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    • 1. 发明申请
    • Outer surface-inspecting method and outer surface-inspecting apparatus
    • 外表检查方法和外表面检查装置
    • US20060182333A1
    • 2006-08-17
    • US11302148
    • 2005-12-14
    • Shigeyuki Akimoto
    • Shigeyuki Akimoto
    • B07C5/00G06K9/00
    • G01N21/9501G01N21/956G01R31/311
    • A outer surface-inspecting method for judging whether a defect of a defective portion (27) extracted from an inspection area in an image (21A) of an object to be inspected through comparison with a template is acceptable or not, including: dividing the inspection area into a plurality of sections (22, 23, 24a, 24b, 25a, 25b, 28a, 28b, 28c) respectively having different acceptable levels (CONDITION 1-6); judging, when at least one extracted defective portion (27) spreads out over some of the sections (28a, 28b, 28c) respectively having different acceptable levels, whether the defect of the defective portion (27) is acceptable or not based on a strictest acceptable level (CONDITION 3) of all the acceptable levels (CONDITION 3-5) respectively set on the plurality of sections (28a, 28b, 28c) on which the defective portion (27) is located.
    • 一种外表面检查方法,用于通过与模板比较来判断从被检查对象的图像(21A)中的检查区域提取的缺陷部分(27)的缺陷是否可接受,包括:将 检查区域分成具有不同可接受水平的多个部分(22,23,24a,24b,25a,25b,28a,28b,28c)(条件1-6); 判断当至少一个提取的缺陷部分(27)分布在分别具有不同可接受水平的一些部分(28a,28b,28c)中时,是否可接受缺陷部分(27)的缺陷 在分别设置在缺陷部分(27)所在的多个部分(28a,28b,28c)上的所有可接受等级(条件3-5)的最严格可接受的水平(条件3)上。
    • 3. 发明授权
    • Outer surface-inspecting method and outer surface-inspecting apparatus
    • 外表检查方法和外表面检查装置
    • US07865011B2
    • 2011-01-04
    • US11302149
    • 2005-12-14
    • Shigeyuki Akimoto
    • Shigeyuki Akimoto
    • G06K9/00B07C5/00
    • G01R31/311G01N21/95607
    • A outer surface-inspecting method for judging whether a defect of a defective portion (27) extracted from an inspection area in an image (21A) of an object through comparison with a template is acceptable or not, comprising: dividing the inspection area into a plurality of sections (22, 23, 24a, 24b, 25a, 25b, 28a, 28b, 28c) respectively having different acceptable levels (CONDITION 1-5); preliminarily judging, when at least one extracted defective portion (27) spreads out over some of the sections (28a, 28b, 28c) respectively having different acceptable levels (CONDITION 3-5), whether defects of parts (27a, 27b, 27c) of the defective portion (27), each part (27a, 27b, 27c) being located on a different section (28a, 28b, 28c), are acceptable or not on a part to part basis according to the acceptable levels (CONDITION 3-5) of the sections (28a, 28b, 28c) on which the parts (27a, 27b, 27c) of the defective portion (27) are respectively located; and judging whether the defect of the defective portion (27) is acceptable or not based on the result of the preliminary judgment.
    • 一种外表面检查方法,用于通过与模板比较来判断从对象的图像(21A)中的检查区域提取的缺陷部分(27)的缺陷是否可接受,包括:将检查区域划分为 分别具有不同可接受水平的多个部分(22,23,24a,24b,25a,25b,28a,28b,28c)(条件1-5); 初步判断当至少一个提取出的缺陷部分(27)分布在分别具有不同可接受水平(条件3-5)的部分(28a,28b,28c)中的部分(27a,27b,27c)的缺陷时, 的缺陷部分(27)中,位于不同部分(28a,28b,28c)上的每个部分(27a,27b,27c)根据可接受的水平(部分3- (27a)的部分(27a,27b,27c)分别位于其上的部分(28a,28b,28c) 以及基于所述初步判断的结果来判断所述缺陷部分(27)的缺陷是否可接受。
    • 4. 发明授权
    • Outer surface-inspecting method, master patterns used therefor, and outer surface-inspecting apparatus equipped with such a master pattern
    • 外表面检查方法,使用的主图案和配备有这种主图案的外表面检查装置
    • US07822262B2
    • 2010-10-26
    • US10556916
    • 2004-05-17
    • Shigeyuki AkimotoTakashi Itoh
    • Shigeyuki AkimotoTakashi Itoh
    • G06K9/00
    • G01N21/95607G01N21/94G01N21/9501G06T7/001G06T2207/30148
    • The invention is to provide an outer surface-inspecting method, a master pattern and an outer surface-inspecting apparatus, which can eliminate severe positional alignment of the master pattern, avoid erroneous judgment taking acceptable products as unacceptable ones and suppress increase in number of standard pattern portions to be prepared as a master pattern. In the method and the apparatus, an outer surface of inspection areas 16a to 16i having repeated patterns are inspected through comparison with the predetermined master pattern. The inspection area is divided into a plurality of matrix-like view areas 16a to 16i. Mutually different standard pattern portions 17a to 17i are used depending upon different edge shapes of the divided inspection areas 16a to 16i contained in the inspection area, respectively. The present invention is suitable for inspecting the outer surface of a semiconductor chip such as a memory or a CCD (charge-coupled device).
