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1. 发明授权

US07964476B2 Method and apparatus for the laser scribing of ultra lightweight semiconductor devices 失效
标题翻译：超轻型半导体器件的激光划线方法和装置
公开(公告)号：US07964476B2
公开(公告)日：2011-06-21
申请号：US12053712
申请日：2008-03-24
申请人： Shengzhong Liu , Ginger Pietka , Kevin Beernink , Arindam Banerjee , Chi Yang , Subhendu Guha
发明人： Shengzhong Liu , Ginger Pietka , Kevin Beernink , Arindam Banerjee , Chi Yang , Subhendu Guha
IPC分类号： H01L21/00
CPC分类号： H01L21/268 , H01L31/046 , H01L31/0465 , H01L31/1876 , Y02E10/50 , Y02P70/521
摘要： A system for the laser scribing of semiconductor devices includes a laser light source operable to selectably deliver laser illumination at a first wavelength and at a second wavelength which is shorter than the first wavelength. The system further includes a support for a semiconductor device and an optical system which is operative to direct the laser illumination from the light source to the semiconductor device. The optical system includes optical elements which are compatible with the laser illumination of the first wavelength and the laser illumination of the second wavelength. In specific instances, the first wavelength is long wavelength illumination such as illumination of at least 1000 nanometers, and the second wavelength is short wavelength illumination which in specific instances is 300 nanometers or shorter. By the use of the differing wavelengths, specific layers of the semiconductor device may be scribed without damage to subjacent layers. Also disclosed are specific scribing processes.
摘要翻译：用于半导体器件的激光刻划的系统包括可操作以可选择地提供比第一波长短的第一波长和第二波长的激光照明的激光光源。该系统还包括用于半导体器件和光学系统的支撑件，该系统可操作以将激光照明从光源引导到半导体器件。光学系统包括与第一波长的激光照射和第二波长的激光照射兼容的光学元件。在具体情况下，第一波长是诸如至少1000纳米的照明的长波长照明，而第二波长是在特定情况下为300纳米或更短的短波长照明。通过使用不同的波长，半导体器件的特定层可以被划刻而不损坏下层。还公开了具体的划线工艺。

2. 发明申请

US20100200409A1 SOLUTION DEPOSITION AND METHOD WITH SUBSTRATE MAKING 审中-公开
标题翻译：解决方案沉积和方法与基板制造
公开(公告)号：US20100200409A1
公开(公告)日：2010-08-12
申请号：US12369054
申请日：2009-02-11
申请人： Shengzhong Liu , Chaolan Hu , Yanhua Zhou , Kais Younan , Bud Dotter, II , Vincent Cannella , Arindam Banerjee , Jeffrey Yang , Subhendu Guha
发明人： Shengzhong Liu , Chaolan Hu , Yanhua Zhou , Kais Younan , Bud Dotter, II , Vincent Cannella , Arindam Banerjee , Jeffrey Yang , Subhendu Guha
IPC分类号： B32B9/00 , C25D5/02 , C25D17/00
CPC分类号： C25D5/022 , C25D5/003 , C25D9/08 , C25D17/00 , C25D21/02 , C25D21/08
摘要： A metal and oxygen material such as a transparent electrically conductive oxide material is electro deposited onto a substrate in a solution deposition process. Process parameters are controlled so as to result in the deposition of a high quality layer of material which is suitable for use in a back reflector structure of a high efficiency photovoltaic device. The deposition may be carried out in conjunction with a masking member which operates to restrict the deposition of the metal and oxygen material to specific portions of the substrate. In particular instances the deposition may be implemented in a continuous, roll-to-roll process. Further disclosed are semiconductor devices and components of semiconductor devices made by the present process, as well as apparatus for carrying out the process.
摘要翻译：在溶液沉积工艺中，将诸如透明导电氧化物材料的金属和氧材料电沉积到衬底上。控制工艺参数以便沉积适合用于高效光伏器件的背反射器结构的高质量材料层。沉积可以与掩模构件一起进行，掩模构件用于限制金属和氧气材料沉积到衬底的特定部分。在特定情况下，沉积可以以连续的卷对卷方式实施。还公开了通过本方法制造的半导体器件和半导体器件的部件以及用于执行该过程的装置。

