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1. 发明授权

US08339594B2 Method for measuring semiconductor wafer profile and device for measuring the same used therefor 有权
标题翻译：用于测量半导体晶片轮廓的方法和用于测量其的装置
公开(公告)号：US08339594B2
公开(公告)日：2012-12-25
申请号：US12953523
申请日：2010-11-24
申请人： Shinji Sakamoto
发明人： Shinji Sakamoto
IPC分类号： G01N21/00
CPC分类号： G01B11/24
摘要： Disclosed is a method for measuring a profile using a device for measuring the profile in which included are: a distance measuring means 2 for measuring the distance to an edge region of a semiconductor wafer 12 in such a manner that light is emitted to be reflected at the edge region and to be detected; a first swing mechanism swingably supporting the distance measuring means 2; and a second swing mechanism swingably supporting the first swing mechanism, the method comprising the steps of: locating angles of the first swing mechanism each of which gives a maximum intensity of received light at each of predetermined angles of the second swing mechanism thereof; calculating contour points using coordinate transformation, thereby enabling points-related data to be acquired to represent a contour profile of the edge region. Thus, the method can be used for edge profile measurement of large-diameter wafers.
摘要翻译：公开了一种使用用于测量轮廓的装置来测量轮廓的方法，其中包括：距离测量装置2，用于测量与半导体晶片12的边缘区域的距离，使得发射光以在边缘区域并被检测; 可摆动地支撑距离测量装置2的第一摆动机构; 以及可摆动地支撑所述第一摆动机构的第二摆动机构，所述方法包括以下步骤：将所述第一摆动机构的角度定位，其中，所述第一摆动机构在其第二摆动机构的每个预定角度处给出最大的接收光强度; 使用坐标变换计算轮廓点，从而能够获取点相关数据以表示边缘区域的轮廓线。因此，该方法可用于大直径晶片的边缘轮廓测量。

2. 发明授权

US08207514B2 Charged particle beam drawing apparatus and proximity effect correction method thereof 有权
标题翻译：带电粒子束绘图装置及其接近效应校正方法
公开(公告)号：US08207514B2
公开(公告)日：2012-06-26
申请号：US12882713
申请日：2010-09-15
申请人： Shigehiro Hara , Shuichi Tamamushi , Takashi Kamikubo , Hitoshi Higurashi , Shinji Sakamoto , Yusuke Sakai , Yoshihiro Okamoto , Akihito Anpo
发明人： Shigehiro Hara , Shuichi Tamamushi , Takashi Kamikubo , Hitoshi Higurashi , Shinji Sakamoto , Yusuke Sakai , Yoshihiro Okamoto , Akihito Anpo
IPC分类号： G21K5/10
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J37/304 , H01J2237/31769 , H01J2237/31776
摘要： A charged particle beam drawing apparatus forms a map having meshes, forms representative figures, area of each representative figure in each mesh being equal to gross area of figures in each mesh, and calculates a proximity effect correction dose of the charged particle beam in each mesh on the basis of area of each representative figure in each mesh. If it is necessary to change the proximity effect correction dose of the charged particle beam for drawing at least one pattern corresponding to at least one figure, the charged particle beam drawing apparatus changes area of the at least one figure before the representative figures are formed by a representative figure forming portion, and changes the proximity effect correction dose of the charged particle beam for drawing the at least one pattern corresponding to the at least one figure, calculated by a proximity effect correction dose calculating portion.
摘要翻译：带电粒子束描绘装置形成具有网格的图，形成代表性图，每个网格中每个代表图的面积等于每个网格中的图形的总面积，并计算每个网格中的带电粒子束的邻近效应校正剂量在每个网格中每个代表人物的面积的基础上。如果需要改变带电粒子束的接近效应校正剂量以绘制与至少一个图形相对应的至少一个图案，则带电粒子束描绘装置在代表性图形形成之前改变至少一个图形的面积，代表图形形成部分，并且改变用于绘制由邻近效应校正剂量计算部分计算的与至少一个图形相对应的至少一个图案的带电粒子束的邻近效应校正剂量。

