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1. 发明申请

US20110137583A1 METHOD AND APPARATUS FOR ENHANCING IN-SITU GAS FLOW MEASUREMENT PERFORMANCE 有权
公开(公告)号：US20110137583A1
公开(公告)日：2011-06-09
申请号：US12634629
申请日：2009-12-09
申请人： Sherk CHUNG , James MacAllen CHALMERS , Jialing CHEN , Yi WANG , Paul TRAN , Sophia Leonidovna SHTILMAN , Joseph R. MONKOWSKI
发明人： Sherk CHUNG , James MacAllen CHALMERS , Jialing CHEN , Yi WANG , Paul TRAN , Sophia Leonidovna SHTILMAN , Joseph R. MONKOWSKI
IPC分类号： G01F1/34
CPC分类号： G01F1/34 , G01F15/046 , Y10T137/0324
摘要： An in-situ gas flow measurement controller measures the temperature and rate of pressure drop upstream from a flow control device (FCD). The controller samples the pressure and temperature data and applies the equivalent of a decimating filter to the data to produce filtered data at a slower sampling rate. The controller derives timestamps by counting ticks from the sampling clock of the A/D converter that is sampling the pressure at regular intervals to ensure the timestamps associated with the pressure samples are accurate and do not contain jitter that is associated with software clocks. The controller additionally normalizes the temperature reading to account for power supply fluctuations, filters out noise from the pressure and temperature readings, and excludes data during periods of instability. It calculates the gas flow rate accounting for possible non-linearities in the pressure measurements, and provides the computed gas flow measurement via one of many possible interfaces.

2. 发明申请

US20110137582A1 METHOD AND APPARATUS FOR ENHANCING IN-SITU GAS FLOW MEASUREMENT PERFORMANCE 有权
公开(公告)号：US20110137582A1
公开(公告)日：2011-06-09
申请号：US12634593
申请日：2009-12-09
申请人： Sherk Chung , James MacAllen Chalmers , Jialing Chen , Yi Wang , Paul Tran , Sophia Leonidovna Shtilman , Joseph R. Monkowski
发明人： Sherk Chung , James MacAllen Chalmers , Jialing Chen , Yi Wang , Paul Tran , Sophia Leonidovna Shtilman , Joseph R. Monkowski
IPC分类号： G01F1/34
CPC分类号： G01F15/046 , G01F1/34 , Y10T137/0324
摘要： An in-situ gas flow measurement controller measures the temperature and rate of pressure drop upstream from a flow control device (FCD). The controller samples the pressure and temperature data and applies the equivalent of a decimating filter to the data to produce filtered data at a slower sampling rate. The controller derives timestamps by counting ticks from the sampling clock of the A/D converter that is sampling the pressure at regular intervals to ensure the timestamps associated with the pressure samples are accurate and do not contain jitter that is associated with software clocks. The controller additionally normalizes the temperature reading to account for power supply fluctuations, filters out noise from the pressure and temperature readings, and excludes data during periods of instability. It calculates the gas flow rate accounting for possible non-linearities in the pressure measurements, and provides the computed gas flow measurement via one of many possible interfaces.

3. 发明授权

US07937232B1 Data timestamp management 有权
标题翻译：数据时间戳管理
公开(公告)号：US07937232B1
公开(公告)日：2011-05-03
申请号：US11821810
申请日：2007-06-25
申请人： Paxton Ming Kai Chow , Vera Alexandrova Snowball , Barton George Lane, III , Sophia Leonidovna Shtilman , Chalee Asavathiratham , Abhijit Majumdar , Sherk Chung , Yi Wang , Paul Tran
发明人： Paxton Ming Kai Chow , Vera Alexandrova Snowball , Barton George Lane, III , Sophia Leonidovna Shtilman , Chalee Asavathiratham , Abhijit Majumdar , Sherk Chung , Yi Wang , Paul Tran
IPC分类号： G01R29/02
CPC分类号： G05B21/02
摘要： Embodiments of the present invention relate to managing timestamps associated with received data. According to one embodiment, data is collected from a device that generates data at a specified rate, but which lacks a built-in clock. An accurate timestamp is assigned to the data by first taking an absolute timestamp from a reference clock, and then adding a calculated amount of time to each subsequent data point based on an estimate of the sampling frequency of the device. As the generated timestamp drifts from the actual reference clock time, the sampling frequency is re-estimated based on the amount of detected drift.
摘要翻译：本发明的实施例涉及管理与接收到的数据相关联的时间戳。根据一个实施例，从以指定速率产生数据但是缺少内置时钟的设备收集数据。通过首先从参考时钟获取绝对时间戳，然后基于设备的采样频率的估计，将计算出的时间量加到每个后续数据点，从而将准确的时间戳分配给数据。随着生成的时间戳从实际参考时钟时间漂移，基于检测到的漂移量重新估计采样频率。