3. 发明申请

US20100200060A1 SOLUTION BASED NON-VACUUM METHOD AND APPARATUS FOR PREPARING OXIDE MATERIALS 审中-公开
标题翻译：解决方案基于非真空方法和制备氧化物材料的方法
公开(公告)号：US20100200060A1
公开(公告)日：2010-08-12
申请号：US12709119
申请日：2010-02-19
申请人： Shengzhong LIU
发明人： Shengzhong LIU
IPC分类号： H01L31/0216 , C25D5/00 , C25D17/00
CPC分类号： C25D5/10 , C25D3/46 , C25D5/022 , C25D5/20 , C25D5/36 , C25D7/0614 , C25D9/08 , C25D21/10 , H01L31/022483 , H01L31/1884 , Y02E10/50
摘要： A high quality, highly adherent layer of a metal and oxygen material such as a transparent electrically conductive oxide material is electro deposited onto a substrate in a solution deposition process. The substrate is activated prior to the electro deposition of the metal and oxygen material thereonto by contacting it with a multidentate activating agent which promotes the adhesion of the metal and oxygen material to the substrate. Use of the activation agent eliminates the need to pre-deposit a “seed” layer of the metal and oxygen material onto the substrate by a vacuum deposition process. Process parameters are controlled so as to result in the deposition of a high quality layer of material which is suitable for use in a back reflector structure of a high efficiency photovoltaic device In particular instances the activation method may be implemented in a continuous, roll-to-roll process. Further disclosed are semiconductor devices and components of semiconductor devices made by the present process, as well as apparatus for carrying out the process.
摘要翻译：金属和氧材料（例如透明导电氧化物材料）的高质量，高粘附层在溶液沉积过程中电沉积到基底上。在将金属和氧气材料电沉积到其上之前，通过使基底与多齿激活剂接触来激活基底，所述多齿激活剂促进金属和氧气材料粘附到基底上。使用活化剂消除了通过真空沉积工艺将金属和氧材料的“种子”层预沉积到衬底上的需要。控制工艺参数以便导致适合用于高效率光伏器件的后反射器结构的高质量材料层的沉积。特别地，激活方法可以以连续的，滚动的滚动过程。还公开了通过本方法制造的半导体器件和半导体器件的部件以及用于执行该过程的装置。

4. 发明申请

US20100059098A1 MONOLITHIC PHOTOVOLTAIC MODULE 失效
标题翻译：单声道光伏模块
公开(公告)号：US20100059098A1
公开(公告)日：2010-03-11
申请号：US12207014
申请日：2008-09-09
申请人： Kevin Beernink , Shengzhong Liu
发明人： Kevin Beernink , Shengzhong Liu
IPC分类号： H01L31/042 , B05D5/12
CPC分类号： H01L31/0392 , H01L31/022425 , H01L31/03926 , H01L31/046 , H01L31/075 , H01L31/18 , H01L31/1892 , Y02E10/548
摘要： A photovoltaic module comprised of a plurality of series connected photovoltaic cells disposed upon a substrate is fabricated utilizing thin film device techniques. A body of photovoltaic stock material comprised of an electrically conductive substrate having at least a bottom electrode layer, a body of photovoltaic material, and a top electrode layer supported thereupon is patterned so as to define a number of individual, electrically isolated photovoltaic cells and a number of electrically isolated connection zones. The connection zones are patterned to each include a portion of the bottom electrode material and are configured so that the bottom electrode material in each segment of the connection zone is exposed, and is in electrical communication with the bottom electrode portion of a particular cell. A current collecting grid structure is disposed on the top electrode of each cell and is placed in electrical communication with the bottom electrode of an adjoining cell via the electrode layer in an appropriate connection zone. In this manner, a series interconnection between the cells is established. Electrical terminals may be affixed to the module, and the finished module may be encapsulated in a body of protective materials. The substrate used in the manufacture of the module may comprise a thin, flexible layer of polymeric material and the disclosed techniques may be utilized to fabricate ultra lightweight photovoltaic modules. Also disclosed are specific module structures.
摘要翻译：使用薄膜器件技术制造由多个串联连接的光伏电池组成的光伏模块，该太阳能电池设置在衬底上。由至少具有底电极层，光电材料体和支撑在其上的顶电极层的导电基底构成的光电储备材料体被图案化以便限定多个单独的电隔离的光伏电池和电隔离连接区数。连接区域被图案化成每个包括底部电极材料的一部分，并且被构造成使得连接区域的每个区段中的底部电极材料被暴露，并且与特定电池的底部电极部分电连通。电流收集栅格结构设置在每个单元的顶部电极上，并通过电极层在适当的连接区域中与相邻单元的底部电极电连通。以这种方式，建立了电池之间的串联互连。电气端子可以固定到模块，并且完成的模块可以被封装在保护材料的主体中。用于制造模块的基板可以包括薄的柔性聚合材料层，并且所公开的技术可以用于制造超轻型光伏模块。还公开了具体的模块结构。

5. 发明申请

US20060205184A1 Partially transparent photovoltaic modules 审中-公开
公开(公告)号：US20060205184A1
公开(公告)日：2006-09-14
申请号：US11412739
申请日：2006-04-27
申请人： Robert Oswald , Shengzhong Liu
发明人： Robert Oswald , Shengzhong Liu
IPC分类号： H01L21/00
CPC分类号： H01L31/075 , B23K26/364 , B23K26/40 , B23K2103/172 , H01L31/022425 , H01L31/046 , H01L31/0463 , H01L31/0468 , Y02E10/548
摘要： A photovoltaic cell comprising a supporting substrate, a front contact layer on the substrate, a layer or layers of semiconductor material and a back contact layer comprising a metal, the back contact having areas without metal thereby permitting the passage of light through the cell.

