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1. 发明授权

US07901976B1 Method of forming borderless contacts 有权
标题翻译：形成无边界接触的方法
公开(公告)号：US07901976B1
公开(公告)日：2011-03-08
申请号：US11803474
申请日：2007-05-15
申请人： Sriram Viswanathan , Vinay Krishna , Peter Keswick , Daniel Amzen
发明人： Sriram Viswanathan , Vinay Krishna , Peter Keswick , Daniel Amzen
IPC分类号： H01L21/00
CPC分类号： H01L21/76834 , H01L21/76897
摘要： A method is provided for forming a borderless contact to a local interconnect (LI) line on a substrate. Generally, the method includes steps of (i) depositing a nitride layer over a number of LI lines on the substrate, to substantially cover the LI lines; (ii) etching the nitride layer to form spacers adjacent to sidewalls of at least one of the number of LI lines and to expose at least a portion of a top surface of the LI line; (iii) depositing an inter-layer dielectric, such as an oxide, over the number of LI lines on the substrate and the spacers formed adjacent thereto; and (iv) performing a contact etch to etch contact openings through the inter-layer dielectric to expose the portion of the top surface of the underlying LI line. Other embodiments are also disclosed.
摘要翻译：提供了一种用于形成与衬底上的局部互连（LI）线的无边界接触的方法。通常，该方法包括以下步骤：（i）在衬底上的多条LI线上沉积氮化物层，以基本覆盖LI线; （ii）蚀刻所述氮化物层以形成与所述多条L1线中的至少一个的侧壁相邻的间隔物，并且暴露所述LI线的顶表面的至少一部分; （iii）在衬底上的L1线的数量和与其相邻形成的间隔物上沉积诸如氧化物的层间电介质; 和（iv）进行接触蚀刻以蚀刻通过层间电介质的接触开口以暴露下面的LI线的顶表面的部分。还公开了其他实施例。

2. 发明申请

US20060037063A1 System and method for controlling network access 有权
公开(公告)号：US20060037063A1
公开(公告)日：2006-02-16
申请号：US10915330
申请日：2004-08-11
申请人： Merlon Clemmons , Subrata Mazumdar , Robert Seibel , TK Srinivas , Sriram Viswanathan
发明人： Merlon Clemmons , Subrata Mazumdar , Robert Seibel , TK Srinivas , Sriram Viswanathan
IPC分类号： H04L9/32 , G06K9/00 , G06F17/30 , G06F15/16 , G06F7/04 , G06F7/58 , G06K19/00 , H04L9/00 , G06F17/00 , H04K1/00 , G06F9/00
CPC分类号： H04L63/08 , H04L63/10
摘要： A system for controlling network access to products. The system includes a security appliance connected to a product under operational control of a first entity, a product connection platform and a user terminal under operational control of a second entity, the product connection platform being accessed by the user terminal, and a trust relationship established between the first entity and the second entity based on predetermined criteria between the first entity and the second entity, the trust relationship being represented by a certificate or public/private key exchange. Authentication of access by a user of the user terminal of the second entity to the product of the first entity is deferred to the product connection platform of the second entity based on the predetermined criteria of the trust relationship, whereupon if authentication is granted, the user is provided access to the product.

3. 发明授权

US08399360B1 Process for post contact-etch clean 有权
标题翻译：后接触蚀刻清洁工艺
公开(公告)号：US08399360B1
公开(公告)日：2013-03-19
申请号：US11599926
申请日：2006-11-14
申请人： Sheri Miller , Vinay Krishna , Sriram Viswanathan
发明人： Sheri Miller , Vinay Krishna , Sriram Viswanathan
IPC分类号： H01L21/302 , H01L21/4763
CPC分类号： H01L21/02063 , H01L21/31138 , H01L21/76814
摘要： A method is provided for cleaning a semiconductor topography having one or more contact openings etched through a dielectric layer formed on a substrate. The method substantially eliminates unfilled contacts and reduces contact defects. Generally, the method involves: (i) heating the substrate in a processing chamber to a predetermined temperature; (ii) generating a plasma upstream of the process chamber using a microwave generator and a process gas comprising nitrogen and hydrogen or argon and helium; and (iii) introducing the plasma into the process chamber to clean the semiconductor topography. As the clean is accomplished substantially without the use of an organic solvent, galvanic corrosion of contacts subsequently formed in the contact openings is substantially eliminated. Other embodiments are also described.
摘要翻译：提供了一种用于清洁具有通过形成在基底上的介电层蚀刻的一个或多个接触开口的半导体形貌的方法。该方法基本上消除了未填充的接触并减少接触缺陷。通常，该方法包括：（i）将处理室中的衬底加热至预定温度; （ii）使用微波发生器和包括氮气和氢气或氩气和氦气的工艺气体在工艺室上游产生等离子体; 和（iii）将等离子体引入处理室以清洁半导体形貌。由于在不使用有机溶剂的情况下基本上实现清洁，基本上消除了在接触开口中随后形成的触点的电偶腐蚀。还描述了其它实施例。

