by this rectification into a middle stage of a low-pressure rectification column, where it is rectified; and taking out ultra-high purity nitrogen trifluoride obtained by virtue of this rectification from the lower part of the low-pressure rectification column.
    • 超高纯度三氟化氮的制造方法包括:对三氟化氮进料气进行加压,从原料气中除去水分和二氧化碳,并冷却相同的原料气; 使冷却的进料气体通过吸附塔,并通过中压精馏塔中的再沸器将其引入中压精馏塔中,在中压精馏塔中进行精馏; 将通过该精馏得到的所得气体引入低压精馏塔的中间阶段,在其中进行精馏处理; 从低压精馏塔的下部取出由该整流得到的超高纯度三氟化氮。
    • 3. 发明授权
    • Method and apparatus for preparing high purity hydrogen bromide
    • 制备高纯度溴化氢的方法和装置
    • US5685169A
    • 1997-11-11
    • US635954
    • 1996-05-06
    • Takashi NagamuraShinji Tomita
    • Takashi NagamuraShinji Tomita
    • F25J3/02B01D3/14B01D3/32C01B7/09F25J3/08
    • B01D3/32B01D3/14C01B7/093Y10S62/902Y10S62/918
    • A method and apparatus for preparing high purity hydrogen bromide, wherein a starting hydrogen bromide which contains impurities having low boiling points is supplied to an intermediate space. While the gas phase of the starting hydrogen bromide is allowed to ascend through an upper rectifying section, it is brought into contact with a first reflux solution flowing in the reverse direction. The uncondensed gas stored in an upper space is cooled and partly condensed. The condensed liquid is allowed to flow down through an upper rectifying section as the first reflux solution. The liquid-phase of the starting hydrogen bromide is mixed with the first reflux solution in the intermediate space and serves as a second reflux solution. The liquid stored in a lower space is heated and partly evaporated. The liquid stored in the lower space is supplied outside as high purity hydrogen bromide. The uncondensed gas stored in the upper space is discharged outside.
    • PCT No.PCT / JP95 / 01809 Sec。 371日期:1996年5月6日 102(e)日期1996年5月6日PCT提交1995年9月13日PCT公布。 公开号WO96 / 08442 日期:1996年3月21日制备高纯度溴化氢的方法和装置,其中含有低沸点杂质的起始溴化氢供给中间空间。 当起始溴化氢的气相通过上部精馏段上升时,使其与反向流动的第一回流溶液接触。 存储在上部空间中的未冷凝气体被冷却并部分冷凝。 冷凝的液体作为第一回流溶液通过上部精馏部分流下。 起始溴化氢的液相与中间空间中的第一回流溶液混合并用作第二回流溶液。 储存在较低空间的液体被加热并部分蒸发。 储存在较低空间的液体作为高纯度溴化氢供给到外部。 储存在上部空间的未冷凝气体排出到外部。
    • 5. 发明授权
    • Ultra-high purity nitrogen generating method and unit
    • 超高纯氮生成方法和单位
    • US5682761A
    • 1997-11-04
    • US684057
    • 1996-07-19
    • Takashi NagamuraTakao YamamotoShinji Tomita
    • Takashi NagamuraTakao YamamotoShinji Tomita
    • B01D53/04B01D53/86F25J3/04F25J3/08F25J1/00
    • F25J3/04357B01D53/0423F25J3/04157F25J3/04254F25J3/04321F25J3/04636F25J3/04642B01D2256/10B01D2257/504B01D2257/80B01D2259/40001F25J2200/04F25J2200/90F25J2205/60F25J2205/82F25J2210/42F25J2215/30F25J2215/44F25J2220/42F25J2220/44F25J2230/42F25J2245/42F25J2270/90Y02C10/08Y10S62/913
    • Ultra-high purity nitrogen is generated by removing, from feed air, carbon dioxide, moisture and catalyst poisons of an oxidation catalyst contained therein by a decarbonating drier (4). The feed air is then introduced into a low-pressure rectification column (6), where it is roughly rectified to further remove the carbon dioxide, moisture and catalyst poison. Then raw nitrogen gas obtained in the low-pressure rectification column (6) is introduced into an oxidation column (8) so that carbon monoxide in the raw nitrogen gas is converted to carbon dioxide and hydrogen also contained therein to water. Thereafter the raw nitrogen gas is introduced into an adsorption column (10) so that carbon dioxide and water are removed by adsorption to provide feed raw nitrogen gas, which is fed into an intermediate-pressure rectification column (11), where it is rectified. Nitrogen gas from the top portion of the intermediate-pressure rectification column is condensed by a reboiler-condenser (6RC) to provide high purity liquid nitrogen; and the liquid nitrogen is returned to the intermediate-pressure rectification column (11), whereby a part of this high purity liquid nitrogen is used as a reflux liquid and the remaining part thereof is taken out of a rectifying stage that is several stages below the rectifying stage in the top portion of the intermediate-pressure rectification column as an ultra-high purity nitrogen gas product or ultra-high purity liquid nitrogen product.
