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    • 2. 发明授权
    • Packaging die preparation
    • 包装模具制备
    • US06399464B1
    • 2002-06-04
    • US09723708
    • 2000-11-28
    • Tom A. MuntiferingSteven W. HepplerMichael B. Ball
    • Tom A. MuntiferingSteven W. HepplerMichael B. Ball
    • H01L2131
    • H01L21/6835H01L21/304H01L21/3043H01L21/6836H01L2221/68327H01L2221/6834
    • The present invention relates to a process for preparing a wafer for chip packaging that minimizes stress and torque on wafer components during back grinding. The wafer has fabricated thereon a plurality of dies in a die side thereof opposite a back side thereof. A protective coating is spun on the die side to protect the dies. The wafer is separated into a plurality of connected pieces by scratching or cutting a recess into streets or scribe lines in the die side. The connected pieces of the wafer are secured to a surface with the back side thereof exposed. Material is removed from the back side of the wafer by chemical, mechanical, or chemical-mechanical methods until each piece is separated or disconnected from the other pieces. The protective coating is removed. The pieces can be situated upon a flexible surface that is stretched to increase the separation between pieces. Each die in the die side of each piece is then packaged into a die package.
    • 本发明涉及一种制备用于芯片封装的晶片的方法,其使背面研磨期间的晶片组件上的应力和扭矩最小化。 晶片已在其上制造多个模具,模具侧面与其后侧相对。 在模具侧上旋转保护涂层以保护模具。 通过将凹槽划伤或切割成模具侧的街道或划线,将晶片分离成多个连接件。 晶片的连接片固定在其背面露出的表面上。 通过化学,机械或化学机械方法从晶片的背面去除材料,直到每个片断与其他片断分离或断开。 去除保护涂层。 这些件可以位于被拉伸的柔性表面上以增加件之间的间隔。 然后将每个模具侧的每个模具封装成模具包装。