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1. 发明授权

US07565723B2 Piezoelectric actuator and method of fabricating piezoelectric actuator 有权
标题翻译：压电致动器及其制造方法
公开(公告)号：US07565723B2
公开(公告)日：2009-07-28
申请号：US11083953
申请日：2005-03-21
申请人： Hiroto Sugahara , Kazuo Kobayashi , Motohiro Yasui , Jun Akedo , Sou Baba
发明人： Hiroto Sugahara , Kazuo Kobayashi , Motohiro Yasui , Jun Akedo , Sou Baba
IPC分类号： H01L41/22
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1626 , B41J2/1631 , B41J2/1642 , B41J2/1643 , B41J2/1645 , B41J2/1646 , H01L41/0805 , H01L41/314 , H01L41/319 , Y10T29/42 , Y10T29/49005 , Y10T29/49007 , Y10T29/49128 , Y10T29/4913 , Y10T29/49401
摘要： A piezoelectric material layer is easily formed on a partial region of the substrate surface. By forming a different hardness material layer that has a different hardness from that of the substrate in the form of a pattern on the surface of the substrate, a film-deposition permitting region A to which particles of a piezoelectric material in a carrier gas adhere in a form of a film and a film-deposition inhibiting region B which inhibits the formation of a film are provided. Further, when a carrier gas containing particles of a piezoelectric material are ejected onto the surface of the substrate by means of AD, a film-like piezoelectric material layer is formed as a result of the adhesion of the particles in the film-deposition permitting region A. As a result, the piezoelectric material layer can be formed easily in a partial region of the surface of the substrate.
摘要翻译：在基板表面的部分区域上容易形成压电材料层。通过在基板的表面上形成与图案形式的基板的硬度不同的不同的硬度材料层，载体气体中的压电材料的粒子粘附在其上的成膜允许区域A 提供了抑制膜形成的膜形式和膜沉积抑制区域B. 此外，当通过AD将含有压电材料的颗粒的载气喷射到基板的表面上时，由于颗粒在成膜允许区域中的粘附而形成膜状的压电材料层因此，可以在基板的表面的部分区域容易地形成压电体层。

2. 发明申请

US20050231073A1 Piezoelectric actuator, inkjet head and fabrication methods thereof 有权
标题翻译：压电致动器，喷墨头及其制造方法
公开(公告)号：US20050231073A1
公开(公告)日：2005-10-20
申请号：US11083953
申请日：2005-03-21
申请人： Hiroto Sugahara , Kazuo Kobayashi , Motohiro Yasui , Jun Akedo , Sou Baba
发明人： Hiroto Sugahara , Kazuo Kobayashi , Motohiro Yasui , Jun Akedo , Sou Baba
IPC分类号： B41J2/14 , B41J2/16 , H01L41/08 , H01L41/22
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1626 , B41J2/1631 , B41J2/1642 , B41J2/1643 , B41J2/1645 , B41J2/1646 , H01L41/0805 , H01L41/314 , H01L41/319 , Y10T29/42 , Y10T29/49005 , Y10T29/49007 , Y10T29/49128 , Y10T29/4913 , Y10T29/49401
摘要： A piezoelectric material layer is easily formed on a partial region of the substrate surface. By forming a different hardness material layer that has a different hardness from that of the substrate in the form of a pattern on the surface of the substrate, a film-deposition permitting region A to which particles of a piezoelectric material in a carrier gas adhere in a form of a film and a film-deposition inhibiting region B which inhibits the formation of a film are provided. Further, when a carrier gas containing particles of a piezoelectric material are ejected onto the surface of the substrate by means of AD, a film-like piezoelectric material layer is formed as a result of the adhesion of the particles in the film-deposition permitting region A. As a result, the piezoelectric material layer can be formed easily in a partial region of the surface of the substrate.
摘要翻译：在基板表面的部分区域上容易形成压电材料层。通过在基板的表面上形成与图案形式的基板的硬度不同的不同的硬度材料层，载体气体中的压电材料的颗粒粘附在其上的成膜允许区域A 提供了抑制膜形成的膜形式和膜沉积抑制区域B. 此外，当通过AD将含有压电材料的颗粒的载气喷射到基板的表面上时，由于颗粒在成膜允许区域中的粘附而形成膜状的压电材料层因此，可以在基板的表面的部分区域容易地形成压电体层。