6. 发明申请

US20050148109A1 Partially transparent photovoltaic modules 审中-公开
标题翻译：部分透明的光伏组件
公开(公告)号：US20050148109A1
公开(公告)日：2005-07-07
申请号：US11069220
申请日：2005-02-28
申请人： Robert Oswald , Shengzhong Liu
发明人： Robert Oswald , Shengzhong Liu
IPC分类号： H01L21/31 , H01L29/40
CPC分类号： H01L31/075 , B23K26/364 , B23K26/40 , B23K2103/172 , H01L31/022425 , H01L31/046 , H01L31/0463 , H01L31/0468 , Y02E10/548
摘要： A photovoltaic cell comprising a supporting substrate, a front contact layer on the substrate, a layer or layers of semiconductor material and a back contact layer comprising a metal, the back contact having areas without metal thereby permitting the passage of light through the cell.
摘要翻译：一种光伏电池，包括支撑衬底，衬底上的前接触层，半导体材料的一层或多层和包含金属的背接触层，所述后接触具有无金属的区域，从而允许光通过电池。

7. 发明授权

US5516500A Formation of diamond materials by rapid-heating and rapid-quenching of carbon-containing materials 失效
标题翻译：通过快速加热和快速淬火含碳材料形成金刚石材料
公开(公告)号：US5516500A
公开(公告)日：1996-05-14
申请号：US287726
申请日：1994-08-09
申请人： Shengzhong Liu , Pravin Mistry
发明人： Shengzhong Liu , Pravin Mistry
IPC分类号： C01B31/06 , C30B1/00 , C30B1/02 , C30B29/04
CPC分类号： C01B31/06 , C30B1/00 , C30B29/04
摘要： Diamond materials are formed by sandwiching a carbon-containing material in a gap between two electrodes. A high-amperage electric current is applied between the two electrode plates so as cause rapid-heating of the carbon-containing material. The current is sufficient to cause heating of the carbon-containing material at a rate of at least approximately 5,000.degree. C./sec, and need only be applied for a fraction of a second to elevate the temperature of the carbon-containing material at least approximately 1000.degree. C. Upon terminating the current, the carbon-containing material is subjected to rapid-quenching (cooling). This may take the form of placing one or more of the electrodes in contact with a heat sink, such as a large steel table. The carbon-containing material may be rapidly-heated and rapidly-quenched (RHRQ) repeatedly (e.g., in cycles), until a diamond material is fabricated from the carbon-containing material. The process is advantageously performed in an environment of a "shielding" (inert or non-oxidizing) gas, such as Argon (At), Helium (He), or Nitrogen (N.sub.2). In an embodiment of the invention, the carbon-containing material is polystyrene (e.g., a film) or glassy carbon (e.g., film or powder). In another embodiment of the invention, the carbon-containing material is a polymer, fullerene, amorphous carbon, graphite, or the like. In another embodiment of the invention, one of the electrodes is substrate upon which it is desired to form a diamond coating, and the substrate itself is used as one of the two electrodes. This would be useful for forming a thin-film diamond coating on a cutting tool insert.
摘要翻译：通过将含碳材料夹在两个电极之间的间隙中形成金刚石材料。在两个电极板之间施加高电流电流，以使含碳材料快速加热。该电流足以使至少约5,000℃/秒的速率加热含碳材料，并且仅需要施加一小时，以至少将含碳材料的温度升高至少约1000℃。在终止电流时，对含碳材料进行快速淬火（冷却）。这可以采取将一个或多个电极放置在与散热器（例如大型钢台）接触的形式。可以重复地（例如，循环）将含碳材料快速加热并快速骤冷（RHRQ），直到由含碳材料制造金刚石材料。该方法有利地在诸如氩气（At），氦气（He）或氮气（N 2）的“屏蔽”（惰性或非氧化性）气体的环境中进行。在本发明的一个实施方案中，含碳材料是聚苯乙烯（例如薄膜）或玻璃碳（例如薄膜或粉末）。在本发明的另一个实施方案中，含碳材料是聚合物，富勒烯，无定形碳，石墨等。在本发明的另一个实施例中，电极之一是需要形成金刚石涂层的衬底，并且衬底本身被用作两个电极之一。这对于在切削工具刀片上形成薄膜金刚石涂层是有用的。