4. 发明申请

US20080253377A1 System and method for controlling process end-point utilizing legacy end-point system 有权
标题翻译：使用传统端点系统控制过程终点的系统和方法
公开(公告)号：US20080253377A1
公开(公告)日：2008-10-16
申请号：US11787654
申请日：2007-04-16
申请人： Sherk Chung , Tomislav Lozic , Joseph Raymond Monkowski , Geoffrey Rodney Wong
发明人： Sherk Chung , Tomislav Lozic , Joseph Raymond Monkowski , Geoffrey Rodney Wong
IPC分类号： H04L12/28
CPC分类号： H01J37/32963 , H01J37/32935 , H01L22/26
摘要： Embodiments in accordance with the present invention allow a second end-point determination (EPD) system to actively control the end-pointing of a semiconductor process chamber, by leveraging a legacy EPD system that is already integrated with the chamber. In one embodiment, the second EPD system controls a shutter that regulates the amount of light transmitted between a plasma light source and an optical emission spectroscopy (OES) sensor of the legacy OES EPD system. In this embodiment, the legacy OES EPD system is pre-configured to call end-point when an artificial end-point condition occurs, i.e. the intensity of light falls below a pre-set threshold. When the second EPD system determines an actual end-point condition has been reached, it closes the shutter which, causes the light intensity being read by the OES sensor to fall below the pre-set threshold. This in turn triggers an end-point command to the chamber from the legacy OES EPD system.
摘要翻译：根据本发明的实施例允许第二端点确定（EPD）系统通过利用已经与腔室集成的传统EPD系统来主动地控制半导体处理室的端点指向。在一个实施例中，第二EPD系统控制快门，其调节在等离子体光源和传统OES EPD系统的光发射光谱（OES）传感器之间传输的光量。在本实施例中，传统OES EPD系统预先配置成在出现人造终点条件时即光强度低于预定阈值时调用端点。当第二EPD系统确定已经达到实际的终点条件时，它关闭快门，这导致由OES传感器读取的光强度低于预设阈值。这反过来触发了从传统OES EPD系统到终端的命令。

5. 发明授权

US08271211B2 Method and apparatus for enhancing in-situ gas flow measurement performance 有权
标题翻译：用于提高原位气流测量性能的方法和装置
公开(公告)号：US08271211B2
公开(公告)日：2012-09-18
申请号：US12634593
申请日：2009-12-09
申请人： Sherk Chung , James MacAllen Chalmers , Jialing Chen , Yi Wang , Paul Tran , Sophia Leonidovna Shtilman , Joseph R. Monkowski
发明人： Sherk Chung , James MacAllen Chalmers , Jialing Chen , Yi Wang , Paul Tran , Sophia Leonidovna Shtilman , Joseph R. Monkowski
IPC分类号： G01F1/34
CPC分类号： G01F15/046 , G01F1/34 , Y10T137/0324
摘要： An in-situ gas flow measurement controller measures the temperature and rate of pressure drop upstream from a flow control device (FCD). The controller samples the pressure and temperature data and applies the equivalent of a decimating filter to the data to produce filtered data at a slower sampling rate. The controller derives timestamps by counting ticks from the sampling clock of the A/D converter that is sampling the pressure at regular intervals to ensure the timestamps associated with the pressure samples are accurate and do not contain jitter that is associated with software clocks. The controller additionally normalizes the temperature reading to account for power supply fluctuations, filters out noise from the pressure and temperature readings, and excludes data during periods of instability. It calculates the gas flow rate accounting for possible non-linearities in the pressure measurements, and provides the computed gas flow measurement via one of many possible interfaces.
摘要翻译：原位气体流量测量控制器测量流量控制装置（FCD）上游的压降的温度和速率。控制器对压力和温度数据进行采样，并将等效的抽取滤波器应用于数据，以较慢的采样速率产生滤波数据。控制器通过对A / D转换器的采样时钟进行计数来计算时间戳，A / D转换器采样时间间隔采样压力，以确保与压力样本相关联的时间戳准确，并且不包含与软件时钟相关的抖动。控制器另外对温度读数进行标准化以考虑电源波动，从压力和温度读数滤除噪声，并在不稳定期间排除数据。它计算气体流量，考虑压力测量中可能的非线性，并通过许多可能的接口之一提供计算的气体流量测量。