3. 发明申请

US20090045359A1 SPATIAL INFORMATION DETECTING APPARATUS 有权
标题翻译：空间信息检测装置
公开(公告)号：US20090045359A1
公开(公告)日：2009-02-19
申请号：US12096019
申请日：2007-10-10
申请人： Minoru Kumahara , Yusuke Hashimoto , Shinji Sakamoto , Yuji Takada
发明人： Minoru Kumahara , Yusuke Hashimoto , Shinji Sakamoto , Yuji Takada
IPC分类号： G01N21/84
CPC分类号： G01S17/36 , G01S7/4913 , G01S7/4915 , G01S7/493 , G01S7/497 , G01S17/89
摘要： In an apparatus using an intensity-modulated light for detection of spatial information based upon light intensity of light reflected from a target space, a timing synchronization circuit is provided to synchronize a phase of the intensity-modulated light from a light-emitting element with a timing of operating a light-receiving element receiving the intensity-modulated light. The light-receiving element is caused to operate for enabling the detection of intensity of the received light for each of a plurality of phase regions within one cycle of the intensity-modulated light. The timing synchronization circuit functions to compare a cyclic variation determining the operation of the light-receiving element with a cyclic variation associated with an output from a light-emitting element driving circuit in order to keep a constant phase difference between these two cyclic variations.
摘要翻译：在使用强度调制光用于基于从目标空间反射的光的光强度来检测空间信息的装置中，提供定时同步电路以使来自发光元件的强度调制光的相位与操作接收强度调制光的光接收元件的定时。导致光接收元件操作，以便能够在强度调制光的一个周期内检测多个相位区域中的每一个的接收光的强度。定时同步电路用于将确定光接收元件的操作的循环变化与与发光元件驱动电路的输出相关联的循环变化进行比较，以便在这两个循环变化之间保持恒定的相位差。

4. 发明申请

US20080051518A1 Layered Product 有权
标题翻译：分层产品
公开(公告)号：US20080051518A1
公开(公告)日：2008-02-28
申请号：US11573791
申请日：2005-08-15
申请人： Shinji Sakamoto
发明人： Shinji Sakamoto
IPC分类号： C08L23/10
CPC分类号： B32B27/327 , B32B27/08 , B32B2323/046 , B32B2439/00 , B32B2439/70 , C08L23/06 , C08L23/0807 , C08L23/16 , C08L2314/06 , Y10T428/31692 , Y10T428/31739 , Y10T428/31743 , Y10T428/31797 , Y10T428/31855 , Y10T428/31909 , Y10T428/31993 , C08L2666/06
摘要： An easy-to-tear laminate is provided which is satisfactory in tearability and heat-sealing strength and excellent in ease of opening and contents-protecting performance. The laminate comprises a base layer and a layer comprising 10-95% by weight specific ethylene-based terpolymer (A) and 5-90% by weight specific low-density polyethylene (B) produced by the high-pressure radical polymerization method.
摘要翻译：提供易撕层压体，其撕裂性和热封强度是令人满意的，并且易于打开和内容物保护性能优异。层压体包括基层和包含10-95重量％的特定乙烯基三元共聚物（A）和5-90重量％的通过高压自由基聚合法制备的特定低密度聚乙烯（B）的层。

5. 发明授权

US06562618B1 Monoclonal antibody against connective tissue growth factor and medicinal uses thereof 失效
公开(公告)号：US06562618B1
公开(公告)日：2003-05-13
申请号：US09582337
申请日：2000-09-18
申请人： Takuya Tamatani , Katsunari Tezuka , Shinji Sakamoto , Masaharu Takigawa
发明人： Takuya Tamatani , Katsunari Tezuka , Shinji Sakamoto , Masaharu Takigawa
IPC分类号： C07K1622
CPC分类号： A01K67/0275 , A01K2217/05 , A01K2267/01 , A01K2267/03 , A61K2039/505 , C07K14/475 , C07K16/22 , C07K2317/21 , C07K2317/56 , C07K2317/73 , C07K2317/76 , G01N2800/347 , Y10S435/81
摘要： A human monoclonal antibody useful for the treatment of various diseases caused by human connective tissue growth factor (CTGF) and preventing the onset of the above diseases; medicinal uses thereof; and various monoclonal antibodies having various characteristics against various mammalian CTGFs useful for detecting and assaying CTGFs present in body fluids of mammals suffering from various diseases.

