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    • 2. 发明授权
    • Semiconductor device and method of manufacturing the semiconductor device
    • 半导体装置及其制造方法
    • US07714380B2
    • 2010-05-11
    • US11984012
    • 2007-11-13
    • Tae-Hong Lim
    • Tae-Hong Lim
    • H01L29/78
    • H01L29/66553H01L21/823437H01L21/823462H01L21/823487H01L29/66787
    • A semiconductor device includes a pair of first source/drain regions disposed on a silicon substrate. A first silicon epitaxial layer pattern defines a gate forming region that exposes the silicon substrate between the pair of first source/drain regions. A first gate insulation layer is disposed on the silicon substrate in the gate forming region. A second gate insulation layer is disposed on a sidewall of the first silicon epitaxial layer pattern. A second silicon epitaxial layer pattern is disposed in the gate forming region and on the first silicon epitaxial layer pattern. A pair of second source/drain regions is disposed on the second silicon epitaxial layer pattern. A third gate insulation layer exposes the second silicon epitaxial layer pattern in the gate forming region and covers the pair of second source/drain regions. A gate is disposed on the second silicon epitaxial layer pattern in the gate forming region.
    • 半导体器件包括设置在硅衬底上的一对第一源极/漏极区域。 第一硅外延层图案限定了在一对第一源极/漏极区域之间暴露硅衬底的栅极形成区域。 第一栅极绝缘层设置在栅极形成区域中的硅衬底上。 第二栅极绝缘层设置在第一硅外延层图案的侧壁上。 在栅极形成区域和第一硅外延层图案上设置第二硅外延层图案。 一对第二源极/漏极区域设置在第二硅外延层图案上。 第三栅极绝缘层在栅极形成区域中暴露第二硅外延层图案并覆盖该对第二源极/漏极区域。 在栅极形成区域中的第二硅外延层图案上设置栅极。
    • 8. 发明授权
    • Semiconductor device and method of manufacturing the same
    • 半导体装置及其制造方法
    • US07160778B2
    • 2007-01-09
    • US11314135
    • 2005-12-21
    • Tae-Hong Lim
    • Tae-Hong Lim
    • H01L21/336
    • H01L29/78642H01L29/66666H01L29/7827
    • A semiconductor device having a vertical gate and method of manufacturing the same are disclosed. An example semiconductor device includes a pair of first source/drain regions formed apart from each other by a predetermined distance on a silicon substrate, a first silicon epitaxial layer formed on the pair of first source/drain regions, a vertical gate insulation layer formed at both sidewalls of the first silicon epitaxial layer, and a second silicon epitaxial layers formed on the first silicon epitaxial layer and on the gate insulation layer. The example device includes a pair of second source/drain regions formed in the second silicon epitaxial layer formed on the first silicon epitaxial layer, at positions above the pair of first source/drain regions, and a plurality of vertical gates respectively connected to the second silicon epitaxial layer formed on the gate insulation layer and to the pair of second source/drain regions.
    • 公开了一种具有垂直栅极的半导体器件及其制造方法。 一种示例性半导体器件包括在硅衬底上彼此分开形成预定距离的一对第一源极/漏极区域,形成在该对第一源极/漏极区域上的第一硅外延层,形成在第一源极/漏极区域上的垂直栅极绝缘层 第一硅外延层的两个侧壁和形成在第一硅外延层上和栅极绝缘层上的第二硅外延层。 示例性器件包括形成在第一硅外延层上形成的第二硅外延层中的一对第二源极/漏极区,位于该对第一源极/漏极区上方的位置处,以及多个垂直栅极,分别连接到第二硅 硅外延层,形成在栅极绝缘层和一对第二源极/漏极区上。
    • 9. 发明授权
    • Method of manufacturing a high voltage semiconductor device including a deep well and a gate oxide layer simultaneously
    • 同时制造包括深阱和栅极氧化物层的高电压半导体器件的方法
    • US07507647B2
    • 2009-03-24
    • US11313693
    • 2005-12-22
    • Tae-Hong Lim
    • Tae-Hong Lim
    • H01L21/425
    • H01L21/823878H01L21/823892
    • A method of manufacturing a high voltage semiconductor device including forming a P-type region implanted with P-type impurities and an N-type region implanted with N-type impurities in a silicon substrate. The method further includes forming a silicon nitride layer pattern and a pad oxide layer pattern to expose a surface of the silicon substrate, forming a trench by etching the exposed silicon substrate using the silicon nitride layer pattern as an etch mask, forming a trench oxide layer pattern in the trench by removing the silicon nitride layer pattern and the pad oxide layer pattern, and simultaneously forming a deep P-well and a deep N-well by driving P-type impurities in the P-type region and N-type impurities in the N-type region into the silicon substrate, while forming a gate oxide layer on a silicon substrate including the trench oxide layer pattern.
    • 一种制造高电压半导体器件的方法,包括在硅衬底中形成注入了P型杂质的P型区域和注入N型杂质的N型区域。 该方法还包括形成氮化硅层图案和焊盘氧化物层图案以暴露硅衬底的表面,通过使用氮化硅层图案蚀刻暴露的硅衬底作为蚀刻掩模形成沟槽,形成沟槽氧化物层 通过去除氮化硅层图案和焊盘氧化物层图案在沟槽中形成图案,并且通过驱动P型区域中的P型杂质和N型杂质同时形成深P阱和深N阱 同时在包括沟槽氧化物层图案的硅衬底上形成栅极氧化层,形成硅衬底的N型区域。
    • 10. 发明申请
    • Semiconductor device and method of manufacturing the semiconductor device
    • 半导体装置及其制造方法
    • US20080067582A1
    • 2008-03-20
    • US11984012
    • 2007-11-13
    • Tae-Hong Lim
    • Tae-Hong Lim
    • H01L29/78
    • H01L29/66553H01L21/823437H01L21/823462H01L21/823487H01L29/66787
    • A semiconductor device includes a pair of first source/drain regions disposed on a silicon substrate. A first silicon epitaxial layer pattern defines a gate forming region that exposes the silicon substrate between the pair of first source/drain regions. A first gate insulation layer is disposed on the silicon substrate in the gate forming region. A second gate insulation layer is disposed on a sidewall of the first silicon epitaxial layer pattern. A second silicon epitaxial layer pattern is disposed in the gate forming region and on the first silicon epitaxial layer pattern. A pair of second source/drain regions is disposed on the second silicon epitaxial layer pattern. A third gate insulation layer exposes the second silicon epitaxial layer pattern in the gate forming region and covers the pair of second source/drain regions. A gate is disposed on the second silicon epitaxial layer pattern in the gate forming region.
    • 半导体器件包括设置在硅衬底上的一对第一源极/漏极区域。 第一硅外延层图案限定了在一对第一源极/漏极区域之间暴露硅衬底的栅极形成区域。 第一栅极绝缘层设置在栅极形成区域中的硅衬底上。 第二栅极绝缘层设置在第一硅外延层图案的侧壁上。 在栅极形成区域和第一硅外延层图案上设置第二硅外延层图案。 一对第二源极/漏极区域设置在第二硅外延层图案上。 第三栅极绝缘层在栅极形成区域中暴露第二硅外延层图案并覆盖该对第二源极/漏极区域。 在栅极形成区域中的第二硅外延层图案上设置栅极。