6. 发明授权

US07590498B1 System and method for vacuum chamber leak detection 有权
标题翻译：真空室泄漏检测系统及方法
公开(公告)号：US07590498B1
公开(公告)日：2009-09-15
申请号：US11948907
申请日：2007-11-30
申请人： Sherk Chung , Mukund Chakravarthy Venkatesh , Paxton Ming Kai Chow , Jiuyi Cheng , Paul Tran , Joseph Raymond Monkowski
发明人： Sherk Chung , Mukund Chakravarthy Venkatesh , Paxton Ming Kai Chow , Jiuyi Cheng , Paul Tran , Joseph Raymond Monkowski
IPC分类号： G01F17/00
CPC分类号： G01M3/38
摘要： Leaks in a processing chamber, including “virtual leaks” resulting from outgassing of material present within the chamber, may be detected utilizing an optical emission spectroscopy (OES) sensor configured to monitor light emitted from plasma of a sample from the chamber. According to certain embodiments, gas introduced into the chamber by the leak may be detected directly on the basis of its optical spectrum. Alternatively, gas introduced by the leak may be detected indirectly, based upon an optical spectrum of a material resulting from reaction of the gas attributable to the leak. According to one embodiment, data from the OES sensor is received by a processor that is configured to compute a leak detection index. The value of the leak detection index is compared against a threshold to determine if a leak is detected. If the value of the index crosses the threshold, a notification of the existence of a leak is sent.
摘要翻译：可以利用配置成监测来自腔室的样品的等离子体发射的光的光发射光谱（OES）传感器来检测在处理室中的泄漏，包括由室内存在的物质的放气引起的“虚泄”。根据某些实施例，可以基于其光谱直接检测通过泄漏引入到腔室中的气体。或者，可以基于由归因于泄漏的气体的反应产生的材料的光谱，间接地检测由泄漏引入的气体。根据一个实施例，来自OES传感器的数据被配置为计算泄漏检测指数的处理器接收。将泄漏检测索引的值与阈值进行比较，以确定是否检测到泄漏。如果索引的值超过阈值，则发送泄漏存在的通知。

7. 发明授权

US08271210B2 Method and apparatus for enhancing in-situ gas flow measurement performance 有权
公开(公告)号：US08271210B2
公开(公告)日：2012-09-18
申请号：US12634568
申请日：2009-12-09
申请人： Sherk Chung , James MacAllen Chalmers , Jialing Chen , Yi Wang , Paul Tran , Sophia Leonidovna Shtilman , Joseph R. Monkowski
发明人： Sherk Chung , James MacAllen Chalmers , Jialing Chen , Yi Wang , Paul Tran , Sophia Leonidovna Shtilman , Joseph R. Monkowski
IPC分类号： G06F1/34
CPC分类号： G01F15/061 , G01F1/88 , G01F15/04 , G01F15/043 , Y10T137/0324
摘要： An in-situ gas flow measurement controller measures the temperature and rate of pressure drop upstream from a flow control device (FCD). The controller samples the pressure and temperature data and applies the equivalent of a decimating filter to the data to produce filtered data at a slower sampling rate. The controller derives timestamps by counting ticks from the sampling clock of the A/D converter that is sampling the pressure at regular intervals to ensure the timestamps associated with the pressure samples are accurate and do not contain jitter that is associated with software clocks. The controller additionally normalizes the temperature reading to account for power supply fluctuations, filters out noise from the pressure and temperature readings, and excludes data during periods of instability. It calculates the gas flow rate accounting for possible non-linearities in the pressure measurements, and provides the computed gas flow measurement via one of many possible interfaces.

8. 发明授权

US07299024B2 Compensation for frequency adjustment in mobile communication-positioning device with shared oscillator 有权
标题翻译：具有共享振荡器的移动通信定位设备的频率调整补偿
公开(公告)号：US07299024B2
公开(公告)日：2007-11-20
申请号：US10718821
申请日：2003-11-21
申请人： L. Scott Bloebaum , Piyush Bharti , Sherk Chung , Benjamin Van Roy , Wallace Mann
发明人： L. Scott Bloebaum , Piyush Bharti , Sherk Chung , Benjamin Van Roy , Wallace Mann
IPC分类号： H04B1/06
CPC分类号： G01S19/29 , G01S19/235 , G01S19/37 , H03J1/0008 , H03J7/04 , H04B1/3805
摘要： In a mobile communication device, a method for compensating for a frequency adjustment in an oscillator shared between a communication circuit and a positioning signal receiver is provided. In one embodiment, a method for determining the operating frequency of an oscillator detects a beginning time point of a reference signal received by the mobile communication device and enables a counter to count in step with a clock signal derived from the oscillator. When an ending time point of the reference signal is received by the mobile communication device, the count is stopped, and the frequency of the oscillator is determined based on the count in the counter and an expected time that elapsed between the beginning time point and the ending time point.
摘要翻译：在移动通信装置中，提供了用于补偿在通信电路和定位信号接收器之间共享的振荡器中的频率调整的方法。在一个实施例中，用于确定振荡器的工作频率的方法检测由移动通信设备接收到的参考信号的开始时间点，并使计数器能够与从振荡器导出的时钟信号同步进行计数。当移动通信装置接收到参考信号的结束时间点时，停止计数，并且基于计数器中的计数和从开始时间点和开始时间之间经过的预期时间来确定振荡器的频率结束时间点。

