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    • 3. 发明授权
    • Method for fabricating nonvolatile memory device
    • 非易失性存储器件的制造方法
    • US07105455B2
    • 2006-09-12
    • US10749843
    • 2003-12-31
    • Seung Jong Yoo
    • Seung Jong Yoo
    • H01L21/302
    • H01L21/28273
    • A method of fabricating a nonvolatile memory device is disclosed. First, a lower insulating layer and a sacrificial layer are formed in sequence on a substrate. Then, a sacrificial layer pattern is formed through removing some part of the sacrificial layer by an etching process to expose some part of the lower insulating layer. At the same time, spacers are formed on sidewalls of the sacrificial layer pattern. The spacers are formed of polymers resulting from the etching of the sacrificial layer. The exposed lower insulating layer is removed to form a lower insulating layer pattern. Next, the sacrificial layer pattern and the spacers are removed. Accordingly, linewidth of a tunnel window which defined by the insulating layer pattern becomes narrow.
    • 公开了一种制造非易失性存储器件的方法。 首先,在基板上依次形成下绝缘层和牺牲层。 然后,通过通过蚀刻工艺去除一部分牺牲层来形成牺牲层图案以暴露下部绝缘层的一部分。 同时,在牺牲层图案的侧壁上形成间隔物。 间隔物由蚀刻牺牲层产生的聚合物形成。 去除暴露的下绝缘层以形成较低的绝缘层图案。 接下来,除去牺牲层图案和间隔物。 因此,由绝缘层图案限定的隧道窗的线宽变窄。