4. 发明授权

US07842637B2 Electroactivated film with polymer gel electrolyte 有权
标题翻译：具有聚合物凝胶电解质的电活化膜
公开(公告)号：US07842637B2
公开(公告)日：2010-11-30
申请号：US12215348
申请日：2008-06-26
申请人： Von Howard M. Ebron , Yevgenia V. Ulyanova , Shifeng Hou , Sriram Viswanathan , Patrick J. Kinlen
发明人： Von Howard M. Ebron , Yevgenia V. Ulyanova , Shifeng Hou , Sriram Viswanathan , Patrick J. Kinlen
IPC分类号： C08F4/02 , A61L2/08 , C12M1/00
CPC分类号： C25B9/10 , A61L2/03 , A61L2/18 , A61L2/232 , C25B1/30
摘要： An electroactivated film and methods for its production are described, where the film includes a first electrode that is spaced apart from a second electrode, a water insoluble electrically conductive medium which is permeable to moisture and oxygen, which comprises a water insoluble polymer gel containing an ionic liquid, and which contacts both electrodes, an electrocatalyst which can be reversibly oxidized and reduced and which facilitates the production of a peroxide when an electrical potential is imposed across the electrodes, and optionally a peroxide-activating catalyst which converts the peroxide to an activated peroxide.
摘要翻译：描述了一种电活化膜及其生产方法，其中膜包括与第二电极间隔开的第一电极，水分和氧气可渗透的水不溶性导电介质，其包含水不溶性聚合物凝胶，其含有离子液体，并且其接触两个电极，可以被可逆地氧化和还原的电催化剂，并且当跨越电极施加电势时促进过氧化物的产生，以及任选的过氧化物活化催化剂，其将过氧化物转化为活化的过氧化物。

5. 发明授权

US07435476B2 Functionalized nanotube material for supercapacitor electrodes 有权
标题翻译：用于超级电容器电极的功能化纳米管材料
公开(公告)号：US07435476B2
公开(公告)日：2008-10-14
申请号：US11248299
申请日：2005-10-13
申请人： Sriram Viswanathan , Toshio Tokune
发明人： Sriram Viswanathan , Toshio Tokune
IPC分类号： B32B9/00
CPC分类号： H01G9/058 , H01G9/155 , H01G11/34 , H01G11/36 , Y02E60/13 , Y10T428/2918 , Y10T428/2975 , Y10T428/30
摘要： The present teachings are directed toward compositions of supercapacitor electrode materials containing a functionalized carbon nanotube-containing material substantially free of binder material and methods for preparing the functionalized carbon nanotube-containing material.
摘要翻译：本教导涉及含有基本上不含粘合剂材料的官能化含碳纳米管的材料的超级电容器电极材料的组合物和用于制备官能化含碳纳米管的材料的方法。

6. 发明申请

US20080013258A1 Functionalized nanotube material for supercapacitor electrodes 有权
公开(公告)号：US20080013258A1
公开(公告)日：2008-01-17
申请号：US11248299
申请日：2005-10-13
申请人： Sriram Viswanathan , Toshio Tokune
发明人： Sriram Viswanathan , Toshio Tokune
IPC分类号： H01G9/042
CPC分类号： H01G9/058 , H01G9/155 , H01G11/34 , H01G11/36 , Y02E60/13 , Y10T428/2918 , Y10T428/2975 , Y10T428/30
摘要： The present teachings are directed toward compositions of supercapacitor electrode materials containing a functionalized carbon nanotube-containing material substantially free of binder material and methods for preparing the functionalized carbon nanotube-containing material.

7. 发明授权

US07959773B2 Electroactivated film with electrocatalyst-enhanced carbon electrode 失效
标题翻译：具有电催化剂增强碳电极的电活化膜
公开(公告)号：US07959773B2
公开(公告)日：2011-06-14
申请号：US12215359
申请日：2008-06-26
申请人： Shifeng Hou , Von Howard M. Ebron , Yevgenia V. Ulyanova , Sriram Viswanathan , Patrick J. Kinlen
发明人： Shifeng Hou , Von Howard M. Ebron , Yevgenia V. Ulyanova , Sriram Viswanathan , Patrick J. Kinlen
IPC分类号： C25B9/08
CPC分类号： C25B9/10 , A61L2/03 , A61L2/18 , A61L2/232 , C25B1/30
摘要： An electroactivated film that includes: a first electrode that is spaced apart from a second electrode, a water insoluble electrically conductive medium which is permeable to moisture and oxygen and which contacts both electrodes, an electrocatalyst which can be reversibly oxidized and reduced and which facilitates the production of a peroxide when an electrical potential is imposed across the electrodes, and optionally a peroxide-activating catalyst which converts the peroxide to an activated peroxide, wherein one or both electrodes have electrocatalyst immobilized thereupon.
摘要翻译：一种电活化膜，其包括：与第二电极间隔开的第一电极，可渗透水分和氧气并且与两个电极接触的水不溶性导电介质，可以被可逆地氧化和还原的电催化剂，并且有助于当跨越电极施加电势时产生过氧化物，以及任选地将过氧化物转化为活化的过氧化物的过氧化物活化催化剂，其中一个或两个电极具有固定的电催化剂。

