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1. 发明授权

US6137565A Bragg grating temperature/strain fiber sensor having combination interferometer/spectrometer output arrangement 失效
标题翻译：具有组合干涉仪/光谱仪输出布置的布拉格光栅温度/应变光纤传感器
公开(公告)号：US6137565A
公开(公告)日：2000-10-24
申请号：US306533
申请日：1999-05-06
申请人： Wolfgang Ecke , Steffen Goerlich , Siegfried Belke
发明人： Wolfgang Ecke , Steffen Goerlich , Siegfried Belke
IPC分类号： G01D5/353 , G01J5/60 , G01K11/32 , G01B9/02
CPC分类号： G01J5/60 , G01D5/35316 , G01D5/35335 , G01K11/3206
摘要： An arrangement for simultaneous optical determination of temperature and strain fluctuations in an optical fiber for precisely determining the changes in environmental influences and/or fiber loads is disclosed. The arrangement performs two different measurement tasks of the absolute measurement of a stationary quantity, such as temperature and the relative, high-resolution measurement of quickly varying quantities of fluctuation processes with comparable accuracy in a single optical The arrangement which is achieved using a spectrometer with an imaging, spectrally dispersive element, a first input light bundle being arranged with reference to the dispersive element such that the light spectrally dispersed at the dispersive element is projected onto a first linear receiver The arrangement, and an additional second input light bundle is directed onto the dispersive element in the spectrometer, whose spectrally dispersed light falls onto a second linear receiver The arrangement, parallel to the first one, the two input light bundles are fed light from a broadband light source which has been reflected by at least two optical fiber gratings with different mean wavelengths, and an interferometer The arrangement with phase modulation and different arm lengths is present at least in the light path of the second input light bundle upstream of the spectral dispersion by means of the dispersive element, whose evaluation is performed via the second receiver. The arrangement by means of phase modulation modules with reference to relative changes in the Bragg wavelengths, while a CCD evaluation module for determining the absolute Bragg wavelengths of the optical fiber gratings is arranged downstream of the first receiver The arrangement.
摘要翻译：公开了用于同时光学确定光纤中的温度和应变波动的装置，用于精确地确定环境影响和/或光纤负载的变化。该装置执行两个不同的测量任务，即固定量的绝对测量，例如在单个光学中具有相当精度的快速变化量的波动过程的温度和相对高分辨率测量。使用具有成像光谱分散元件，第一输入光束相对于分散元件布置，使得光谱分散在分散元件处的光被投射到第一线性接收器上。该布置和附加的第二输入光束被引导到光谱仪中的分散元件，其光谱分散的光落在第二线性接收器上。平行于第一输入光束的布置是从已经被至少两个光纤光栅反射的宽带光源馈送的光具有不同的平均波长，以及干涉仪Th 至少在频谱色散上游的第二输入光束的光路中通过色散元件存在具有相位调制和不同臂长度的e布置，其通过第二接收器执行评估。参考布拉格波长的相对变化的相位调制模块的布置，而用于确定光纤光栅的绝对布拉格波长的CCD评估模块布置在第一接收机的下游。

2. 发明授权

US6147356A Arrangement for the detection of disk-shaped objects in a cassette 失效
标题翻译：用于检测盒中盘形物体的布置
公开(公告)号：US6147356A
公开(公告)日：2000-11-14
申请号：US263618
申请日：1999-03-05
申请人： Burkhard Hahn , Siegfried Belke , Steffen Loesch
发明人： Burkhard Hahn , Siegfried Belke , Steffen Loesch
IPC分类号： H01L21/00 , H01L21/68 , G01N21/86
CPC分类号： H01L21/67265 , H01L21/681
摘要： An arrangement for the detection of disk-shaped objects in a cassette preferably for detecting the presence and the position of semiconductor wafers in a cassette is disclosed. Reliable detection of disk-shaped objects in cassettes is provided regardless of their orientation or any discontinuity in their edge region. This is done by an arrangement by detecting light reflected at the edges of the objects in that it has at least two linearly elongated rows of light sources which are arranged parallel to a family of planes predetermined by the cassette shelves and objects and which lie in a surface parallel to the edge areas to be detected. Further, an objective is arranged between the parallel linear light sources and by which a plurality of shelves is imaged simultaneously on the sensor unit. There can be read out of the array of sensor elements at least portions of an edge area of the objects which is elongated transversely to such an extent that, when imaged in the sensor plane, an irregularity present in the edge area of the object is always less than the read out portions of the elongated edge area.
摘要翻译：公开了一种用于检测盒中的盘形物体的优选用于检测盒中半导体晶片的存在和位置的装置。提供盒式磁盘形物体的可靠检测，而不管其方向或其边缘区域中有任何不连续性。这是通过检测在物体边缘处反射的光的装置来实现的，因为它具有至少两个线性细长的光源行，其平行于由盒架和物体预定的一系列平面，并且位于表面平行于要检测的边缘区域。此外，在平行线性光源之间设置目标，并且多个搁架同时在传感器单元上成像。可以从传感器元件的阵列中读出物体的边缘区域的至少一部分，其横向延伸到这样的程度，即当在传感器平面中成像时，物体的边缘区域中存在的不规则性总是小于细长边缘区域的读出部分。

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