    • 本发明提供一种外表面检查方法,主图形和外表面检查装置,其可以消除主图案的严重位置对准,避免错误判断将可接受的产品作为不可接受的产品,并抑制标准数量的增加 图案部分作为主图案准备。 在该方法和装置中,通过与预定的主模式进行比较来检查具有重复图案的检查区域16a至16i的外表面。 检查区域被分成多个矩阵状视图区域16a至16i。 根据检查区域中包含的划分的检查区域16a至16i的不同边缘形状,分别使用相互不同的标准图案部分17a至17i。 本发明适用于检查诸如存储器或CCD(电荷耦合器件)的半导体芯片的外表面。
    • 5. 发明申请
    • Outer surface-inspecting method, master patterns used therefor, and outer surface-inspecting apparatus equipped with such a master pattern
    • 外表面检查方法,使用的主图案和配备有这种主图案的外表面检查装置
    • US20070053579A1
    • 2007-03-08
    • US10556916
    • 2004-05-17
    • Shigeyuki AkimotoTakashi Itoh
    • Shigeyuki AkimotoTakashi Itoh
    • G06K9/00
    • G01N21/95607G01N21/94G01N21/9501G06T7/001G06T2207/30148
    • The invention is to provide an outer surface-inspecting method, a master pattern and an outer surface-inspecting apparatus, which can eliminate severe positional alignment of the master pattern, avoid erroneous judgment taking acceptable products as unacceptable ones and suppress increase in number of standard pattern portions to be prepared as a master pattern. In the method and the apparatus, an outer surface of inspection areas 16a to 16i having repeated patterns are inspected through comparison with the predetermined master pattern. The inspection area is divided into a plurality of matrix-like view areas 16a to 16i. Mutually different standard pattern portions 17a to 17i are used depending upon different edge shapes of the divided inspection areas 16a to 16i contained in the inspection area, respectively. The present invention is suitable for inspecting the outer surface of a semiconductor chip such as a memory or a CCD (charge-coupled device).
    • 本发明提供一种外表面检查方法,主图形和外表面检查装置,其可以消除主图案的严重位置对准,避免错误判断将可接受的产品作为不可接受的产品,并抑制标准数量的增加 图案部分作为主图案准备。 在该方法和装置中,通过与预定的主模式进行比较来检查具有重复图案的检查区域16a至16i的外表面。 检查区域被分成多个矩阵状视图区域16a至16i。 根据检查区域中包含的划分的检查区域16a至16i的不同边缘形状,分别使用相互不同的标准图案部分17a至17i。 本发明适用于检查诸如存储器或CCD(电荷耦合器件)的半导体芯片的外表面。
    • 7. 发明授权
    • Apparatus for measuring the magnitude of a load
    • 用于测量负载大小的装置
    • US4627297A
    • 1986-12-09
    • US754148
    • 1985-07-12
    • Shigeyuki Akimoto
    • Shigeyuki Akimoto
    • G01D5/243G01L3/10G01L3/12
    • G01D5/243G01L3/109G01L3/12
    • An apparatus for measuring the magnitude of a load connected to a drive shaft includes a pulse motor for intermittently driving the drive shaft into rotation in response to a motor drive signal of a changing level. A torsion bar rotatively displacable in dependence upon the magnitude of an applied load is connected between the motor drive shaft and a rotary shaft of an object constituting the load to be measured. Arranged on the side of the load is a sensor for sensing the rotational position of the rotary shaft via the torsion bar. The magnitude of the load is measured based on a difference in phase between the motor drive signal and a signal from the sensor indicative of the rotational position of the rotary shaft. The phase difference is measured by a counter when the motor is in the unloaded condition, and again when the load to be measured has been connected. The load torque is then calculated by using a prescribed equation involving the two measured phase differences.
    • 用于测量连接到驱动轴的负载的大小的装置包括脉冲电动机,用于响应于电平变化的电机驱动信号间歇地驱动驱动轴旋转。 根据所施加的负载的大小可旋转地移动的扭力杆连接在电动机驱动轴与构成待测负载的物体的旋转轴之间。 在负载侧布置有用于经由扭杆感测旋转轴的旋转位置的传感器。 基于马达驱动信号和来自传感器的指示旋转轴的旋转位置的信号之间的相位差来测量负载的大小。 当电机处于无负载状态时,相位差由计数器测量,并且当要测量的负载已经连接时,相位差也被测量。 然后通过使用涉及两个测量相位差的规定方程来计算负载转矩。
    • 8. 发明授权
    • Outer surface-inspecting method and outer surface-inspecting apparatus
    • 外表检查方法和外表面检查装置
    • US07718912B2
    • 2010-05-18
    • US11302148
    • 2005-12-14
    • Shigeyuki Akimoto
    • Shigeyuki Akimoto
    • B07C5/00
    • G01N21/9501G01N21/956G01R31/311
    • A outer surface-inspecting method for judging whether a defect of a defective portion (27) extracted from an inspection area in an image (21A) of an object to be inspected through comparison with a template is acceptable or not, including: dividing the inspection area into a plurality of sections (22, 23, 24a, 24b, 25a, 25b, 28a, 28b, 28c) respectively having different acceptable levels (CONDITION 1-6); judging, when at least one extracted defective portion (27) spreads out over some of the sections (28a, 28b, 28c) respectively having different acceptable levels, whether the defect of the defective portion (27) is acceptable or not based on a strictest acceptable level (CONDITION 3) of all the acceptable levels (CONDITION 3-5) respectively set on the plurality of sections (28a, 28b, 28c) on which the defective portion (27) is located.
