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    • 1. 发明申请
    • Substantially dry, silica-containing soot, fused silica and optical fiber soot preforms, apparatus, methods and burners for manufacturing same
    • 基本干燥的含二氧化硅的烟灰,熔融石英和光纤烟炱预制件,用于制造相同材料的装置,方法和燃烧器
    • US20050120752A1
    • 2005-06-09
    • US11033001
    • 2005-01-10
    • John BrownLisa ChaconSteven DawesV. SrikantPushkar TandonJoseph Whalen
    • John BrownLisa ChaconSteven DawesV. SrikantPushkar TandonJoseph Whalen
    • C03B19/14C03B37/012C03B37/014C03B37/018
    • C03C3/06C03B19/1407C03B19/1415C03B19/1423C03B19/1453C03B37/01202C03B37/01406C03B37/01413C03B37/0142C03B37/0146C03B2201/12C03B2203/22C03B2207/02C03B2207/06C03B2207/08C03B2207/14C03B2207/20C03B2207/30C03B2207/42C03B2207/70C03B2207/81
    • Methods, apparatus and precursors for producing substantially water-free silica soot, preforms and glass. The methods and apparatus make substantially water-free fused silica preforms or glass by removing water as a reaction product, removing water from the atmosphere, removing water from the transport process, or combinations thereof. In a first embodiment, substantially water-free soot, preforms or glass are achieved by using a hydrogen-free fuel, such as carbon monoxide, in the deposition process. In another embodiment, a soot producing burner has parameters that enable operation on a substantially hydrogen-free fuel. End burners, which minimize water production, are also described. Such water-free methods are useful in depositing fluorine-doped soot because of the low water present and the efficiency in which fluorine is incorporated. In another embodiment, glassy barrier layer methods and apparatus are described for minimizing dopant migration, especially fluorine. Laser and induction methods and apparatus for forming the barrier layer are depicted. A chlorine, fluorine and silica precursor, such as chlorofluorosilane, may be utilized to form fluorinated soot. Other methods and apparatus are directed to combinations of conventional and substantially water-free processes. One embodiment is directed to combustion enhancing additives for addition to the substantially hydrogen-free fuels. The methods and apparatus in accordance with the invention are particularly useful for producing photomask substrates and optical fiber preforms.
    • 用于生产基本上无水的二氧化硅烟灰,预成型件和玻璃的方法,装置和前体。 该方法和装置通过除去水作为反应产物,从大气中除去水分,从运输过程中除去水或其组合,从而使基本上无水的熔融二氧化硅预制件或玻璃。 在第一实施方案中,在沉积工艺中通过使用无氢燃料如一氧化碳来实现基本上无水的烟灰,预型体或玻璃。 在另一个实施方案中,产生烟灰的燃烧器具有能够在基本上无氢燃料上操作的参数。 还描述了最小化水的生产的终端燃烧器。 这种无水方法由于存在低的水和掺入氟的效率而用于沉积氟掺杂烟灰。 在另一个实施例中,描述了用于最小化掺杂剂迁移,特别是氟的玻璃状阻挡层方法和装置。 描述了用于形成阻挡层的激光和感应方法和装置。 可以使用氯,氟和二氧化硅前体,例如氯氟硅烷来形成氟化烟灰。 其它方法和装置涉及常规和基本无水方法的组合。 一个实施方案涉及用于加入基本上无氢燃料的燃烧增强添加剂。 根据本发明的方法和装置特别适用于制造光掩模基片和光纤预制棒。