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    • 1. 发明授权
    • Method of deposition
    • 沉积方法
    • US09109282B2
    • 2015-08-18
    • US13609913
    • 2012-09-11
    • Shoso Nishida
    • Shoso Nishida
    • C23C14/34C23C14/50H01J37/20
    • C23C14/34C23C14/50H01J37/20H01J2237/2007
    • A method of deposition is provided in which a deposition operation can be immediately performed when a workpiece for deposition is carried into a deposition chamber irrespective of a shape or a structure of the workpiece for deposition. The workpiece for deposition is integrally molded with an assisting member, which is configured to maintain the workpiece for deposition in a predetermined orientation such that a deposition surface or a deposition portion thereof faces a target material when the workpiece for deposition is carried into a deposition chamber and is placed on a deposition stand, when the workpiece for deposition is injection-molded; and the workpiece for deposition is carried into the deposition chamber and is deposited.
    • 提供了一种沉积方法,其中当用于沉积的工件被携带到沉积室中时,可以立即执行沉积操作,而不管用于沉积的工件的形状或结构如何。 用于沉积的工件与辅助构件一体地模制,辅助构件被构造成将工件保持在预定取向上,使得当用于沉积的工件被携带到沉积室中时,沉积表面或其沉积部分面向目标材料 并且当用于沉积的工件被注射成型时放置在沉积台上; 并且用于沉积的工件被运送到沉积室中并沉积。