    • 通过由脱碳干燥器(4)除去其中含有的氧化催化剂的二氧化碳,水分和催化剂毒物,从而从进料空气中除去超高纯氮。 然后将进料空气引入低压精馏塔(6)中,其中其大致精馏以进一步除去二氧化碳,水分和催化剂毒物。 然后,将在低压精馏塔(6)中得到的原料氮气导入氧化塔(8),将原料氮气中的一氧化碳转化为二氧化碳,氢也含有。 然后,将原料氮气引入吸附塔(10),通过吸附除去二氧化碳和水,以提供进料原料氮气,该原料氮气进料到中压精馏塔(11)中,在那里进行精馏。 来自中压精馏塔顶部的氮气通过再沸器 - 冷凝器(6RC)冷凝以提供高纯度液氮; 并将液氮返回中压精馏塔(11),由此将该部分高纯度液氮用作回流液体,其余部分被从几级下方的精馏段中取出 作为超高纯度氮气产物或超高纯度液氮产物的中压精馏塔顶部的精馏段。
    • 6. 发明授权
    • Method of producing ultra high purity monosilane and apparatus therefor
    • 生产超高纯度硅烷的方法及其设备
    • US5617740A
    • 1997-04-08
    • US553532
    • 1995-12-27
    • Takashi NagamuraShinji Tomita
    • Takashi NagamuraShinji Tomita
    • B01D3/14C01B33/04F25J3/02F25J3/08F25J3/00
    • C01B33/046B01D3/14Y10S62/905
    • A method and unit for easily and continuously producing high pressure gaseous monosilane and high pressure liquid monosilane, each having an ultra high purity. In the ultra high purity monosilane producing method, a feed monosilane gas is pressurized, cooled down and subjected to a gas-liquid phase separation. The separated gas phase is introduced to a lower rectification column 1 so as to be rectified. The gas obtained through this rectification is introduced to an upper rectification column 2 so as to be rectified, wherein a gaseous monosilane product or liquid monosilane product having an ultra high purity is taken out of the bottom portion of the upper rectification column.