6. 发明授权

US08255441B2 Figure data verification apparatus and method therefor 有权
标题翻译：图数据验证装置及其方法
公开(公告)号：US08255441B2
公开(公告)日：2012-08-28
申请号：US11971445
申请日：2008-01-09
申请人： Jun Kasahara , Shigehiro Hara , Shinji Sakamoto
发明人： Jun Kasahara , Shigehiro Hara , Shinji Sakamoto
IPC分类号： G06F7/10
CPC分类号： G06F17/5068 , G06F17/5081
摘要： A figure data verification apparatus includes an operation part configured to input design data and writing data converted from the design data and perform an exclusive OR operation between data of a figure included in the design data and data of a figure included in the writing data, a sorting part configured to sort figures produced as a result of the exclusive OR operation to at least one arbitrary-angle figure having at least one angle not being an integral multiple of 45 degrees and to at least one non-arbitrary-angle figure all angles of which are integral multiples of 45 degrees, a first removal part configured to remove a figure of a size smaller than a first allowable error value from the arbitrary-angle figure, and a second removal part configured to remove a figure of a size smaller than a second allowable error value from the non-arbitrary-angle figure.
摘要翻译：图形数据验证装置包括：操作部，被配置为输入设计数据并写入从设计数据转换的数据，并且在包括在设计数据中的图形的数据与包括在写入数据中的图形的数据之间进行异或运算; 分类部件，其被配置为将作为异或运算的结果产生的图形分类为具有至少一个角度不为45度的整数倍的至少一个任意角度图形，以及至少一个非任意角度图形其是45度的整数倍，第一移除部件，被配置为从所述任意角度图形去除尺寸小于第一容许误差值的图形;以及第二移除部件，被配置为移除尺寸小于来自非任意角度图的第二允许误差值。

7. 发明授权

US07786453B2 Charged-particle beam pattern writing method and apparatus with a pipeline process to transfer data 有权
标题翻译：带电粒子束图案写入方法和装置，具有流水线处理传输数据
公开(公告)号：US07786453B2
公开(公告)日：2010-08-31
申请号：US11782209
申请日：2007-07-24
申请人： Shinji Sakamoto , Shigehiro Hara , Hitoshi Higurashi
发明人： Shinji Sakamoto , Shigehiro Hara , Hitoshi Higurashi
IPC分类号： G21K5/00 , G06F5/10
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00
摘要： A charged-particle beam writing apparatus includes first and second storage devices, a transfer processor for sequentially sending to the first storage several design data files per pattern layout-defined region, a first data processor which sequentially reads design data files from the first storage and converts each data file's design data into draw data for storage in the second storage while being pipelined with the transfer processing, second to n-th data processors which sequentially read data files from the second storage and apply mutually different ones of second to n-th data processings to each draw data in a way that the first to n-th data processings are pipelined and store the processed draw data in the second storage, and a pattern-writing unit for writing a pattern on a workpiece by using a beam that is controlled based on each n-th data processing-completed data being stored in the second storage.
摘要翻译：一种带电粒子束写入装置，包括第一和第二存储装置，一个传送处理器，用于按顺序向每个图形布局定义区域向第一存储器发送几个设计数据文件;第一数据处理器，其从第一存储器顺序地读取设计数据文件，将每个数据文件的设计数据转换成绘图数据，以便存储在第二存储器中，同时用传送处理流水线化;第二至第n数据处理器，其从第二存储器顺序地读取数据文件并应用相互不同的第二至第n 以第一至第n数据处理为流水线并将经处理的绘制数据存储在第二存储器中的方式对每个绘制数据进行数据处理;以及模式写入单元，用于通过使用基于每个第n个数据处理完成的数据被存储在第二存储器中。

8. 发明申请

US20090216450A1 APPARATUS AND METHOD FOR INSPECTING OVERLAPPING FIGURE, AND CHARGED PARTICLE BEAM WRITING APPARATUS 有权
标题翻译：用于检查重叠图的装置和方法以及充电颗粒光束写装置
公开(公告)号：US20090216450A1
公开(公告)日：2009-08-27
申请号：US12392507
申请日：2009-02-25
申请人： Shinji Sakamoto , Shigehiro Hara , Hitoshi Higurashi
发明人： Shinji Sakamoto , Shigehiro Hara , Hitoshi Higurashi
IPC分类号： G06F19/00 , H01J3/00
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J2237/2817
摘要： An apparatus for inspecting overlapping figures includes a chip overlap inspection unit configured to input a data file on each chip of a plurality of chips arranged in a writing pattern, and inspect an existence of an overlap between a plurality of chips, based on arrangement data on each region of the plurality of chips, a setting unit configured to set, with respect to the plurality of chips, a plurality of hierarchies and a plurality of cell regions of each of the plurality of hierarchies, an extraction unit configured to extract, with respect to a plurality of chips where the overlap occurs, a cell region where the overlap is located, from a higher hierarchy level to a lower hierarchy level in order, a figure overlap judging unit configured to judge an existence of an overlap between a figure in the cell region extracted and a figure in the other cell region extracted, and an output unit configured to output data on a plurality of figures overlapping.
摘要翻译：用于检查重叠图形的装置包括：芯片重叠检查单元，被配置为输入以写入模式布置的多个芯片的每个芯片上的数据文件，并且基于关于多个芯片的布置数据检查多个芯片之间的重叠的存在所述多个芯片的每个区域，设置单元，被配置为相对于所述多个芯片设置所述多个层次中的每一个的多个层次和多个单元区域;提取单元，被配置为：涉及重叠发生的多个芯片，重叠位置的单元区域，从较高层次到次级的顺序;图形重叠判断单元，被配置为判断存在重叠的图形之间的重叠提取单元区域并提取另一单元区域中的图形，以及输出单元，被配置为输出重叠的多个图形上的数据。