3. 发明授权

US07955647B2 Method for manufacturing film or piezoelectric film 有权
标题翻译：薄膜或压电薄膜的制造方法
公开(公告)号：US07955647B2
公开(公告)日：2011-06-07
申请号：US11090173
申请日：2005-03-28
申请人： Motohiro Yasui , Jun Akedo , Sou Baba
发明人： Motohiro Yasui , Jun Akedo , Sou Baba
IPC分类号： C23C16/00 , B05D5/12
CPC分类号： H01L41/314 , C23C24/04 , H01L41/1876
摘要： A simple method is provided for manufacturing a film such as a piezoelectric film wherein the adhesiveness of the film on a substrate can be improved. An aerosol containing particles is ejected onto a substrate so that the particles adhere thereto, wherein the ratio between the Vickers hardness Hv(b) of the adhesion surface to which the particles are attached in the substrate, and the Vickers hardness Hv(p) of the particles is within a range of 0.39≦Hv(p)/Hv(b)≦3.08. The adhesiveness between the particles and the substrate can thereby be improved to reliably form a film. The present invention can be satisfactorily applied to the formation of a piezoelectric film.
摘要翻译：提供了一种用于制造诸如压电膜的膜的简单方法，其中可以提高基板上的膜的粘附性。将含有颗粒的气溶胶喷射到基板上，使得颗粒粘附到其上，其中颗粒附着在基材中的粘合表面的维氏硬度Hv（b）与维氏硬度Hv（p）之间的比例颗粒在0.39和n1E的范围内; Hv（p）/ Hv（b）＆nlE; 3.08。从而能够提高粒子与基材的粘合性，可靠地形成膜。本发明可以令人满意地应用于压电膜的形成。

4. 发明申请

US20070144573A1 Thermoelectric conversion element and thermoelectric conversion module 失效
标题翻译：热电转换元件和热电转换模块
公开(公告)号：US20070144573A1
公开(公告)日：2007-06-28
申请号：US10593644
申请日：2005-03-22
申请人： Toshiyuki Mihara , Ryoji Funahashi , Jun Akedo , Sou Baba , Masashi Mikami
发明人： Toshiyuki Mihara , Ryoji Funahashi , Jun Akedo , Sou Baba , Masashi Mikami
IPC分类号： H01L35/30 , H01L35/12
CPC分类号： C04B35/01 , C03C17/23 , C03C2217/23 , C04B35/453 , C04B35/62218 , C04B2235/3201 , C04B2235/3203 , C04B2235/3208 , C04B2235/3213 , C04B2235/3215 , C04B2235/3217 , C04B2235/3224 , C04B2235/3225 , C04B2235/3227 , C04B2235/3229 , C04B2235/3232 , C04B2235/3239 , C04B2235/3241 , C04B2235/3251 , C04B2235/3256 , C04B2235/3258 , C04B2235/3262 , C04B2235/3272 , C04B2235/3275 , C04B2235/3277 , C04B2235/3279 , C04B2235/3281 , C04B2235/3284 , C04B2235/3286 , C04B2235/3291 , C04B2235/3296 , C04B2235/3298 , C04B2235/443 , C04B2235/6586 , C04B2235/762 , C04B2235/765 , C04B2235/768 , C04B2235/96 , C04B2235/9607 , C23C14/08 , C23C14/3414 , H01L35/22 , H01L35/32
摘要： The present invention provides a thermoelectric element in which a thin film of p-type thermoelectric material and a thin film of n-type thermoelectric material, which are formed on an electrically insulating substrate, are electrically connected, in which the p-type thermoelectric material and the n-type thermoelectric material are selected from specific complex oxides with a positive Seebeck coefficient and specific complex oxides with a negative Seebeck coefficient, respectively. The present invention also provides a thermoelectric module using the thermoelectric element(s) and a thermoelectric conversion method. In the thermoelectric element of the present invention, since a p-type thermoelectric material and an n-type thermoelectric material are formed into a thin film on an electrically insulating substrate, the thermoelectric element of the invention can be formed on substrates having various shapes, thereby providing thermoelectric elements having various shapes.
摘要翻译：本发明提供一种热电元件，其中形成在电绝缘基板上的p型热电材料薄膜和n型热电材料薄膜电连接，其中p型热电材料 n型热电材料选自具有正塞贝克系数的特定复合氧化物和分别具有负的塞贝克系数的特定复合氧化物。本发明还提供一种使用该热电元件的热电模块和一种热电转换方法。在本发明的热电元件中，由于p型热电材料和n型热电材料在电绝缘基板上形成为薄膜，本发明的热电元件可以形成在具有各种形状的基板上，从而提供具有各种形状的热电元件。

