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1. 发明授权

US06421472B1 Athermalized polymer overclad integrated planar optical waveguide device and method 失效
标题翻译：热收缩聚合物外包层平面光波导器件及方法
公开(公告)号：US06421472B1
公开(公告)日：2002-07-16
申请号：US09549255
申请日：2000-04-14
申请人： Marc Moroni , Sophie Vallon
发明人： Marc Moroni , Sophie Vallon
IPC分类号： G02B612
CPC分类号： G02B6/12028 , G02B6/10 , G02B6/12007 , G02B2006/12107
摘要： An athermalized, polymer overclad integrated optical device (with a multiplexer/demultiplexer or a Mach-Zender interferometer being representative examples) in which thermally-induced shifts in channel wavelengths are minimized. The device includes a doped silica waveguide core on a planar substrate and a polymer overclad having a negative variation in refractive index versus temperature (dn/dT) to inhibit shifts in the channel wavelengths.
摘要翻译：聚合物外包层综合光学器件（具有代表性示例的多路复用器/多路分解器或马赫 - 赞德干涉仪）的绝热，其中通道波长的热诱导移位被最小化。该器件包括在平面衬底上的掺杂二氧化硅波导芯和具有折射率相对于温度的负变化（dn / dT）的聚合物外包层，以抑制沟道波长的移动。

2. 发明授权

US06466707B1 Phasar athermalization using a slab waveguide 失效
标题翻译：使用平板波导的相片无热化
公开(公告)号：US06466707B1
公开(公告)日：2002-10-15
申请号：US09642984
申请日：2000-08-21
申请人： Steven B. Dawes , Nikolaus Boos , Sophie Vallon
发明人： Steven B. Dawes , Nikolaus Boos , Sophie Vallon
IPC分类号： G02B612
CPC分类号： G02B6/12011 , G02B6/10 , G02B6/12028
摘要： A passive temperature-compensated integrated optical component having an array of adjacent waveguides, and a slab waveguide located within a groove at an intermediate section of the array. The waveguides have an index of refraction that increases with increasing temperature, and the slab waveguide has an index of refraction that decreases with increasing temperature. The slab waveguide compensates for a temperature-induced change in the refractive index of the waveguides to maintain a generally constant optical path difference between the adjacent waveguides over a temperature range.
摘要翻译：具有相邻波导阵列的无源温度补偿集成光学部件和位于阵列的中间部分的凹槽内的平板波导。波导具有随着温度升高而增加的折射率，并且平板波导具有随温度升高而降低的折射率。平板波导补偿波导的折射率的温度引起的变化，以便在温度范围内保持相邻波导之间的通常恒定的光程差。

3. 发明授权

US06574409B1 Athermalized wavelength division multiplexer/demultiplexer with polymer compensation region and methods of manufacturing 失效
标题翻译：具有聚合物补偿区域的热分解波分复用器/解复用器和制造方法
公开(公告)号：US06574409B1
公开(公告)日：2003-06-03
申请号：US09660638
申请日：2000-09-13
申请人： Marc Moroni , Sophie Vallon
发明人： Marc Moroni , Sophie Vallon
IPC分类号： G02B610
CPC分类号： G02B6/12011 , G02B6/12028
摘要： An athermalized optical waveguide circuit device exhibiting reduced signal power losses includes an optical phased-array comprising a plurality of curved waveguide cores of different lengths supported on a planar substrate, wherein each of the waveguide cores of the array includes a first silica segment, a second silica segment, and a central polymer segment connecting the first silica segment with the second silica segment to form a continuous waveguide core. The device is prepared by forming a plurality of adjacent curved silica waveguide cores on a planar substrate, overcladding the silica waveguide cores with a silica overclad, etching at least one groove into a central portion of the optical phased-array through the overclad and silica waveguide cores, forming a plurality of polymer waveguide core segments connecting a first silica waveguide core segment with a corresponding second silica waveguide core segment to form a continuous waveguide core, and overcladding the polymer waveguide core segments to define a composite optical phased-array comprising a plurality of adjacent composite waveguides. The polymer waveguide core segments have a negative variation of index of refraction as a function of temperature to compensate for the positive variation of the silica waveguide core segments, while providing an uninterrupted waveguide with low power loss of optical signals.
摘要翻译：显示出降低的信号功率损耗的无热水化光波导电路装置包括光学相控阵列，其包括支撑在平面基板上的多个不同长度的弯曲波导芯，其中阵列中的每个波导芯包括第一二氧化硅段，第二二极管二氧化硅段和连接第一二氧化硅段与第二二氧化硅段的中心聚合物段，以形成连续的波导芯。通过在平面基板上形成多个相邻的弯曲二氧化硅波导芯，通过在二氧化硅外包层上包覆二氧化硅波导芯，通过外包层和二氧化硅波导将至少一个凹槽蚀刻到光相控阵列的中心部分形成多个聚合物波导芯段，其将第一硅石波导芯段与对应的第二硅石波导芯段连接以形成连续的波导芯，并且包覆聚合物波导芯段以限定复合光相位阵列，其包括多个的相邻复合波导。聚合物波导芯段具有作为温度的函数的折射率的负变化，以补偿二氧化硅波导芯段的正变化，同时提供具有低功率光信号损耗的不间断波导。