9. 发明申请

US20080172438A1 FIGURE DATA VERIFICATION APPARATUS AND METHOD THEREFOR 有权
标题翻译：图数据验证装置及其方法
公开(公告)号：US20080172438A1
公开(公告)日：2008-07-17
申请号：US11971445
申请日：2008-01-09
申请人： Jun KASAHARA , Shigehiro HARA , Shinji SAKAMOTO
发明人： Jun KASAHARA , Shigehiro HARA , Shinji SAKAMOTO
IPC分类号： G06G7/00
CPC分类号： G06F17/5068 , G06F17/5081
摘要： A figure data verification apparatus includes an operation part configured to input design data and writing data converted from the design data and perform an exclusive OR operation between data of a figure included in the design data and data of a figure included in the writing data, a sorting part configured to sort figures produced as a result of the exclusive OR operation to at least one arbitrary-angle figure having at least one angle not being an integral multiple of 45 degrees and to at least one non-arbitrary-angle figure all angles of which are integral multiples of 45 degrees, a first removal part configured to remove a figure of a size smaller than a first allowable error value from the arbitrary-angle figure, and a second removal part configured to remove a figure of a size smaller than a second allowable error value from the non-arbitrary-angle figure.
摘要翻译：图形数据验证装置包括：操作部，被配置为输入设计数据并写入从设计数据转换的数据，并且在包括在设计数据中的图形的数据与包括在写入数据中的图形的数据之间进行异或运算; 分类部件，其被配置为将作为异或运算的结果产生的图形分类为具有至少一个角度不为45度的整数倍的至少一个任意角度图形，以及至少一个非任意角度图形其是45度的整数倍，第一移除部件，被配置为从所述任意角度图形去除尺寸小于第一容许误差值的图形;以及第二移除部件，被配置为移除尺寸小于来自非任意角度图的第二允许误差值。

10. 发明申请

US20070049076A1 ANTI-UNPLUGGING UNIT AND TRANSMISSION CODE 有权
标题翻译：防拆单位和传输码
公开(公告)号：US20070049076A1
公开(公告)日：2007-03-01
申请号：US11466209
申请日：2006-08-22
申请人： AKIFUMI YAMADA , Shinji Sakamoto , Keiji Kawauchi , Kazunao Narita
发明人： AKIFUMI YAMADA , Shinji Sakamoto , Keiji Kawauchi , Kazunao Narita
IPC分类号： H01R13/44
CPC分类号： H01R13/6397 , H01R24/62
摘要： The invention provides an anti-unplugging unit attached to a plug of a transmission cord and to be put in a jack of electronic or communications equipment with the plug for preventing unauthorized removal of the plug from the jack. The anti-unplugging unit includes a latch member having an engaging portion for engaging a predetermined portion of a jack when the unit with the plug is inserted into the jack, lock means for selectively allowing or preventing release of engagement of the engaging portion with the predetermined portion of the jack, and a housing fixable to the plug and accommodating the latch member and the lock means. The invention also provides a transmission cord including a first cord having plugs at both ends, and the anti-unplugging unit fixed to at least one of the plugs.
摘要翻译：本发明提供了一种连接到传输线的插头上的防拔插单元，并将其插入具有插头的电子或通信设备的插座中，以防止插头从插座中未经授权的移除。防拔出单元包括闩锁构件，当具有插头的单元插入插座时，锁定构件具有用于接合插座的预定部分的接合部分;锁定装置，用于选择性地允许或防止接合部分与预定的接合部分的接合插座的一部分，以及可固定到插头并容纳闩锁构件和锁定装置的壳体。本发明还提供了一种传输线，其包括在两端具有插头的第一帘线和固定到至少一个插头的防拔出单元。

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