专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US6003828A Means for supporting a mask 失效
标题翻译：支持面具的手段
公开(公告)号：US6003828A
公开(公告)日：1999-12-21
申请号：US85017
申请日：1998-05-28
申请人： Takashi Kawahashi , Hiromi Kai
发明人： Takashi Kawahashi , Hiromi Kai
IPC分类号： G03F7/20 , H01L21/027 , H01L21/68 , F16M13/00 , G03B27/58 , G03B27/62
CPC分类号： G03F7/707 , G03F7/2002 , H01L21/682
摘要： To prevent tilting or bending of a large mask frame holder and at the same time to prevent distortion when the mask holding frame is attached to a support base by ball plungers in three of the four corner areas of a mask holding frame that engage V groove bodies which face the ball plungers on the surface of the base, compression springs are provided in those three corners which pre-stress the mask holding frame toward the support base while a compression spring is provided between the remaining corner area of the mask holding frame and the base which acts in a direction pressing the mask holding frame away from the support base, thereby preventing the mask holding frame from bending or tilting. As an alternative, in each of the three pre-stressed corner areas of the mask holding frame, instead of a compression spring, an elastic attachment component in the form of a bracket with spring-like legs mounted to the supporting component can be provided.
摘要翻译：为了防止大面罩框架保持架的倾斜或弯曲，并且同时防止当将面罩保持框架通过球形插塞安装在支撑座上时在面罩保持框架的四个角区域中接合V形槽体的同时防止变形其面对基座表面上的球形突起，压缩弹簧被设置在那些三个角部，这三个角部将荫罩保持框架朝向支撑基座预压，同时在掩模保持框架的剩余拐角区域和基部，其沿着将荫罩保持框架远离支撑基座的方向作用，从而防止荫罩保持框架弯曲或倾斜。作为替代方案，在掩模保持框架的三个预应力角区域中的每一个中，代替压缩弹簧，可以提供具有安装到支撑部件上的弹簧状支架的支架形式的弹性附接部件。

IPRDB

热门服务

关于我们

友情链接

联系方式