4. 发明授权

US06271144B1 Process for etching a polycrystalline Si(1-x)Ge(x) layer or a stack of polycrystalline Si(1-x)Ge(x) layer and of a polycrystalline Si layer, and its application to microelectronics 失效
标题翻译：用于蚀刻多晶Si（1-x）Ge（x）层或多晶Si（1-x）Ge（x）层和多晶Si层的堆叠的方法及其在微电子学中的应用
公开(公告)号：US06271144B1
公开(公告)日：2001-08-07
申请号：US09103121
申请日：1998-06-23
申请人： Cédric Monget , Sophie Vallon , Olivier Joubert
发明人： Cédric Monget , Sophie Vallon , Olivier Joubert
IPC分类号： H01L21302
CPC分类号： H01L21/28282 , H01L21/32137
摘要： The process for etching a polycrystalline Si1−xGex layer or a stack includes a polycrystalline Si1−xGex layer and of a polycrystalline Si layer, deposited on a substrate and including, at its surface, a mask of inorganic material, includes main etching step in which the said layer or the said stack is anisotropically etched, using the said mask, by means of a high-density gas plasma of a gas mixture consisting of chlorine (Cl2) and of either nitrogen (N2) or ammonia (NH3) or of a nitrogen/ammonia mixture.
摘要翻译：用于蚀刻多晶Si1-xGex层或堆叠的方法包括沉积在基板上并且在其表面上包括无机材料掩模的多晶Si1-xGex层和多晶Si层，其包括主蚀刻步骤，其中使用所述掩模，通过由氯（Cl 2）和氮（N 2）或氨（NH 3）或由氮（N 2）或氨（NH 3）组成的气体混合物的高密度气体等离子体对所述层或所述堆叠进行各向异性蚀刻氮/氨混合物。

5. 发明授权

US06577787B2 Tuning of optical waveguide devices containing an organic material 失效
标题翻译：调谐含有机材料的光波导器件
公开(公告)号：US06577787B2
公开(公告)日：2003-06-10
申请号：US09758556
申请日：2001-01-11
申请人： Alain Marcel Jean Beguin , Marc Moroni , Sophie Vallon
发明人： Alain Marcel Jean Beguin , Marc Moroni , Sophie Vallon
IPC分类号： G02B628
CPC分类号： G02B6/12028 , G02B6/122 , G02B6/1221 , G02B6/132
摘要： The present invention provides methods of tuning the optical properties, such as the channel center wavelengths, of an integrated optical waveguide device by providing a device, such as a wavelength division multiplexer or demultiplexer, which contains an organic material, and fine tuning the device by exposing the organic material to at least one incremental step of UV irradiation.
摘要翻译：本发明提供了通过提供包含有机材料的诸如波分复用器或解复用器的器件来调谐集成光波导器件的光学特性（例如通道中心波长）的方法，并且通过将有机材料暴露于UV照射的至少一个增量步骤。

6. 发明授权

US06519380B2 Athermalized integrated optical waveguide devices 有权
标题翻译：热化集成光波导器件
公开(公告)号：US06519380B2
公开(公告)日：2003-02-11
申请号：US09757884
申请日：2001-01-10
申请人： Steven B. Dawes , Marc Moroni , Sophie Vallon
发明人： Steven B. Dawes , Marc Moroni , Sophie Vallon
IPC分类号： G02B612
CPC分类号： G02B6/12028 , G02B6/122 , G02B6/1221 , G02B6/132
摘要： The present invention provides an athermalized organic-containing overclad integrated planar optical waveguide circuit device in which thermal induced shifting of channel wavelengths is minimized. The organic-containing overclad material is combined with a silica or doped silica glass material in the form of a local overclad, a bi-layer overclad, or a hybrid overclad. The organic-containing overclad material is a polymer or a sol-gel material.
摘要翻译：本发明提供了一种其中通道波长的热诱导移位最小化的无热含有机物的外包层综合平面光波导电路装置。含有机物的外包层材料与二氧化硅或掺杂的二氧化硅玻璃材料以局部外包层，双层外包层或混合外包层的形式组合。含有机物的外包层材料是聚合物或溶胶 - 凝胶材料。

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