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    • 1. 发明授权
    • Semiconductor device
    • 半导体器件
    • US08698202B2
    • 2014-04-15
    • US13278798
    • 2011-10-21
    • Masahiro MitsunagaShinichi TamariYuji Ibusuki
    • Masahiro MitsunagaShinichi TamariYuji Ibusuki
    • H01L29/66
    • H01L27/085H01L27/0605H01L29/66462H01L29/7785H01L29/802
    • A semiconductor device including at least a p-channel field-effect transistor region formed above a compound semiconductor substrate. The p-channel field-effect transistor region includes an undoped buffer layer; a p-type channel layer formed in contact with the buffer layer; a p-type source region and a p-type drain region formed in the channel layer, being separated with each other; and an n-type gate region formed above the channel layer and between the source region and the drain region. The buffer layer is formed having either a multilayer structure including a hole diffusion control layer with a band gap larger than the channel layer, or a single layer structure including only the hole diffusion control layer.
    • 一种半导体器件,包括至少形成在化合物半导体衬底上的p沟道场效应晶体管区域。 p沟道场效应晶体管区域包括未掺杂的缓冲层; 形成为与缓冲层接触的p型沟道层; 形成在沟道层中的p型源极区和p型漏极区彼此分离; 以及形成在沟道层上方且在源极区域和漏极区域之间的n型栅极区域。 缓冲层形成为具有包括带隙大于沟道层的空穴扩散控制层的多层结构,或仅包括孔扩散控制层的单层结构。
    • 3. 发明授权
    • Field effect transistor, semiconductor switch circuit, and communication apparatus
    • 场效应晶体管,半导体开关电路和通信装置
    • US08466494B2
    • 2013-06-18
    • US13396127
    • 2012-02-14
    • Shinichi Tamari
    • Shinichi Tamari
    • H01L29/778
    • H01L29/7783H01L29/0696H01L29/1066H01L29/205H01L29/42316H03K17/693H04B1/006
    • A field effect transistor includes a source wiring that is formed on a compound semiconductor substrate, and has a plurality of source electrodes arranged in parallel to each other at predetermined intervals, a drain wiring that is formed on the compound semiconductor substrate, and has a plurality of drain electrodes arranged in parallel to each other at predetermined intervals and alternatively disposed in a parallel direction of the plurality of source electrodes, a gate wiring that is formed on the compound semiconductor substrate, and has a portion located between the source electrode and the drain electrode which are adjacent to each other at least in the parallel direction, and a plurality of buried gate layers that is formed under the gate wiring in a region in which the gate wiring is formed, and is independently provided between each electrode of the source electrodes and the drain electrodes.
    • 场效应晶体管包括形成在化合物半导体衬底上的源极布线,并且具有以预定间隔彼此平行排列的多个源电极,形成在化合物半导体衬底上的多个源电极,并具有多个 的漏电极以预定间隔彼此平行布置,并且可选地设置在所述多个源电极的平行方向上;栅极布线,其形成在所述化合物半导体基板上,并且具有位于所述源电极和所述漏极 电极,其至少在平行方向上彼此相邻;以及多个掩埋栅极层,形成在栅极布线下方的栅极布线形成的区域中,并且独立地设置在源电极的每个电极之间 和漏电极。
    • 5. 发明申请
    • FIELD EFFECT TRANSISTOR, SEMICONDUCTOR SWITCH CIRCUIT, AND COMMUNICATION APPARATUS
    • 场效应晶体管,半导体开关电路和通信装置
    • US20120211802A1
    • 2012-08-23
    • US13396127
    • 2012-02-14
    • Shinichi Tamari
    • Shinichi Tamari
    • H01L29/778
    • H01L29/7783H01L29/0696H01L29/1066H01L29/205H01L29/42316H03K17/693H04B1/006
    • A field effect transistor includes a source wiring that is formed on a compound semiconductor substrate, and has a plurality of source electrodes arranged in parallel to each other at predetermined intervals, a drain wiring that is formed on the compound semiconductor substrate, and has a plurality of drain electrodes arranged in parallel to each other at predetermined intervals and alternatively disposed in a parallel direction of the plurality of source electrodes, a gate wiring that is formed on the compound semiconductor substrate, and has a portion located between the source electrode and the drain electrode which are adjacent to each other at least in the parallel direction, and a plurality of buried gate layers that is formed under the gate wiring in a region in which the gate wiring is formed, and is independently provided between each electrode of the source electrodes and the drain electrodes.
    • 场效应晶体管包括形成在化合物半导体衬底上的源极布线,并且具有以预定间隔彼此平行排列的多个源电极,形成在化合物半导体衬底上的多个源电极,并具有多个 的漏电极以预定间隔彼此平行布置,并且可选地设置在所述多个源电极的平行方向上;栅极布线,其形成在所述化合物半导体基板上,并且具有位于所述源电极和所述漏极 电极,其至少在平行方向上彼此相邻;以及多个掩埋栅极层,形成在栅极布线下方的栅极布线形成的区域中,并且独立地设置在源电极的每个电极之间 和漏电极。