9. 发明授权

US08265888B2 Method and apparatus for enhancing in-situ gas flow measurement performance 有权
公开(公告)号：US08265888B2
公开(公告)日：2012-09-11
申请号：US12634629
申请日：2009-12-09
申请人： Sherk Chung , James MacAllen Chalmers , Jialing Chen , Yi Wang , Paul Tran , Sophia Leonidovna Shtilman , Joseph R. Monkowski
发明人： Sherk Chung , James MacAllen Chalmers , Jialing Chen , Yi Wang , Paul Tran , Sophia Leonidovna Shtilman , Joseph R. Monkowski
IPC分类号： G01F1/34
CPC分类号： G01F1/34 , G01F15/046 , Y10T137/0324
摘要： An in-situ gas flow measurement controller measures the temperature and rate of pressure drop upstream from a flow control device (FCD). The controller samples the pressure and temperature data and applies the equivalent of a decimating filter to the data to produce filtered data at a slower sampling rate. The controller derives timestamps by counting ticks from the sampling clock of the A/D converter that is sampling the pressure at regular intervals to ensure the timestamps associated with the pressure samples are accurate and do not contain jitter that is associated with software clocks. The controller additionally normalizes the temperature reading to account for power supply fluctuations, filters out noise from the pressure and temperature readings, and excludes data during periods of instability. It calculates the gas flow rate accounting for possible non-linearities in the pressure measurements, and provides the computed gas flow measurement via one of many possible interfaces.

10. 发明申请

US20110137581A1 METHOD AND APPARATUS FOR ENHANCING IN-SITU GAS FLOW MEASUREMENT PERFORMANCE 有权
标题翻译：用于增加现场气体流量测量性能的方法和装置
公开(公告)号：US20110137581A1
公开(公告)日：2011-06-09
申请号：US12634568
申请日：2009-12-09
申请人： Sherk CHUNG , James MacAllen Chalmers , Jialing Chen , Yi Wang , Paul Tran , Sophia Leonidovna Shtilman , Joseph R. Monkowski
发明人： Sherk CHUNG , James MacAllen Chalmers , Jialing Chen , Yi Wang , Paul Tran , Sophia Leonidovna Shtilman , Joseph R. Monkowski
IPC分类号： G01F1/34
CPC分类号： G01F15/061 , G01F1/88 , G01F15/04 , G01F15/043 , Y10T137/0324
摘要： An in-situ gas flow measurement controller measures the temperature and rate of pressure drop upstream from a flow control device (FCD). The controller samples the pressure and temperature data and applies the equivalent of a decimating filter to the data to produce filtered data at a slower sampling rate. The controller derives timestamps by counting ticks from the sampling clock of the A/D converter that is sampling the pressure at regular intervals to ensure the timestamps associated with the pressure samples are accurate and do not contain jitter that is associated with software clocks. The controller additionally normalizes the temperature reading to account for power supply fluctuations, filters out noise from the pressure and temperature readings, and excludes data during periods of instability. It calculates the gas flow rate accounting for possible non-linearities in the pressure measurements, and provides the computed gas flow measurement via one of many possible interfaces.
摘要翻译：原位气体流量测量控制器测量流量控制装置（FCD）上游的压降的温度和速率。控制器对压力和温度数据进行采样，并将等效的抽取滤波器应用于数据，以较慢的采样速率产生滤波数据。控制器通过对A / D转换器的采样时钟进行计数来计算时间戳，A / D转换器采样时间间隔采样压力，以确保与压力样本相关联的时间戳准确，并且不包含与软件时钟相关的抖动。控制器另外对温度读数进行标准化以考虑电源波动，从压力和温度读数滤除噪声，并在不稳定期间排除数据。它计算气体流量，考虑压力测量中可能的非线性，并通过许多可能的接口之一提供计算的气体流量测量。

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