    • PCT No.PCT / EP95 / 01084第 371 1995年12月27日第 102(e)1995年12月27日PCT PCT 1995年3月22日PCT公布。 WO95 / 26927 PCT公开号 日期1995年10月12日一种容易且连续地生产高纯度气态单硅烷和高压液体单硅烷的方法和单元,每种都具有超高纯度。 在超高纯度硅烷制造方法中,进料单硅烷气体被加压,冷却并进行气相分离。 将分离的气相引入到下部精馏塔1中以进行整流。 通过该精馏得到的气体被引入上部精馏塔2中以进行精馏,其中从上部精馏塔底部取出具有超高纯度的气态单硅烷产物或液体单硅烷产物。
    • 8. 发明授权
    • Air separating unit
    • 空气分离单元
    • US5546765A
    • 1996-08-20
    • US392341
    • 1995-02-22
    • Takashi NagamuraShinji Tomita
    • Takashi NagamuraShinji Tomita
    • F25J3/04F25J3/02
    • F25J3/04284F25J3/04163F25J3/04169F25J3/044F25J3/04969F25J2200/72F25J2200/90F25J2205/82F25J2215/40F25J2215/44F25J2220/40F25J2250/20Y10S62/901
    • An air separating unit which can jointly produce high purity nitrogen gas and compressed dry air of high quality freed of hydrocarbons such as methane and ethane. The air separating unit is constructed such that compressed dry air freed of hydrogen, carbon monoxide, carbon dioxide and moisture is cooled down near to its liquefying point and introduced into a rectification column (30) and nitrogen gas separated by rectification from the compressed dry air in this rectification column (30) is taken out as a product. The rectifying portion in the rectification column (30) is divided into a lower rectifying portion (34) and an upper rectifying portion (36), and in this lower rectifying portion (34), hydrocarbons such as methane are mainly removed from the compressed dry air, and the compressed dry air which has passed through the lower rectifying portion (34) is taken out as a product.
    • 一种可共同生产高纯度氮气和高品质压缩干燥空气的空气分离装置,可以排放碳氢化合物如甲烷和乙烷。 空气分离单元被构造成使得排出氢气,一氧化碳,二氧化碳和水分的压缩干燥空气在其液化点附近被冷却并被引入精馏塔(30),并将氮气从压缩干燥空气中分离 在该精馏塔(30)中作为产品取出。 精馏塔(30)中的精馏部分分为下整流部(34)和上精馏部(36),在该下精馏部(34)中,主要从压缩干燥 将通过下部精馏部(34)的压缩干燥空气作为产品取出。
    • 9. 发明授权
    • Ultra-high purity monosilane producing process and unit
    • 超高纯度甲硅烷生产工艺及单位
    • US5499506A
    • 1996-03-19
    • US256970
    • 1994-11-16
    • Takashi NagamuraShinji Tomita
    • Takashi NagamuraShinji Tomita
    • F25J3/02C01B33/04F25J3/08F25J3/00
    • C01B33/046Y10S62/931
    • Provided is a process and an apparatus for producing ultra-high purity monosilane. In a preferred embodiment, the process comprises introducing a monosilane feed gas, which also serves as a heat source, to the lower stage of a rectification column which is sectioned into an upper stage, a middle stage and a lower stage by means of an intermediate portion reboiler-condenser and a lower portion reboiler-condenser. The monosilane feed gas is cooled in the lower portion of the reboiler-condenser so that the higher boiling point components in the feed gas are separated. The remaining lower boiling point components are then introduced into the upper stage by way of the middle stage and the intermediate portion of the reboiler-condenser. The remaining components are condensed in the top portion of the upper stage so that monosilane and the lower boiling point components are separated, with the condensed monosilane becoming a reflux liquid. Ultra-high purity monosilane is thereby obtained and removed from the bottom portion of the upper stage of the unit.
    • PCT No.PCT / EP93 / 03378 371日期:1994年11月16日 102(e)日期1994年11月16日PCT 1993年11月30日PCT PCT。 公开号WO94 / 12837 日期:1994年6月9日。提供了一种生产超高纯度硅烷的方法和设备。 在优选的实施方案中,该方法包括将作为热源的单硅烷进料气体引入精馏塔的下段,该精馏塔通过中间体分段成上段,中段和下段 部分再沸器 - 冷凝器和下部再沸器 - 冷凝器。 在再沸器 - 冷凝器的下部冷却单硅烷进料气体,使进料气体中的较高沸点组分分离。 剩余的低沸点组分然后通过再沸器 - 冷凝器的中间阶段和中间部分被引入上段。 其余的组分在上段的顶部被冷凝,使得甲硅烷和低沸点组分被分离,缩合的甲硅烷变成回流液体。 由此,从单元的上层的底部获得并除去超高纯度的甲硅烷。