    • 一种外表面检查方法,用于通过与模板比较来判断从被检查对象的图像(21A)中的检查区域提取的缺陷部分(27)的缺陷是否可接受,包括:分割检查 区域分别分别具有不同的可接受水平(条件1-6)的多个部分(22,23,24a,24b,25a,25b,28a,28b,28c); 判断当至少一个提取的缺陷部分(27)分布在分别具有不同可接受水平的一些部分(28a,28b,28c)上时,基于最严格的缺陷部分(27)的缺陷是否可接受 分别设置在缺陷部分(27)所在的多个部分(28a,28b,28c)上的所有可接受等级(条件3-5)的可接受等级(条件3)。
    • 9. 发明申请
    • Outer surface-inspecting method and outer surface-inspecting apparatus
    • 外表检查方法和外表面检查装置
    • US20060182334A1
    • 2006-08-17
    • US11302149
    • 2005-12-14
    • Shigeyuki Akimoto
    • Shigeyuki Akimoto
    • G06K9/00B07C5/00
    • G01R31/311G01N21/95607
    • A outer surface-inspecting method for judging whether a defect of a defective portion (27) extracted from an inspection area in an image (21A) of an object through comparison with a template is acceptable or not, comprising: dividing the inspection area into a plurality of sections (22, 23, 24a, 24b, 25a, 25b, 28a, 28b, 28c) respectively having different acceptable levels (CONDITION 1-5); preliminarily judging, when at least one extracted defective portion (27) spreads out over some of the sections (28a, 28b, 28c) respectively having different acceptable levels (CONDITION 3-5), whether defects of parts (27a, 27b, 27c) of the defective portion (27), each part (27a, 27b, 27c) being located on a different section (28a, 28b, 28c), are acceptable or not on a part to part basis according to the acceptable levels (CONDITION 3-5) of the sections (28a, 28b, 28c) on which the parts (27a, 27b, 27c) of the defective portion (27) are respectively located; and judging whether the defect of the defective portion (27) is acceptable or not based on the result of the preliminary judgment.
    • 一种外表面检查方法,用于通过与模板比较来判断从对象的图像(21A)中的检查区域提取的缺陷部分(27)的缺陷是否可接受,包括:将检查区域分成 分别具有不同可接受水平的多个部分(22,23,24a,24b,25a,25b,28a,28b,28c)(条件1-5)。 初步判断当至少一个提取出的缺陷部分(27)分别在分别具有不同可接受水平(条件3-5)的一些部分(28a,28b,28c)中扩展时,部件(27a, 27a,27b,28c)位于不同部分(28a,28b,28c)上的每个部分(27a,27b,27c)都是可接受的 根据缺陷部分(27)的部分(27a,27b,27c)分别在其上的部分(28a,28b,28c)的可接受水平(条件3-5) 位于; 以及基于所述初步判断的结果来判断所述缺陷部分(27)的缺陷是否可接受。
    • 10. 发明授权
    • Position detecting apparatus which uses a continuously moving light spot
    • 使用连续移动的光点的位置检测装置
    • US5594242A
    • 1997-01-14
    • US296936
    • 1994-08-31
    • Yoshikazu KonishiShigeyuki Akimoto
    • Yoshikazu KonishiShigeyuki Akimoto
    • G02B7/32G01J1/20
    • G02B7/32
    • A position detecting apparatus projects a light beam to form a light spot within a certain range on an object under test by means of a light source, collimator lens, pinhole plate, half-mirror, and objective lens included in it. The apparatus further includes a deflecting prism which deflects the light spot relative to the object continuously so that the light spot has a circular or ellipsoidal locus of movement on the object, and a first and second light sensors which receive a reflected light beam from the object at positions short of and ahead of the convergent position of the reflected light beam. The apparatus determines that the object is located at the reference position if the outputs of the first and second light sensors thin a certain period of spot scanning are substantially equal.
    • 位置检测装置通过其中包括的光源,准直透镜,针孔板,半透镜和物镜,在被测物体上投射光束以在一定范围内形成光斑。 该装置还包括偏转棱镜,其使光点相对于物体连续地偏转,使得光点在物体上具有圆形或椭圆形的运动轨迹;以及第一和第二光传感器,其接收来自物体的反射光束 在反射光束的收敛位置之前和之前的位置处。 如果第一和第二光传感器的输出在一定时间的点扫描中变薄,则装置确定对象位于参考位置。