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    • 1. 发明授权
    • Integral slot shield for infrared focal plane arrays
    • 用于红外焦平面阵列的积分插槽屏蔽
    • US5834775A
    • 1998-11-10
    • US768254
    • 1996-12-17
    • Mark R. SkokanJohn C. EhmkeCharles A. FrandaStephen L. Whicker
    • Mark R. SkokanJohn C. EhmkeCharles A. FrandaStephen L. Whicker
    • G01J5/08H01L27/14G01J5/10
    • G01J5/02G01J5/022G01J5/024G01J5/08G01J5/0853G01J5/046
    • A method of fabricating a focal plane array and the array having a integral slot shield which comprises fabricating a focal plane array having a plurality of detector elements. A layer of electrically insulating material having a planar top surface is then formed over the array. A reflective layer is then formed over the layer of electrically insulating material and the electrically insulating layer and reflective layer are etched only in the regions thereof over the detector elements to form slots over the detector elements. An absorbing layer is formed over the reflective layer. The absorbing layer is preferably an infrared-transparent dielectric having an optical thickness of about one quarter wavelength of the light frequency of interest with a metallic flash layer thereover having a thickness of from about 50 to about 60 Angstroms. The infrared dielectric is preferably one of zinc sulfide, zinc selenide, polyethylene and paraxylilene.
    • 一种制造焦平面阵列的方法,该阵列具有整体槽屏蔽,其包括制造具有多个检测器元件的焦平面阵列。 然后在阵列上形成具有平坦顶表面的电绝缘材料层。 然后在电绝缘材料层上形成反射层,并且电绝缘层和反射层仅在其检测器元件的区域中被蚀刻,以在检测器元件上方形成槽。 在反射层上形成吸收层。 吸收层优选为红外透明电介质,其光学厚度为感兴趣的光频的约四分之一波长,金属闪光层的厚度为约50至约60埃。 红外线电介质优选为硫化锌,硒化锌,聚乙烯和对二甲苯之一。
    • 2. 发明授权
    • Modular, magnetically-coupled drive for a cryogenic refrigerator
    • 用于低温冰箱的模块化,磁耦合驱动
    • US4044567A
    • 1977-08-30
    • US609850
    • 1975-09-02
    • Robert M. DixSamuel F. TobiasStephen L. Whicker
    • Robert M. DixSamuel F. TobiasStephen L. Whicker
    • F02G1/044F25B9/00
    • F02G1/0445F02G2250/18
    • An improved Vuilleumier cycle refrigerator is disclosed. To reduce fluid contamination and inactive refrigerant volume, the hot and cold fluid displacers of the refrigerator are driven by a magnetic drive mechanism. The magnetic drive mechanism has a first and second assembly. The first assembly is contained in the fluid chamber together with the hot and cold displacers; the second assembly including the drive motor is mounted exteriorly of the fluid chamber. The first and second assemblies of the drive mechanism include adjacent magnets separated by the wall of the fluid chamber. Thus, the first and second assemblies are coupled together by their magnetic field for rotation to drive the hot and cold displacers and the fluid chamber provides an hermetic seal to contain the working fluid thereby removing the motor with its air space and contaminants from the fluid chamber.
