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    • 1. 发明申请
    • METHOD OF FORMING BARRIER RIBS
    • 形成障碍物RIBS的方法
    • US20080153378A1
    • 2008-06-26
    • US11963827
    • 2007-12-22
    • Shunsuke FUJIOTakashi Yoshinaga
    • Shunsuke FUJIOTakashi Yoshinaga
    • H01J9/02
    • H01J9/242H01J11/12H01J11/36
    • A method of forming barrier ribs includes the following steps. The first step is to form a barrier rib material layer on a substrate. The second step is to form a resist film on the barrier rib material layer. The third step is to form the barrier rib material layer into a barrier rib pattern material layer. The fourth step is to remove the resist film from the barrier rib pattern material layer. The fifth step is to fire the barrier rib pattern material layer to form barrier ribs. In the above steps, a bonding layer is formed between the substrate and the barrier rib material layer. The bonding layer has such a bonding strength that sufficiently maintains the barrier rib pattern material layer on the substrate upon removing the resist film from the barrier rib pattern material, and is made from a thermally burning-out material that is burned out upon firing the barrier rib pattern material layer.
    • 形成隔壁的方法包括以下步骤。 第一步是在基板上形成隔壁材料层。 第二步是在阻挡层材料层上形成抗蚀膜。 第三步是将障壁材料层形成为障壁图案材料层。 第四步骤是从阻挡层图案材料层去除抗蚀剂膜。 第五步是对障壁图案材料层起火,形成障壁。 在上述步骤中,在基板和障壁材料层之间形成接合层。 接合层具有这样的接合强度,从隔离肋图案材料除去抗蚀剂膜时,能够充分地保持基板上的隔壁图案材料层,并且由在烧制阻挡层时烧掉的热燃烧材料制成 肋图案材料层。