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    • 4. 发明申请
    • Shape measurement device probe and shape measurement device
    • 形状测量装置探头和形状测量装置
    • US20100011601A1
    • 2010-01-21
    • US11919557
    • 2007-05-08
    • Takanori FunabashiKeiichi Yoshizumi
    • Takanori FunabashiKeiichi Yoshizumi
    • G01B5/16
    • G01B5/012G01B7/012G01B11/007
    • There are provided a shape measurement device capable of measuring shapes irrespective of an inclined direction of a side surface without using a complex device configuration, and a shape measurement device probe arranged in the shape measurement device. In the shape measurement device probe, a connecting mechanism for connecting an attachment member and a swinging member includes a supporting point member arranged on the swinging member and a mounting platform arranged on the attachment member, and connects the swinging member to the attachment member so as to be inclinable in any direction. The attachment member and the swinging member are configured such that a movable side member arranged on the swinging member and a fixed side member arranged on the attachment member generate magnetic attraction force in a non-contacting state with respect to each other, where the arm of the swinging member is biased so as to be directed in the vertical direction by the magnetic attraction force. According to this configuration, a side surface shape inclined in any direction of XY directions and substantially parallel to the Z-direction can be measured.
    • 提供一种形状测量装置,并且不需要使用复杂的装置结构就能够测量与侧面的倾斜方向无关的形状,以及设置在形状测量装置中的形状测量装置探针。 在形状测量装置探针中,用于连接安装构件和摆动构件的连接机构包括布置在摆动构件上的支撑构件和布置在安装构件上的安装平台,并且将摆动构件连接到附接构件,以便 可以在任何方向倾斜。 安装构件和摆动构件被构造成使得设置在摆动构件上的可动侧构件和布置在附接构件上的固定侧构件相对于彼此以非接触状态产生磁吸引力,其中臂 摆动构件通过磁吸引力被偏置成在垂直方向上被引导。 根据该结构,能够测定沿XY方向的任意方向和Z方向大致平行的侧面形状。