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    • 3. 发明申请
    • METHOD FOR MANUFACTURING TRANSISTOR
    • 制造晶体管的方法
    • US20120083078A1
    • 2012-04-05
    • US13236837
    • 2011-09-20
    • Satoshi TORIUMIShinobu FURUKAWA
    • Satoshi TORIUMIShinobu FURUKAWA
    • H01L21/336
    • H01L29/66765H01L27/1251H01L29/04H01L29/78648H01L29/78696
    • To provide a method for manufacturing a transistor which has little variation in characteristics and favorable electric characteristics. A gate insulating film is formed over a gate electrode; a semiconductor layer including a microcrystalline semiconductor is formed over the gate insulating film; an impurity semiconductor layer is formed over the semiconductor layer; a mask is formed over the impurity semiconductor layer, and then the semiconductor layer and the impurity semiconductor layer are etched with use of the mask to form a semiconductor stacked body; the mask is removed and then the semiconductor stacked body is exposed to plasma generated in an atmosphere containing a rare gas to form a barrier region on a side surface of the semiconductor stacked body; and a wiring over the impurity semiconductor layer of the semiconductor stacked body is formed.
    • 提供一种几何特性变化小,电气特性好的晶体管的制造方法。 在栅电极上形成栅极绝缘膜; 在栅绝缘膜上形成包含微晶半导体的半导体层; 在半导体层上形成杂质半导体层; 在杂质半导体层上形成掩模,然后使用掩模蚀刻半导体层和杂质半导体层,以形成半导体层叠体; 去除掩模,然后将半导体层叠体暴露于在含有稀有气体的气氛中产生的等离子体,以在半导体层叠体的侧面上形成阻挡区域; 并且形成半导体层叠体的杂质半导体层上的布线。
    • 4. 发明授权
    • Organic field effect transistor and semiconductor device
    • 有机场效应晶体管和半导体器件
    • US08049206B2
    • 2011-11-01
    • US11657718
    • 2007-01-25
    • Shinobu FurukawaRyota ImahayashiKaoru Kato
    • Shinobu FurukawaRyota ImahayashiKaoru Kato
    • H01L51/30
    • C07D209/88H01L51/0059H01L51/006H01L51/0061H01L51/0072H01L51/0508
    • It is an object to provide an organic field effect transistor including an electrode which can reduce an energy barrier at an interface between a conductive layer and a semiconductor layer, and a semiconductor device including the organic field effect transistor. A composite layer containing an organic compound and an inorganic compound is provided in at least part of one of a source electrode and a drain electrode in an organic field effect transistor, and as the organic compound, a carbazole derivative represented by the general formula (1) is used. By providing the composite layer in at least part of one of the source electrode and the drain electrode, an energy barrier at an interface between a conductive layer and a semiconductor layer can be reduced.
    • 本发明的目的是提供一种包括能够降低导电层和半导体层之间的界面处的能量势垒的电极的有机场效应晶体管,以及包括该有机场效应晶体管的半导体器件。 在有机场效应晶体管中的源电极和漏电极的至少一部分中设置含有有机化合物和无机化合物的复合层,作为有机化合物,可以使用通式(1)表示的咔唑衍生物 ) 用来。 通过在源电极和漏电极中的至少一部分中提供复合层,可以减少导电层和半导体层之间的界面处的能量势垒。
    • 6. 发明授权
    • Semiconductor device and manufacturing method thereof
    • 半导体装置及其制造方法
    • US07919772B2
    • 2011-04-05
    • US11791502
    • 2005-12-08
    • Shinobu FurukawaRyota Imahayashi
    • Shinobu FurukawaRyota Imahayashi
    • H01L29/08
    • H01L51/0512H01L21/28273H01L51/0059H01L51/0062H01L51/0078H01L51/0081
    • A nonvolatile memory has a problem in that applied voltage is high. This is because a carrier needs to be injected into a floating gate through an insulating film by a tunneling effect. In addition, there is concern about deterioration of the insulating film by performing such carrier injection. An object of the present invention is to provide a memory in which applied voltage is lowered and deterioration of an insulating film is prevented. One feature is to use a layer in which an inorganic compound having a charge-transfer complex is mixed with an organic compound as a layer functioning as a floating gate of a memory. A specific example is an element having a transistor structure where a layer in which an inorganic compound having a charge-transfer complex is mixed with an organic compound and which is sandwiched between insulating layers is used as a floating gate.
    • 非易失性存储器具有施加电压高的问题。 这是因为载体需要通过隧道效应通过绝缘膜注入浮栅。 此外,通过进行这样的载体注入,担心绝缘膜的劣化。 本发明的目的是提供一种其中施加电压降低并且防止绝缘膜劣化的存储器。 一个特征是使用具有电荷转移络合物的无机化合物与有机化合物混合的层作为用作存储器的浮动栅极的层。 具体实例是具有晶体管结构的元件,其中将具有电荷转移络合物的无机化合物与有机化合物混合并且夹在绝缘层之间的层用作浮栅。