    • 公开了一种改进的Vuilleumier循环冰箱。 为了减少流体污染和不活泼的制冷剂体积,冰箱的热和冷流体置换器由磁驱动机构驱动。 磁驱动机构具有第一和第二组件。 第一组件与冷热置换器一起容纳在流体室中; 包括驱动马达的第二组件安装在流体室的外部。 驱动机构的第一和第二组件包括由流体室的壁分隔开的相邻磁体。 因此,第一组件和第二组件通过它们的磁场耦合在一起以便旋转以驱动热和冷移位器,并且流体室提供气密密封以容纳工作流体,从而从其流动室中除去电动机的空气空间和污染物 。
    • 3. 发明授权
    • System and method for making a conductive polymer coating
    • 制造导电聚合物涂层的系统和方法
    • US6083557A
    • 2000-07-04
    • US958918
    • 1997-10-28
    • James F. BelcherStephen L. Whicker
    • James F. BelcherStephen L. Whicker
    • C23C14/06G01J5/20G01J5/34H01L27/146C23C16/00
    • C23C14/06G01J5/20G01J5/34H01L27/1465
    • This is a system and method of forming a conductive polymer optical coating on an infrared detection system. The apparatus may include an upper vacuum chamber, a shutter assembly mounted inside the upper vacuum chamber, a substrate holder disposed inside the shutter assembly, wherein the shutter assembly is capable of shielding or exposing the substrate to the upper vacuum chamber, an orifice connected to the upper vacuum chamber for control of a flow rate for the upper vacuum chamber, a first mechanical pump system connected to the orifice, a lower vacuum chamber connected to the upper vacuum chamber on a side opposite the shutter assembly, an electron beam assembly for providing a low-melting-point electrical conductor vapor, disposed inside the lower vacuum chamber, wherein the electron beam assembly is directed toward the shutter assembly in the upper vacuum chamber, a second mechanical pump system and a cryopump connected to the lower vacuum chamber, a polymer generation chamber for providing polymer vapor, connected to the upper vacuum chamber on a side perpendicular to the shutter assembly, a vaporizer surrounding a first portion of the polymer generation chamber, a pyrolysis furnace surrounding a second portion of the polymer generation chamber, and a post pyrolysis heater surrounding a third portion of the polymer generation chamber.
    • 这是在红外检测系统上形成导电聚合物光学涂层的系统和方法。 该设备可以包括上真空室,安装在上真空室内部的活门组件,设置在活门组件内部的衬底保持器,其中活门组件能够将衬底屏蔽或暴露于上真空室, 用于控制上真空室的流量的上真空室,连接到孔的第一机械泵系统,在与快门组件相对的一侧连接到上真空室的下真空室,用于提供 设置在下部真空室内的低熔点电导体蒸汽,其中电子束组件指向上部真空室中的活门组件,第二机械泵系统和连接到下部真空室的低温泵, 用于提供聚合物蒸气的聚合物产生室,在垂直于活门的一侧连接到上真空室 包括围绕聚合物产生室的第一部分的蒸发器,围绕聚合物产生室的第二部分的热解炉和围绕聚合物产生室的第三部分的后裂解加热器。
    • 4. 发明授权
    • Infrared-sensitive conductive-polymer coating
    • 红外敏感导电聚合物涂层
    • US6080987A
    • 2000-06-27
    • US958955
    • 1997-10-28
    • James F. BelcherStephen L. Whicker
    • James F. BelcherStephen L. Whicker
    • G01J5/08H01L27/146
    • G01J5/02G01J5/022G01J5/024G01J5/08G01J5/0853H01L27/1462H01L27/1465H01L27/1469G01J5/046
    • This is a novel conductive-polymer optical coating for infrared detection and method of making the same. The system may comprise an integrated circuit substrate itself comprising a plurality of mesas and comprising via connections on an upper portion of each of the mesas. The system further comprises a plurality of backside electrical contacts bonded to the via connections, a plurality of infrared-sensitive pixels overlying the electrical contacts, and a conductive-polymer optical coating overlying and electrically connecting the pixels. A method of forming an embodiment of the present invention may comprise forming a conductive-polymer optical coating over a substrate, forming a contact metal on a backside of the substrate, and processing the contact metal, the substrate and the common electrode to form capacitor pixels of the contact metal, the substrate and the corresponding portion of the optical coating.
    • 这是用于红外检测的新型导电聚合物光学涂层及其制造方法。 该系统可以包括集成电路基板本身,其包括多个台面并且包括每个台面的上部上的通孔连接。 该系统还包括多个粘合到通孔连接的背面电触点,覆盖电触点的多个红外敏感像素和覆盖并电连接像素的导电聚合物光学涂层。 形成本发明的实施例的方法可以包括在衬底上形成导电聚合物光学涂层,在衬底的背面形成接触金属,以及处理接触金属,衬底和公共电极以形成电容器像素 的接触金属,基底和光学涂层的相应部分。