8. 发明申请

US20100200411A1 METHOD AND APPARATUS FOR THE SOLUTION DEPOSITION OF OXIDE 审中-公开
标题翻译：用于溶解氧化物沉积的方法和装置
公开(公告)号：US20100200411A1
公开(公告)日：2010-08-12
申请号：US12369022
申请日：2009-02-11
申请人： Shengzhong Liu , Chaolan Hu , Yanhua Zhou , Arindam Banerjee , Jeffrey Yang , Subhendu Guha
发明人： Shengzhong Liu , Chaolan Hu , Yanhua Zhou , Arindam Banerjee , Jeffrey Yang , Subhendu Guha
IPC分类号： C25D5/10
CPC分类号： C25D5/022 , C25D5/18 , C25D5/20 , C25D9/08 , C25D17/00
摘要： A metal and oxygen material such as a transparent electrically conductive oxide material is electro deposited onto a substrate in a solution deposition process. Process parameters are controlled so as to result in the deposition of a high quality layer of material which is suitable for use in a back reflector structure of a high efficiency photovoltaic device The deposition may be carried out in conjunction with a masking member which operates to restrict the deposition of the metal and oxygen material to specific portions of the substrate. In particular instances the deposition may be implemented in a continuous, roll-to-roll process. Further disclosed are semiconductor devices and components of semiconductor devices made by the present process, as well as apparatus for carrying out the process.
摘要翻译：在溶液沉积工艺中，将诸如透明导电氧化物材料的金属和氧材料电沉积到衬底上。控制工艺参数以便导致适合用于高效光伏器件的后反射器结构的高质量材料层的沉积。沉积可以与操作以限制的掩模构件一起进行金属和氧气材料沉积到衬底的特定部分。在特定情况下，沉积可以以连续的卷对卷方式实施。还公开了通过本方法制造的半导体器件和半导体器件的部件以及用于执行该过程的装置。

9. 发明申请

US20080105303A1 Method and Manufacturing Thin Film Photovoltaic Modules 审中-公开
标题翻译：薄膜光伏组件方法与制造
公开(公告)号：US20080105303A1
公开(公告)日：2008-05-08
申请号：US11835474
申请日：2007-08-08
申请人： Robert Oswald , Shengzhong Liu
发明人： Robert Oswald , Shengzhong Liu
IPC分类号： H01L31/04 , B23K26/36 , H01S3/10
CPC分类号： B23K26/03 , B23K26/032 , B23K26/0665 , B23K26/082 , H01L31/046 , H01L31/0463 , H01L31/20 , Y02E10/50
摘要： A method for manufacturing a thin film photovoltaic module comprising series connected cells, the cells comprising a front contact, a back contact and a photovoltaically active region positioned between the front and back contacts, the series connected cell being formed by scribing a front contact layer, a photovoltaically active layer and a back contact layer on a substrate, the method comprising laser scribing at least one of the front contact layer, the photovoltaically active layer or the back contact layer to form laser scribes using a laser beam scanned rapidly over the layer.
摘要翻译：一种制造包括串联连接电池的薄膜光伏组件的方法，所述电池包括位于所述前触点和所述后触头之间的前触点，后触点和光伏活性区域，所述串联连接的单元通过划线前接触层而形成，所述方法包括激光划刻所述前接触层，所述光电活性层或所述背接触层中的至少一个，以使用在所述层上快速扫描的激光束来形成激光划片。

10. 发明授权

US5620512A Diamond film growth from fullerene precursors 失效
标题翻译：富勒烯前体金刚石膜生长
公开(公告)号：US5620512A
公开(公告)日：1997-04-15
申请号：US143866
申请日：1993-10-27
申请人： Dieter M. Gruen , Shengzhong Liu , Alan R. Krauss , Xianzheng Pan
发明人： Dieter M. Gruen , Shengzhong Liu , Alan R. Krauss , Xianzheng Pan
IPC分类号： C01B31/06 , C23C14/06 , C23C16/27 , C30B23/02 , C30B25/10 , C30B33/00 , H01J9/02 , C30B29/04
CPC分类号： C23C16/274 , C01B31/06 , C23C14/0605 , C23C14/0611 , C23C16/27 , C23C16/277 , C30B23/02 , C30B25/105 , C30B29/04 , C30B33/00 , H01J9/025
摘要： A method and system for manufacturing diamond film. The method involves forming a fullerene vapor, providing a noble gas stream and combining the gas with the fullerene vapor, passing the combined fullerene vapor and noble gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the fullerene and deposition of a diamond film on a substrate.
摘要翻译：制造金刚石薄膜的方法和系统。该方法包括形成富勒烯蒸汽，提供惰性气体流并将气体与富勒烯蒸汽组合，将富勒烯蒸气和惰性气体载体流合并到室中，在室中形成等离子体，引起富勒烯的碎裂和沉积在基板上的金刚石膜。

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