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1. 发明授权

US07208428B2 Method and apparatus for treating article to be treated 失效
标题翻译：用于治疗待治疗物品的方法和装置
公开(公告)号：US07208428B2
公开(公告)日：2007-04-24
申请号：US10433423
申请日：2001-12-04
申请人： Shingo Hishiya , Yoshikazu Furusawa , Teruyuki Hayashi , Misako Saito , Kota Umezawa , Syoichi Sato
发明人： Shingo Hishiya , Yoshikazu Furusawa , Teruyuki Hayashi , Misako Saito , Kota Umezawa , Syoichi Sato
IPC分类号： H01L21/324 , H01L21/477
CPC分类号： H01L21/02046 , C30B33/00 , H01L21/02238 , H01L21/02255 , H01L21/02301 , H01L21/02312 , H01L21/31138 , H01L21/31662 , H01L21/67109
摘要： A thermal treatment apparatus 1 includes a reaction tube 2 for containing wafers 10 contaminated with organic substances having a heater 12 capable of heating the reaction tube; a first gas supply pipe 13 for carrying oxygen gas into the reaction tube 2; and a second gas supply pipe 14 for carrying hydrogen gas into the reaction tube 2. Oxygen gas and hydrogen gas are supplied through the first gas supply pipe 13 and the second gas supply pipe 14, respectively, into the reaction tube 2, and the heater 12 heats the reaction tube 2 at a temperature capable of activating oxygen gas and hydrogen gas. A combustion reaction occurs in the reaction tube 2 and thereby the organic substances adhering to the wafers 10 are oxidized, decomposed and removed.
摘要翻译：热处理装置1包括反应管2，用于容纳被有机物质污染的晶片10，该有机物质具有加热反应管的加热器12; 用于将氧气输送到反应管2中的第一气体供给管13; 以及用于将氢气输送到反应管2中的第二气体供给管14。氧气和氢气分别通过第一气体供给管13和第二气体供给管14供给到反应管2中，加热器12在能够活化氧气和氢气的温度下加热反应管2 。在反应管2中发生燃烧反应，因此附着在晶片10上的有机物被氧化，分解除去。

2. 发明授权

US4106627A Method and apparatus for use in separation and recovery of non-magnetic metal pieces 失效
标题翻译：用于分离和回收非磁性金属片的方法和装置
公开(公告)号：US4106627A
公开(公告)日：1978-08-15
申请号：US650852
申请日：1976-01-21
申请人： Ryuji Watanabe , Syoichi Sato , Sadami Tomita
发明人： Ryuji Watanabe , Syoichi Sato , Sadami Tomita
IPC分类号： B03C1/23 , B03C1/247 , B03B1/00
CPC分类号： B03C1/247 , B03C2201/20
摘要： An apparatus for use in separation and recovery of pieces of different materials according to the difference in electric conductivity of each kind of materials, by utilizing the interaction between a magnetic field, induced by the eddy current and an external magnetic field. The separating capability of the apparatus of the type is largely dependent upon the shape of pieces being separated as well as the difference in electric conductivity between the pieces of different materials. According to the apparatus of the present invention, samples to be separated are rolled into a flat shape, then subjected to the screening, followed by their passing through a plurality of rotating magnetic fields whose intensities are being increased one by one, whereby the sample pieces are separated effectively according to their electric conductivity, and thus recovered.
摘要翻译：通过利用由涡电流引起的磁场与外部磁场之间的相互作用，根据各种材料的导电性差异，分离回收不同材料的装置。该类型的装置的分离能力在很大程度上取决于分离件的形状以及不同材料之间的导电性差异。根据本发明的装置，将要分离的样品卷成平面形状，然后进行筛分，然后通过其强度一个接一个地增加的多个旋转磁场，由此样品根据其电导率有效分离，从而回收。

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