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1. 发明申请

US20140321026A1 LAYER SYSTEM HAVING A LAYER OF CARBON NANOTUBES ARRANGED PARALLEL TO ONE ANOTHER AND AN ELECTRICALLY CONDUCTIVE SURFACE LAYER, METHOD FOR PRODUCING THE LAYER SYSTEM, AND USE OF THE LAYER SYSTEM IN MICROSYSTEM TECHNOLOGY 审中-公开
标题翻译：具有碳纳米管层的层系统平行于另一个和电导电表面层，用于生产层系统的方法以及在微结构技术中使用层系统
公开(公告)号：US20140321026A1
公开(公告)日：2014-10-30
申请号：US14131318
申请日：2012-07-06
申请人： Sascha Hermann , Thomas Gessner , Stefan E. Schulz
发明人： Sascha Hermann , Thomas Gessner , Stefan E. Schulz
IPC分类号： C01B31/02 , H01G2/08 , H01G11/36
CPC分类号： H01G11/36 , B82Y30/00 , B82Y40/00 , C01B32/16 , C01B32/162 , C01B2202/08 , H01G2/08 , Y10T428/25
摘要： The present invention relates to a coating system comprising a layer of carbon nanotubes aligned parallel to another, and a directly linked surface layer with metallic properties, from which said carbon nanotubes are grown in “tip” growth. The coating system may further comprise a base layer and/or a substrate. It can be obtained by producing a structured layer from a first phase, consisting of a metal having no independent catalytic activity in terms of the emergence of CNTs from the gas phase, and a second phase consisting of a metal, which catalyzes the emergence of CNTs from the gas phase, on a substrate or a base layer, wherein the first phase has an uneven thickness and/or folded structure potentially interspersed with pores, and the second phase is located in depressions and/or pores of the initial phase in such a way that both material phases are present at least partially next to each other in the lateral plane on said substrate or said base layer located thereon. Carbon is removed from a hydrocarbon gas atmosphere on this structured layer, wherein carbon nanotubes form, which raise at least parts of the structured layer in closed form. The substrate or base layer may then be removed. The coating system of the invention is suitable for use in a variety of components and electronic micro and nanosystems, flip chip connections, sensors and actuators, particularly pressure sensors, touch sensors, optical sensors, reflectors, projectors, optical filters, nanopositioning systems or interferometers in a specific form in a supercapacitor.
摘要翻译：本发明涉及一种涂层系统，其包括平行于另一层的碳纳米管层，以及具有金属性质的直接连接的表面层，所述碳纳米管从该尖端生长形成。涂层系统还可以包括基层和/或基底。可以通过从第一相制备结构化层，由从气相中的CNT的出现而不具有独立催化活性的金属组成的第二相和由金属组成的第二相，其催化CNT的出现在气相中，在基底或基底层上，其中第一相具有潜在地散布有孔的不均匀厚度和/或折叠结构，并且第二相位于初始相的凹陷和/或孔中两种材料相在至少部分地彼此相邻的方式存在于位于其上的所述基底或所述基底层上的横向平面中。在该结构化层上从碳氢化合物气体气氛中除去碳，其中碳纳米管形成，其以封闭形式升高至少部分结构化层。然后可以去除衬底或基层。本发明的涂层系统适用于各种部件，电子微和纳米系统，倒装芯片连接，传感器和致动器，特别是压力传感器，触摸传感器，光学传感器，反射器，投影仪，光学滤波器，纳米定位系统或干涉仪在超级电容器中以特定形式。

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