5. 发明授权

US07649139B2 Thermoelectric conversion element and thermoelectric conversion module 失效
标题翻译：热电转换元件和热电转换模块
公开(公告)号：US07649139B2
公开(公告)日：2010-01-19
申请号：US10593644
申请日：2005-03-22
申请人： Toshiyuki Mihara , Ryoji Funahashi , Jun Akedo , Sou Baba , Masashi Mikami
发明人： Toshiyuki Mihara , Ryoji Funahashi , Jun Akedo , Sou Baba , Masashi Mikami
IPC分类号： H01L35/00 , H01L37/00 , H01L35/12 , H01L35/16 , H01L35/20
CPC分类号： C04B35/01 , C03C17/23 , C03C2217/23 , C04B35/453 , C04B35/62218 , C04B2235/3201 , C04B2235/3203 , C04B2235/3208 , C04B2235/3213 , C04B2235/3215 , C04B2235/3217 , C04B2235/3224 , C04B2235/3225 , C04B2235/3227 , C04B2235/3229 , C04B2235/3232 , C04B2235/3239 , C04B2235/3241 , C04B2235/3251 , C04B2235/3256 , C04B2235/3258 , C04B2235/3262 , C04B2235/3272 , C04B2235/3275 , C04B2235/3277 , C04B2235/3279 , C04B2235/3281 , C04B2235/3284 , C04B2235/3286 , C04B2235/3291 , C04B2235/3296 , C04B2235/3298 , C04B2235/443 , C04B2235/6586 , C04B2235/762 , C04B2235/765 , C04B2235/768 , C04B2235/96 , C04B2235/9607 , C23C14/08 , C23C14/3414 , H01L35/22 , H01L35/32
摘要： The present invention provides a thermoelectric element in which a thin film of p-type thermoelectric material and a thin film of n-type thermoelectric material, which are formed on an electrically insulating substrate, are electrically connected, in which the p-type thermoelectric material and the n-type thermoelectric material are selected from specific complex oxides with a positive Seebeck coefficient and specific complex oxides with a negative Seebeck coefficient, respectively. The present invention also provides a thermoelectric module using the thermoelectric element(s) and a thermoelectric conversion method. In the thermoelectric element of the present invention, since a p-type thermoelectric material and an n-type thermoelectric material are formed into a thin film on an electrically insulating substrate, the thermoelectric element of the invention can be formed on substrates having various shapes, thereby providing thermoelectric elements having various shapes.
摘要翻译：本发明提供一种热电元件，其中形成在电绝缘基板上的p型热电材料薄膜和n型热电材料薄膜电连接，其中p型热电材料 n型热电材料选自具有正塞贝克系数的特定复合氧化物和分别具有负的塞贝克系数的特定复合氧化物。本发明还提供一种使用该热电元件的热电模块和一种热电转换方法。在本发明的热电元件中，由于p型热电材料和n型热电材料在电绝缘基板上形成为薄膜，本发明的热电元件可以形成在具有各种形状的基板上，从而提供具有各种形状的热电元件。

6. 发明申请

US20050220987A1 Method for manufacturing film or piezoelectric film 有权
标题翻译：薄膜或压电薄膜的制造方法
公开(公告)号：US20050220987A1
公开(公告)日：2005-10-06
申请号：US11090173
申请日：2005-03-28
申请人： Motohiro Yasui , Jun Akedo , Sou Baba
发明人： Motohiro Yasui , Jun Akedo , Sou Baba
IPC分类号： C23C24/00 , C23C24/04 , H01L41/22 , H01L41/314 , H01L41/39 , B05D5/12
CPC分类号： H01L41/314 , C23C24/04 , H01L41/1876
摘要： A simple method is provided for manufacturing a film such as a piezoelectric film wherein the adhesiveness of the film on a substrate can be improved. An aerosol containing particles is ejected onto a substrate so that the particles adhere thereto, wherein the ratio between the Vickers hardness Hv(b) of the adhesion surface to which the particles are attached in the substrate, and the Vickers hardness Hv(p) of the particles is within a range of 0.39≦Hv(p)/Hv(b)≦3.08. The adhesiveness between the particles and the substrate can thereby be improved to reliably form a film. The present invention can be satisfactorily applied to the formation of a piezoelectric film.
摘要翻译：提供了一种用于制造诸如压电膜的膜的简单方法，其中可以提高基板上的膜的粘附性。将含有颗粒的气溶胶喷射到基板上，使得颗粒粘附到其上，其中颗粒附着在基材中的粘合表面的维氏硬度Hv（b）与维氏硬度Hv（p）之间的比例颗粒在0.39 <= Hv（p）/ Hv（b）<= 3.08的范围内。从而能够提高粒子与基材的粘合性，可靠地形成膜。本发明可以令人满意地应用于压电膜的形成。

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