8. 发明申请

US20090291843A1 Electroactivated film with polymer gel electrolyte 有权
标题翻译：具有聚合物凝胶电解质的电活化膜
公开(公告)号：US20090291843A1
公开(公告)日：2009-11-26
申请号：US12215348
申请日：2008-06-26
申请人： Von Howard Ebron , Yevgenia V. Ulyanova , Shifeng Hou , Sriram Viswanathan , Patrick J. Kinlen
发明人： Von Howard Ebron , Yevgenia V. Ulyanova , Shifeng Hou , Sriram Viswanathan , Patrick J. Kinlen
IPC分类号： B01J31/02
CPC分类号： C25B9/10 , A61L2/03 , A61L2/18 , A61L2/232 , C25B1/30
摘要： An electroactivated film and methods for its production are described, where the film includes a first electrode that is spaced apart from a second electrode, a water insoluble electrically conductive medium which is permeable to moisture and oxygen, which comprises a water insoluble polymer gel containing an ionic liquid, and which contacts both electrodes, an electrocatalyst which can be reversibly oxidized and reduced and which facilitates the production of a peroxide when an electrical potential is imposed across the electrodes, and optionally a peroxide-activating catalyst which converts the peroxide to an activated peroxide.
摘要翻译：描述了一种电活化膜及其生产方法，其中膜包括与第二电极间隔开的第一电极，水分和氧气可渗透的水不溶性导电介质，其包含含有离子液体，并且其接触两个电极，可以被可逆地氧化和还原的电催化剂，并且当跨越电极施加电势时促进过氧化物的产生，以及任选的过氧化物活化催化剂，其将过氧化物转化为活化的过氧化物。

9. 发明申请

US20090168301A1 Functionalized Nanotube Material for Supercapacitor Electrodes 审中-公开
标题翻译：用于超级电容器电极的功能化纳米管材料
公开(公告)号：US20090168301A1
公开(公告)日：2009-07-02
申请号：US12239905
申请日：2008-09-29
申请人： Sriram VISWANATHAN , Toshio Tokune
发明人： Sriram VISWANATHAN , Toshio Tokune
IPC分类号： H01G9/155 , H01G9/00
CPC分类号： H01G9/058 , H01G9/155 , H01G11/34 , H01G11/36 , Y02E60/13 , Y10T428/2918 , Y10T428/2975 , Y10T428/30
摘要： The present teachings are directed towards supercapacitors including an electrode composed of a functionalized carbon nanotube-containing material, and also an organic electrolyte solution. The organic electrolyte solution can contain a non-aqueous solvent and an ionic salt, examples of non-aqueous solvent include propylene carbonate, ethylene carbonate, sulfolane and acetonitrile. The functional groups present on the carbon nanotubes can include hydroxyl groups, carboxyl groups, alkoxyl groups and mixtures thereof.
摘要翻译：本教导涉及包括由官能化的含碳纳米管的材料构成的电极和有机电解质溶液的超级电容器。有机电解质溶液可以含有非水溶剂和离子盐，非水溶剂的实例包括碳酸亚丙酯，碳酸亚乙酯，环丁砜和乙腈。存在于碳纳米管上的官能团可以包括羟基，羧基，烷氧基及其混合物。

10. 发明申请

US20100208413A1 INTRINSICALLY CONDUCTIVE POLYMERS 审中-公开
标题翻译：本征导电聚合物
公开(公告)号：US20100208413A1
公开(公告)日：2010-08-19
申请号：US12630924
申请日：2009-12-04
申请人： Patrick J. Kinlen , June-Ho Jung , Sriram Viswanathan , Joseph Mbugua , Young-Gi Kim
发明人： Patrick J. Kinlen , June-Ho Jung , Sriram Viswanathan , Joseph Mbugua , Young-Gi Kim
IPC分类号： H01G9/058 , B05D5/12 , B08B5/00
CPC分类号： H01G9/155 , Y02E60/13
摘要： A method of doping an intrinsically conductive polymer film is provided. The method includes contacting the film with a first acid dopant to form a primary doped intrinsically conductive polymer film; cleaning the primary doped intrinsically conductive polymer film by contacting the primary doped intrinsically conductive polymer film with a vapor; dipping the vapor-cleaned primary doped intrinsically conductive polymer film into a solution including at least a second acid dopant and an organic solvent to form a secondary doped intrinsically conductive polymer film; and annealing the secondary doped intrinsically conductive polymer film to produce a tertiary doped intrinsically conductive polymer film.
摘要翻译：提供掺杂本征导电聚合物膜的方法。该方法包括使膜与第一酸性掺杂剂接触以形成主要掺杂的本征导电聚合物膜; 通过使主掺杂的本征导电聚合物膜与蒸气接触来清洁主掺杂的本征导电聚合物膜; 将蒸气清洗的主要掺杂的本征导电聚合物膜浸入包含至少第二种酸性掺杂剂和有机溶剂的溶液中以形成二次掺杂的本征导电聚合物膜; 并对二次掺杂的本征导电聚合物膜进行退火以产生三次掺杂的本征导电聚合物膜。

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