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    • 4. 发明申请
    • Waveguide type optical device and manufacturing method thereof
    • 波导型光学器件及其制造方法
    • US20060078245A1
    • 2006-04-13
    • US11237900
    • 2005-09-29
    • Shigeru Yoneda
    • Shigeru Yoneda
    • G02B6/12
    • G02B6/1203
    • An array waveguide diffraction grating 201 as waveguide type optical device comprises a planer lightwave circuit 203 with an optical waveguide layer 211 formed on a silicon substrate 212 and having a predetermined thickness h0, a first compensation substrate 204 bonded to the side of the optical waveguide layer 211 and having a thickness h1 and a second compensation substrate 205 formed on the silicon substrate 212 and having a thickness h4. The linear expansion coefficients α1 and α4 of the two compensation substrates 204 and 205 are set to be greater than that of the optical waveguide element 203, and highly rigid adhesives are used as a first and a second adhesive 214 and 215. It is thus possible to have the contraction of the optical waveguide element 203 due to a temperature change increased with the first and second substrates, thus permitting the center frequency setting to a desired value in a predetermined temperature range. Similar effects are obtainable by merely providing a support substrate on the substrate side of the optical waveguide element 203.
    • 作为波导型光学器件的阵列波导衍射光栅201包括平面光波导203,其具有形成在硅基板212上并且具有预定厚度h O 0的光波导层211,第一补偿基板204接合 到达光波导层211的一侧,并且具有形成在硅衬底212上并且具有厚度hλ4的厚度h 1 1和第二补偿衬底205。 两个补偿基板204和205的线性膨胀系数α1和α2 4被设置为大于光波导元件203的线性膨胀系数,并且高刚性粘合剂 用作第一和第二粘合剂214和215。 因此,由于随着第一和第二基板的温度变化而使光波导元件203的收缩成为可能,从而允许中心频率设定在预定温度范围内的期望值。 通过仅在光波导元件203的基板侧设置支撑基板,可以获得类似的效果。
    • 10. 发明授权
    • Temperature-independent arrayed waveguide grating device
    • 温度独立阵列波导光栅器件
    • US06873761B2
    • 2005-03-29
    • US09751086
    • 2000-12-29
    • Shigeru Yoneda
    • Shigeru Yoneda
    • G02B6/12G02B6/10G02B6/293G02B6/34
    • G02B6/12011G02B6/10G02B6/12028
    • In an arrayed waveguide grating, a wedge-shaped groove formed in an arrayed waveguide section or a silica-based waveguide section in a periphery of the groove is modified in either one of the procedures below or in a particular combination thereof to suppress spreading of light in the groove to thereby reduce the excess loss due to addition of the groove. The material filled in the groove is a photosensitive material having a negative refractive index temperature coefficient. Using the photosensitivity, refractive index difference is provided in the groove to form optical waveguides in a horizontal direction or in vertical and horizontal directions. The material filled in the groove has a negative refractive index temperature coefficient to minimize a spreading angle of light incident to the groove. Width of each silica-based waveguide is enlarged before and after the groove to decrease the spreading angle of light incident to the groove. This method reduces the excess loss of the arrayed waveguide grating in which a wavelength characteristic is kept unchanged with respect to a change in ambient temperature.
    • 在阵列波导光栅中,形成在阵列波导部分中的楔形凹槽或凹槽周边的基于二氧化硅的波导部分在以下任一步骤或其特定组合中进行修改以抑制光的扩散 从而减少由于添加槽而引起的过多损失。 填充在凹槽中的材料是具有负折射率温度系数的感光材料。 使用感光度,在凹槽中提供折射率差,以在水平方向或垂直和水平方向上形成光波导。 填充在凹槽中的材料具有负折射率温度系数,以使入射到凹槽的光的扩展角度最小化。 每个二氧化硅基波导的宽度在凹槽之前和之后被扩大,以减小入射到凹槽的光的扩展角。 该方法减少了阵列波导光栅的过剩损耗,其中波长特性相对于环境温度的变化保持不变。