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1. 发明授权

US08033885B2 System and method for applying a conformal barrier coating with pretreating 有权
标题翻译：用预应力施加保形屏障涂层的系统和方法
公开(公告)号：US08033885B2
公开(公告)日：2011-10-11
申请号：US12242399
申请日：2008-09-30
申请人： Ahmet Gun Erlat , George Theodore Dalakos , Min Yan , Shelia Neumann Tandon , Brian Joseph Scherer
发明人： Ahmet Gun Erlat , George Theodore Dalakos , Min Yan , Shelia Neumann Tandon , Brian Joseph Scherer
IPC分类号： H05B33/04
CPC分类号： C23C16/0245 , B05D1/62 , C23C16/029 , H01L51/5253 , H01L2251/5346 , Y10T428/24612
摘要： In a method for depositing a barrier coating, a device is provided comprising a first portion and a second portion where a surface of the second portion is in a shadow zone. The device is pretreated wherein the pretreating alters a deposition rate of the barrier coating on a surface exposed to the pretreating. The shadow zone is substantially unexposed to the pretreating. A barrier coating is deposited wherein the barrier coating substantially conforms to a profile of the device. The coating may be a graded-composition barrier coating wherein a composition of the coating varies substantially continuously across a thickness thereof. The first portion may include a flexible, substantially transparent substrate. The second portion may include an electronic device. The barrier coating and first portion may encapsulate the second portion. The method is a single, commercially advantageous, barrier deposition process, enabling increased product throughput and low process tact time.
摘要翻译：在用于沉积阻挡涂层的方法中，提供了包括第一部分和第二部分的装置，其中第二部分的表面处于阴影区域。该装置被预处理，其中预处理改变了暴露于预处理的表面上的阻挡涂层的沉积速率。阴影区域基本上未被暴露于预处理。沉积阻挡涂层，其中阻挡涂层基本上符合设备的轮廓。涂层可以是梯度组合物阻挡涂层，其中涂层的组合物在其厚度上基本连续地变化。第一部分可以包括柔性的，基本上透明的基底。第二部分可以包括电子设备。阻挡涂层和第一部分可以封装第二部分。该方法是单一的，商业上有利的阻隔沉积工艺，能够提高产品生产量和低工艺节拍时间。

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